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1. 发明授权

US5502290A Switch mechanism 失效
标题翻译：开关机构
公开(公告)号：US5502290A
公开(公告)日：1996-03-26
申请号：US483878
申请日：1995-06-07
申请人： Osamu Koyanagi , Kunio Hirasawa , Masanori Tsukushi , Yukio Kurosawa , Tadashi Sato , Youichi Ohshita
发明人： Osamu Koyanagi , Kunio Hirasawa , Masanori Tsukushi , Yukio Kurosawa , Tadashi Sato , Youichi Ohshita
IPC分类号： H01H33/34 , H01H33/56
CPC分类号： H01H33/34 , H01H33/563
摘要： A switching mechanism for use e.g. in a circuit breaker of an underground electric substation has a movable rod which causes opening and closing of an electrical contact and a hydraulic operating system. The hydraulic operating system uses a hydraulic fluid which has a high flammability temperature or is incombustible. Thus, even if such fluid leaks from the hydraulic operating system, the risk of fire or explosion is minimized. The hydraulic operating system may have a sealed tank for the fluid, preferably with a variable volume expansion chamber. In a further development, the hydraulic operating system and possibly parts of the movable rod, is enclosed in a casing which is sealed and is filled with a gas which does not support combustion therein. Thus, the risk of fire or explosion is further reduced. The casing may have a variable volume expansion chamber.
摘要翻译：一种切换机制。在地下电力变电站的断路器中具有使电触头和液压操作系统打开和关闭的活动杆。液压操作系统使用具有高可燃性温度或不燃的液压油。因此，即使这种液体从液压操作系统泄漏，也会使火灾或爆炸的风险最小化。液压操作系统可以具有用于流体的密封罐，优选地具有可变体积膨胀室。在进一步的发展中，液压操作系统和可能的可移动杆的部分被封装在密封的壳体中并且填充有不支持燃烧的气体。因此，进一步降低了火灾或爆炸的危险。壳体可以具有可变体积膨胀室。

2. 发明授权

US5563459A Apparatus for controlling opening and closing timings of a switching device in an electric power system 失效
标题翻译：一种用于控制电力系统中的开关装置的开闭定时的装置
公开(公告)号：US5563459A
公开(公告)日：1996-10-08
申请号：US613132
申请日：1990-11-15
申请人： Yukio Kurosawa , Hiroshi Arita , Kunio Hirasawa , Tadashi Sato
发明人： Yukio Kurosawa , Hiroshi Arita , Kunio Hirasawa , Tadashi Sato
IPC分类号： H01H33/59 , F02B75/02 , H01H9/54 , H01H9/56
CPC分类号： H01H9/56 , F02B2075/027 , H01H9/563 , Y10T307/957
摘要： An apparatus for controlling a switching device provided for breaking or closing a power line connecting a power source to a load in an electric power system includes a switching timing control unit for controlling the timing to apply a breaking signal to said switching device in response to a breaking signal externally applied thereto so that the contacts of said switching device are opened during a period of time when the current flowing through said power line first reaches its peak value from a zero value and for controlling the timing of applying a closing signal to said switching device in response to a closing command preferably externally applied thereto so that the contacts of said switching device are closed when the voltage of said power source becomes a predetermined value depending upon whether said load is capacitive or inductive, and an operating unit for opening and closing said contacts of said switching device in response to said breaking and closing signals, respectively.
摘要翻译：一种用于控制开关装置的装置，其用于断开或关闭将电源连接到电力系统中的负载的电力线路，包括切换定时控制单元，用于响应于所述切换装置控制对所述开关装置施加断路信号的定时在外部施加的断开信号，使得在流经所述电力线的电流首先从零值到达其峰值的时间段期间，所述开关装置的触点断开，并且用于控制将闭合信号施加到所述开关的定时装置，其响应于优选地外部施加到其上的关闭命令，使得当所述电源的电压根据所述负载是电容性还是电感而变为预定值时，所述开关装置的触点闭合，以及用于打开和关闭的操作单元所述开关装置的所述触点响应于所述断开和闭合信号太好了

