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1. 发明授权

US06552340B1 Autoadjusting charged-particle probe-forming apparatus 有权
标题翻译：自动调整带电粒子探针形成装置
公开(公告)号：US06552340B1
公开(公告)日：2003-04-22
申请号：US09686805
申请日：2000-10-12
申请人： Ondrej L. Krivanek , Niklas Dellby , Andrew R. Lupini
发明人： Ondrej L. Krivanek , Niklas Dellby , Andrew R. Lupini
IPC分类号： H01J3721
CPC分类号： H01J37/153 , H01J37/21 , H01J37/28
摘要： An autoadjusting charged-particle probe-forming apparatus improving the resolution of probe-forming charged-particle optical systems by minimizing optical aberrations. The apparatus comprises a source of charged particles, a probe-forming system of charged-particle lenses, a plurality of detectors optionally comprising a two-dimensional image detector, power supplies, a computer and appropriate software. Images are recorded by the two-dimensional detector and analyzed to determine the aberration characteristics of the apparatus. Alternately, multiple scanned images are recorded by a scanned image detector and also analyzed to determine the aberration characteristics of the apparatus. The aberration characteristics are used to automatically adjust the apparatus for improved optical performance.
摘要翻译：一种自动调节带电粒子探针形成装置，通过最小化光学像差来提高探针形成带电粒子光学系统的分辨率。该装置包括带电粒子源，带电粒子透镜的探针形成系统，可选地包括二维图像检测器的多个检测器，电源，计算机和适当的软件。图像由二维检测器记录并进行分析，以确定装置的像差特性。或者，多个扫描图像由扫描图像检测器记录，并且还被分析以确定装置的像差特性。像差特性用于自动调整装置以改善光学性能。

2. 发明申请

US20120074315A1 High resolution energy-selecting electron beam apparatus 有权
标题翻译：高分辨率能量选择电子束装置
公开(公告)号：US20120074315A1
公开(公告)日：2012-03-29
申请号：US12924320
申请日：2010-09-24
申请人： Ondrej L. Krivanek , Niklas Dellby
发明人： Ondrej L. Krivanek , Niklas Dellby
IPC分类号： G01N23/225 , G01N23/00
CPC分类号： H01J37/05 , H01J2237/053 , H01J2237/055 , H01J2237/1532 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and optionally also for improving the spatial resolution by correcting chromatic and geometric aberrations. The apparatus comprises a plurality of magnetic or electrostatic prisms that disperse an electron beam according to the energies of the electrons into an energy spectrum, a plurality of magnifying lenses such as electromagnetic or electrostatic quadrupoles that increase the energy dispersion of the energy spectrum, an energy-selecting slit that selects a desirable range of energies of the electrons, and optionally also sextupole, octupole and higher-order lenses that correct chromatic and geometric aberration of the electron-optical system. The apparatus also comprises further magnetic or electrostatic prisms and electron lenses arranged such that the energy dispersion of the electron beam emerging from the apparatus is cancelled.
摘要翻译：一种高分辨率能量选择电子束装置和方法，用于通过限制允许的电子的能量范围来改善电子 - 光学系统的能量分辨率，并且还可以通过校正彩色和几何像差来提高空间分辨率。该装置包括根据电子能量将电子束分散到能谱中的多个磁性或静电棱镜，增加能谱的能量分散的多个放大透镜，例如电磁或静电四极，能量选择狭缝，其选择电子的所需能量范围，以及任选地还可以校正电子 - 光学系统的彩色和几何像差的六极，八极和高阶透镜。该装置还包括进一步的磁性或静电棱镜和电子透镜，其布置成使得从装置出射的电子束的能量色散被消除。

3. 发明授权

US08373137B2 High resolution energy-selecting electron beam apparatus 有权
标题翻译：高分辨率能量选择电子束装置
公开(公告)号：US08373137B2
公开(公告)日：2013-02-12
申请号：US12924320
申请日：2010-09-24
申请人： Ondrej L. Krivanek , Niklas Dellby
发明人： Ondrej L. Krivanek , Niklas Dellby
IPC分类号： H01J3/26
CPC分类号： H01J37/05 , H01J2237/053 , H01J2237/055 , H01J2237/1532 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and optionally also for improving the spatial resolution by correcting chromatic and geometric aberrations. The apparatus comprises a plurality of magnetic or electrostatic prisms that disperse an electron beam according to the energies of the electrons into an energy spectrum, a plurality of magnifying lenses such as electromagnetic or electrostatic quadrupoles that increase the energy dispersion of the energy spectrum, an energy-selecting slit that selects a desirable range of energies of the electrons, and optionally also sextupole, octupole and higher-order lenses that correct chromatic and geometric aberration of the electron-optical system. The apparatus also comprises further magnetic or electrostatic prisms and electron lenses arranged such that the energy dispersion of the electron beam emerging from the apparatus is cancelled.
摘要翻译：一种高分辨率能量选择电子束装置和方法，用于通过限制允许的电子的能量范围来改善电子 - 光学系统的能量分辨率，并且还可以通过校正彩色和几何像差来提高空间分辨率。该装置包括根据电子能量将电子束分散到能谱中的多个磁性或静电棱镜，增加能谱的能量分散的多个放大透镜，例如电磁或静电四极，能量选择狭缝，其选择电子的所需能量范围，以及任选地还可以校正电子 - 光学系统的彩色和几何像差的六极，八极和高阶透镜。该装置还包括进一步的磁性或静电棱镜和电子透镜，其布置成使得从装置出射的电子束的能量色散被消除。

