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    • 7. 发明申请
    • LASER MULTIPLEXING
    • 激光多路复用
    • WO2005081372A2
    • 2005-09-01
    • PCT/GB2005/000608
    • 2005-02-21
    • POWERLASE LTDCOMLEY, Andrew, JamesELLWI, Samir, ShakirHAY, NickHENRY, Matthew
    • COMLEY, Andrew, JamesELLWI, Samir, ShakirHAY, NickHENRY, Matthew
    • H01S5/00
    • G02B27/0955B23K26/0604B23K26/0608B23K26/067B82Y10/00G02B27/0905G02B27/0972G03F7/70033G03F7/7005
    • A laser multiplexing system and method for use with high power pulsed lasers in Extreme Ultraviolet Lithography. In a first embodiment, a high power EUV laser multiplexing element (200) for laser produced plasma generation comprises a compound lens comprising at least two focusing elements (210) arrange to focus at least two respective laser beams (208) to a focal point (204) on a common workpiece. In a second embodiment, a laser multiplexing apparatus comprises at least two pulsed laser sources for generating pulsed laser beams and a temporal multiplexing element (302) arranged to temporally interleave at least two pulsed laser beams (300). In a third embodiment, laser multiplexing assembly comprises a beam shaping element (401) in which the beam shaping element is arranged to direct a first laser beam (406a) along an axis common with a second laser beam (406b) axis onto a common focussing element (405) arranges about said common axis.
    • 一种用于极紫外光刻技术的大功率脉冲激光器的激光复用系统和方法。 在第一实施例中,用于激光产生等离子体产生的高功率EUV激光复用元件(200)包括复合透镜,该复合透镜包括至少两个聚焦元件(210),其布置成将至少两个相应的激光束(208)聚焦到焦点 204)在公共工件上。 在第二实施例中,激光多路复用装置包括用于产生脉冲激光束的至少两个脉冲激光源和设置成在时间上交错至少两个脉冲激光束(300)的时间多路复用元件(302)。 在第三实施例中,激光多路复用组件包括光束成形元件(401),其中光束成形元件布置成沿着与第二激光束(406b)轴线共同的轴将第一激光束(406a)引导到公共聚焦 元件(405)围绕所述公共轴线布置。