3. 发明授权

US4847476A Ion source device 失效
标题翻译：离子源装置
公开(公告)号：US4847476A
公开(公告)日：1989-07-11
申请号：US942635
申请日：1986-12-17
申请人： Tadashi Sato , Yasunori Ohno , Tomoe Kurosawa , Nobuya Sekimoto , Yoshimi Hakamata , Yukio Kurosawa , Kunio Hirasawa
发明人： Tadashi Sato , Yasunori Ohno , Tomoe Kurosawa , Nobuya Sekimoto , Yoshimi Hakamata , Yukio Kurosawa , Kunio Hirasawa
IPC分类号： H01L21/265 , H01J27/08 , H01J27/14
CPC分类号： H01J27/14
摘要： An ion source device comprises a plasma generating vessel for generating plasma therein, a plurality of magnets arranged on an outer periphery of the plasma generating vessel to establish a cusp field in the plasma generating vessel, means for supplying a power to generate the plasma in the plasma generating vessel, and an anode electrode arranged on an inner wall of the plasma generating vessel and adapted to be heated by electrons emitted from the plasma and maintain the heat.
摘要翻译：离子源装置包括用于在其中产生等离子体的等离子体发生容器，布置在等离子体发生容器的外周上的多个磁体，以在等离子体发生容器中建立尖端场，用于在等离子体发生容器中提供电力以产生等离子体的装置等离子体发生容器和布置在等离子体发生容器的内壁上并适于被从等离子体发射的电子加热并保持热量的阳极电极。

4. 发明授权

US4739169A Ion source 失效
标题翻译：离子源
公开(公告)号：US4739169A
公开(公告)日：1988-04-19
申请号：US914196
申请日：1986-10-01
申请人： Yukio Kurosawa , Yoshimi Hakamata , Yasunori Ohno , Kunio Hirasawa , Tadashi Sato
发明人： Yukio Kurosawa , Yoshimi Hakamata , Yasunori Ohno , Kunio Hirasawa , Tadashi Sato
IPC分类号： H01J27/08 , H01J27/18 , H01J37/08 , H05H1/24
CPC分类号： H01J37/08 , H01J27/18
摘要： An ion beam for use in fabrication and processing of semiconductors, thin films or the like. For making uniform the radial distribution of an ion beam extracted from the ion source, a plasma chamber is formed by extending a plasma producing chamber in the direction in which microwave energy is introduced. The plasma chamber thus formed is provided with second magnetic means for generating a magnetic field of multicusp geometry.
摘要翻译：用于制造和加工半导体，薄膜等的离子束。为了使从离子源提取的离子束的径向分布均匀，通过在引入微波能量的方向上延伸等离子体产生室来形成等离子体室。如此形成的等离子体室设置有用于产生多重几何形状的磁场的第二磁性装置。

5. 发明授权

US4716491A High frequency plasma generation apparatus 失效
标题翻译：高频等离子体发生装置
公开(公告)号：US4716491A
公开(公告)日：1987-12-29
申请号：US806341
申请日：1985-12-09
申请人： Yasunori Ohno , Tomoe Kurosawa , Tadashi Sato , Youichi Ohshita
发明人： Yasunori Ohno , Tomoe Kurosawa , Tadashi Sato , Youichi Ohshita
IPC分类号： H01J37/08 , H01J27/08 , H01J37/32 , H01L21/302 , H05H1/11 , H05H1/16
CPC分类号： H01J37/321 , H01J37/32623 , H01J37/32688 , H05H1/11
摘要： In a high frequency plasma generation apparatus used in a reactive ion etching apparatus, an ion shower apparatus, a sputter apparatus, etc. for fabricating thin films or semiconductor devices for which a fine patterning process is required, electrical breakdown is apt to be provoked at the surface of a high frequency coil, because the high frequency coil is usually inserted in a plasma. In order to remove this drawback, according to this invention, the high frequency coil is disposed in the plasma production chamber at the neighborhood of the cylindrical side wall, and thus a plasma confinement domain is formed inside of this high frequency coil by use of a magnetic field production device which generates a multi-cusp magnetic field so that the plasma confinement domain is separated from the high frequency coil. In this way, electrical breakdown on the surface of the high frequency coil is prevented and thus the apparatus according to this invention can work stably for a long time.
摘要翻译：在用于反应离子蚀刻装置的高频等离子体发生装置中，用于制造需要精细图案化工艺的薄膜或半导体装置的离子淋浴装置，溅射装置等，易于在高频线圈的表面，因为高频线圈通常插入等离子体中。为了消除这个缺陷，根据本发明，高频线圈设置在等离子体生产室中，在圆筒形侧壁附近，因此通过使用高频线圈形成等离子体约束区域磁场产生装置，其产生多尖点磁场，使得等离子体约束区域与高频线圈分离。以这种方式，可以防止高频线圈表面的电击穿，从而本发明的装置可以长时间稳定工作。