4. 发明授权

US06770887B2 Aberration-corrected charged-particle optical apparatus 失效
标题翻译：经畸变校正的带电粒子光学装置
公开(公告)号：US06770887B2
公开(公告)日：2004-08-03
申请号：US10189855
申请日：2002-07-08
申请人： Ondrej L. Krivanek , Peter D. Nellist , Niklas Dellby
发明人： Ondrej L. Krivanek , Peter D. Nellist , Niklas Dellby
IPC分类号： G21R510
CPC分类号： H01J37/153
摘要： Aberration-corrected charged-particle optical apparatus improving the resolution of charged-particle optical systems by eliminating or minimizing optical aberrations. The apparatus comprises a source of charged particles and a plurality of charged-particle lenses including non-round lenses, energized in such manner so as to correct axial aberrations of orders up to and including fifth order. The non-round lenses comprise quadrupoles and octupoles disposed in such manner that fifth order combination aberrations are precisely controlled in addition to third order aberrations. The resultant apparatus very significantly improves on resolution attainable with non-aberration corrected charged-particle round lenses. It also improves on resolution attainable with correctors of third order aberrations only.
摘要翻译：经偏振校正的带电粒子光学装置通过消除或最小化光学像差来提高带电粒子光学系统的分辨率。该装置包括带电粒子源和包括非圆形透镜的多个带电粒子透镜，以这样的方式被激励，以校正直到并包括五阶的阶数的轴向像差。非圆形透镜包括以这样的方式布置的四极和八极，除了三阶像差之外，精确地控制五阶组合像差。所得到的装置非常显着地提高了用无像差校正的带电粒子圆形透镜可达到的分辨率。它也提高了只有三阶像差校正器可达到的分辨率。

5. 发明授权

US5946033A Method and apparatus for multiple read-out speeds for a CTD 失效
标题翻译：用于CTD多种读出速度的方法和装置
公开(公告)号：US5946033A
公开(公告)日：1999-08-31
申请号：US654398
申请日：1996-05-28
申请人： Paul Edward Mooney , Ondrej L. Krivanek , Niklas Dellby
发明人： Paul Edward Mooney , Ondrej L. Krivanek , Niklas Dellby
IPC分类号： H04N5/335 , H04N5/341 , H04N3/14
CPC分类号： H04N5/335 , H04N3/155
摘要： A method and apparatus are provided for CTD imaging device multiple read-out speeds with optimized operation at all of the available speeds. Image signals from a CTD imaging device are digitally sampled at a defined frequency with the read-out electronics being matched to the defined frequency for optimum operation at that frequency. Digital samples taken during both a first (reset reference) portion of each image signal and a second (image voltage) portion of each image signal are then discarded if taken during a noisy/unstable part of the image signal or accumulated and averaged if taken during a stable part of the image signal. The accumulated and averaged digital samples are then algebraically combined to produce signals representative of an image generated by the CTD imaging device. The read-out speed of the CTD imaging device is a fraction of the sampling speed and can be selected by setting an integer divisor for the defined sampling frequency. Selected ones of the samples are retained based on the selected read-out speed. For the fastest read-out speed, the number of samples taken per imaging signal is one and the divisor is equal to one. Selected slower speeds determine which samples are discarded and which samples are accumulated, averaged and combined to produce signals representative of an image generated by the CTD imaging device.
摘要翻译：提供了一种用于CTD成像设备多个读出速度并且在所有可用速度下优化操作的方法和装置。来自CTD成像设备的图像信号以定义的频率进行数字采样，读出的电子元件与定义的频率匹配，以在该频率下进行最佳操作。在每个图像信号的第一（复位参考）部分和每个图像信号的第二（图像电压）部分）期间拍摄的数字样本然后如果在图像信号的噪声/不稳定部分期间被采集则被丢弃，或者如果在图像信号的稳定部分。然后将积累的和平均的数字样本代数组合以产生表示由CTD成像装置产生的图像的信号。 CTD成像设备的读出速度是采样速度的一小部分，可以通过为定义的采样频率设置整数除数来选择。所选择的样本被保留基于所选择的读出速度。为了获得最快的读出速度，每个成像信号采集的采样数为1，除数等于1。所选较慢的速度决定哪些样本被丢弃，哪些样本被累积，平均和组合以产生表示CTD成像设备产生的图像的信号。

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