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    • 3. 发明申请
    • Acoustic wave transducer with transverse mode suppression
    • 具有横向模式抑制的声波换能器
    • US20070018755A1
    • 2007-01-25
    • US10563890
    • 2004-06-16
    • Markus MayerRalph StommerGunter KovacsAndreas BergmannPasi Tikka
    • Markus MayerRalph StommerGunter KovacsAndreas BergmannPasi Tikka
    • H03H9/64
    • H03H9/02992H03H9/02881H03H9/14532H03H9/1455
    • The invention relates to a transducer that works with surface acoustic waves in which interfering transversal modes are suppressed. This is accomplished by mutually adapting to one another the transversal excitation profile of the acoustic wave and the transversal basic mode of the waveguide formed by the acoustic spur and adjacent exterior areas. This adaptation is accomplished by dividing the acoustic spur into an excitation area and marginal areas, whereby the width of a marginal area is approximately one-quarter wavelength of the transversal basic mode, and whereby the wave number of the transversal basic mode in the excitation area is zero. In one advantageous further development of the invention, an excitation strength that is a function of the transversal coordinate can be attained that is optimally adapted to the basic mode by dividing the excitation area in the transversal direction into partial spurs that are wired to one another serially and/or in parallel.
    • 本发明涉及一种能够抑制干扰横向模式的表面声波工作的换能器。 这是通过彼此相互适应的声波的横向激励分布和由声学支线和相邻的外部区域形成的波导的横向基本模式来实现的。 这种适应是通过将声学刺激分成激发区域和边缘区域来实现的,由此边缘区域的宽度大约是横向基本模式的四分之一波长,并且由此激励区域中的横向基本模式的波数 是零。 在本发明的一个有利的进一步发展中,可以获得作为横向坐标的函数的激励强度,其通过将横向方向上的激励区域划分为相互连接的部分马刺来最佳地适应于基本模式 和/或并行。
    • 4. 发明申请
    • Method for fabricating a semiconductor device
    • 半导体器件的制造方法
    • US20060211261A1
    • 2006-09-21
    • US11084728
    • 2005-03-18
    • Ralph Stommer
    • Ralph Stommer
    • H01L21/336
    • H01L21/26506H01L21/324H01L29/0847H01L29/1054H01L29/78
    • The present invention relates to a method for fabricating a semiconductor device. In order to provide for a high carrier mobility in an active region of the device, germanium atoms are implanted into a surface of a semiconductor substrate such that a germanium-containing layer inside the semiconductor substrate is formed. Then, the surface of the semiconductor surface is oxidized down to and including the upper part of the germanium-containing layer, thereby pushing the implanted germanium atoms from the surface down into the semiconductor substrate and thereby enhancing the germanium concentration inside the remaining germanium-containing layer and forming a layer with enhanced germanium concentration inside the semiconductor substrate. The fabrication of the semiconductor device is concluded such that the active region of the device is placed at least partly within the layer with enhanced germanium concentration.
    • 本发明涉及半导体器件的制造方法。 为了在器件的有源区域中提供高载流子迁移率,锗原子被注入到半导体衬底的表面中,使得形成半导体衬底内的含锗层。 然后,将半导体表面的表面氧化到含锗层的上部并包括其上部,从而将注入的锗原子从表面向下推入半导体衬底,从而提高剩余的含锗层内的锗浓度 并且在半导体衬底内形成具有增强的锗浓度的层。 结论是半导体器件的制造使得器件的有源区域至少部分地放置在具有增强的锗浓度的层内。
    • 7. 发明申请
    • Apparatus and method for structure exposure of a photoreactive layer
    • 光反应层结构曝光的装置和方法
    • US20050244725A1
    • 2005-11-03
    • US11120660
    • 2005-05-02
    • Ralph Stommer
    • Ralph Stommer
    • G03B27/42G03C5/00G03F1/00G03F7/20G03F9/00G06F17/50
    • G03F1/50G03F1/38
    • Exposure apparatus for structure exposure of a photoreactive material of a photoreactive layer with electromagnetic radiation, having a radiation source of electromagnetic radiation at a predetermined wavelength λ, a mask device in a form of a plate and having input and output faces for electromagnetic radiation. The mask device has a mask structure element composed of a mask material, which has a predetermined refractive index ncore at the wavelength of the electromagnetic radiation, and a surrounding material which is adjacent to surfaces of the mask structure element, which run essentially at right angles to an x direction and have a refractive index nxclad at the predetermined wavelength, with the x direction being a predetermined direction parallel to a plate level of the mask device, and having predetermined mathematical relationships between the variables ncore, nxclad, λ and dxcore, with dxcore being the extent of the mask structure element in the x direction.
    • 用于具有电磁辐射的光反应层的光反应性材料结构曝光的曝光装置,具有预定波长λ的电磁辐射辐射源,板形式的掩模装置,并具有用于电磁辐射的输入和输出面。 掩模装置具有掩模结构元件,该掩模结构元件由在电磁辐射波长处具有预定折射率的核心的掩模材料构成,并且与掩模结构的表面相邻的周围材料 元件,其基本上与x方向成直角,并且具有预定波长的折射率n×xadad,x方向是平行于掩模装置的板级的预定方向,以及 在变量n ,n×xclad,λ和d xcore之间具有预定的数学关系,其中d xcore 为 掩模结构元件在x方向上的程度。