6. 发明授权

US4865709A Magnetron sputter apparatus and method for forming films by using the same apparatus 失效
标题翻译：磁控溅射装置和使用相同装置形成薄膜的方法
公开(公告)号：US4865709A
公开(公告)日：1989-09-12
申请号：US207537
申请日：1988-06-16
申请人： Yukio Nakagawa , Ken-ichi Natsui , Youichi Ohshita , Tadashi Sato , Eiji Setoyama , Mitsuhiro Kamei
发明人： Yukio Nakagawa , Ken-ichi Natsui , Youichi Ohshita , Tadashi Sato , Eiji Setoyama , Mitsuhiro Kamei
IPC分类号： C23C14/35 , H01J37/34
CPC分类号： H01J37/3423 , C23C14/35 , H01J37/3408 , H01J37/347
摘要： A magnetron sputter apparatus according to the present invention is constructed so as to satisfy a predetermined optimum relationship between the size of the erosion area on the surface of the target and that of a film forming region. Further, the distance between the target and substrates has a value predetermined for the relationship between the size of the erosion area on the surface of the target and that of the film forming region. By using the magnetron sputter apparatus according to the present invention it is possible to form a homogeneous thin film excellent in step coverage and having a film thickness distribution in which variations are small over a large area.
摘要翻译：根据本发明的磁控溅射装置被构造成满足目标表面上的侵蚀区域的大小与成膜区域的预定最佳关系。此外，靶和基板之间的距离具有对于靶的表面上的侵蚀区域的尺寸与成膜区域的尺寸之间的关系预定的值。通过使用根据本发明的磁控溅射装置，可以形成具有优异的台阶覆盖率并且具有在大面积上变化小的膜厚度分布的均匀薄膜。

7. 发明授权

US5133825A Plasma generating apparatus 失效
标题翻译：等离子体发生装置
公开(公告)号：US5133825A
公开(公告)日：1992-07-28
申请号：US178613
申请日：1988-04-07
申请人： Yoshimi Hakamata , Ken-ichi Natsui , Yukio Kurosawa , Tadashi Sato , Hiroaki Kojima , Yasunori Ohno , Tomoe Kurosawa
发明人： Yoshimi Hakamata , Ken-ichi Natsui , Yukio Kurosawa , Tadashi Sato , Hiroaki Kojima , Yasunori Ohno , Tomoe Kurosawa
IPC分类号： H01J37/32
CPC分类号： H01J37/32357
摘要： An apparatus for generating plasma by making use of electron cyclotron resonance employs permanent magnets for forming magnetic fields, and the permanent magnets are arranged in such a manner as to form stronger magnetic fields in peripheral portion of a plasma chamber than in a central portion of the same. in addition, a cross-sectional area of the plasma chamber is gradually increased. Furthermore, electrons are introduced into an additional plasma chamber in which an electric field is not applied so as to generate low-temperature plasma.

8. 发明授权

US4851668A Ion source application device 失效
标题翻译：离子源应用装置
公开(公告)号：US4851668A
公开(公告)日：1989-07-25
申请号：US35031
申请日：1987-04-06
申请人： Tasunori Ohno , Tomoe Kurosawa , Tadashi Sato , Yukio Kurosawa , Yoshimi Hakamata
发明人： Tasunori Ohno , Tomoe Kurosawa , Tadashi Sato , Yukio Kurosawa , Yoshimi Hakamata
IPC分类号： C23C14/48 , C23F4/00 , G21K5/04 , H01J27/16 , H01J27/20 , H01J27/24 , H01J37/08 , H01J37/305 , H01J37/317
CPC分类号： H01J37/32009 , H01J27/16 , H01J27/20 , H01J27/24 , H01J37/08 , H01J2237/0041
摘要： An ion source application device comprising a gas tight plasma formation chamber sustaining a plasma produced by high frequency discharge, a high frequency coil producing the high frequency discharge, and means for extracting an ion beam from the plasma thus produced, characterized in that it comprises further an electron beam generator or a laser light generator as means for obtaining electrons serving as seeds for starting the high frequency discharge.
摘要翻译：一种离子源施加装置，其特征在于，包括：保持由高频放电产生的等离子体的气密等离子体形成室，产生高频放电的高频线圈，以及用于从由此产生的等离子体中提取离子束的装置，其特征在于，电子束发生器或激光发生器作为用于获得用于启动高频放电的种子的电子的装置。

9. 发明授权

US4713585A Ion source 失效
标题翻译：离子源
公开(公告)号：US4713585A
公开(公告)日：1987-12-15
申请号：US911790
申请日：1986-09-26
申请人： Yasunori Ohno , Tomoe Kurosawa , Tadashi Sato , Yukio Kurosawa , Yoshimi Hakamata
发明人： Yasunori Ohno , Tomoe Kurosawa , Tadashi Sato , Yukio Kurosawa , Yoshimi Hakamata
IPC分类号： H01J27/08 , H01J27/14 , H01J27/18 , H01J37/08 , H01J7/24
CPC分类号： H01J27/14 , H01J27/18 , H01J37/08
摘要： An ion source for producing an ion beam utilized for fabrication and processing of semiconductors, thin films or the like includes a plasma producing chamber equipped with first magnetic means for limiting a plasma region and a plasma expansion chamber provided in combination with the plasma producing chamber on the side where a beam extracting electrode is disposed. The plasma expansion chamber is provided with second magnet array for confining and holding a plasma region therein which is of a larger area than that of the plasma region formed in the plasma producing chamber.
摘要翻译：用于制造用于半导体，薄膜等的制造和加工的离子束的离子源包括：等离子体产生室，其配备有用于限制等离子体区域的第一磁性装置和与等离子体产生室组合设置的等离子体膨胀室设置光束提取电极的一侧。等离子体膨胀室设置有第二磁体阵列，用于限制和保持其中等离子体区域的面积大于等离子体产生室中形成的等离子体区域的面积。

10. 发明申请

US20130219414A1 INFORMATION PROCESSING DEVICE, SYSTEM, CONTROL METHOD, AND PROGRAM 有权
标题翻译：信息处理设备，系统，控制方法和程序
公开(公告)号：US20130219414A1
公开(公告)日：2013-08-22
申请号：US13882375
申请日：2011-11-01
申请人： Tadashi Sato
发明人： Tadashi Sato
IPC分类号： G06F9/54
CPC分类号： G06F9/542 , G06F13/00 , G06F2209/544
摘要： An information processing device reduces a time of processing for adding an attribute name performed in each node.An information processing device includes: its own-segment memorizing means for memorizing its own segment, the own segment being at least one segment among each segment made by dividing a range of a key into a plurality of segments so as to make the segments neighbor with each other, the key being generated about at least two attribute names using an attribute name and an attribute value based on a specified order relation and being of a size-comparable form; and a judgment means for judging whether a key generated from an attribute name and an attribute value being included in the own-segment or not.
摘要翻译：信息处理设备减少了在每个节点中添加属性名称的处理时间。信息处理装置包括：其自身段存储装置，用于存储其自己的段，其自身段是通过将密钥的范围分成多个段而制成的每个段中的至少一个段，以使该段与使用属性名称和基于指定顺序关系的属性值来生成关于至少两个属性名称的关键字，并且具有大小可比较的形式; 以及判断装置，用于判断从属性名称生成的密钥和属性值是否包括在自身段中。

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