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1. 发明申请

WO2022043694A1 SAMPLE PREPARATION METHOD AND APARATUS 审中-公开
公开(公告)号：WO2022043694A1
公开(公告)日：2022-03-03
申请号：PCT/GB2021/052221
申请日：2021-08-26
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： LINDSAY, John , TRIMBY, Patrick , STATHAM, Peter , SCHMIDT, Niels-Henrik , THOMSEN, Knud
IPC分类号： G01N1/28 , G01N1/32 , H01J37/305
摘要： The invention relates to a method of preparing a sample for analysis. The method comprises: providing a sample comprising a surface region of interest on a first face of the sample and a second face oriented at an angle to the first face about a common edge between the first and second faces, the second face extending between the common edge and a second edge on the opposing side of the second face of the sample; and milling the second face of the sample to provide a trench in the surface of the second face, the trench extending from a first position on the second face between the common edge and the second edge to a second position adjacent to the common edge; wherein the trench is arranged so as to provide an electron transparent sample layer comprising the surface region of interest. By milling the second face of the sample only, a surface region of interest on the first face of the sample is fully preserved and remains free of milling beam induced damage. This allows for correlative characterisation work which requires both an electron transparent sample and a fully intact sample surface to obtain surface-sensitive data.

2. 发明申请

WO2014125295A1 METHOD OF ELECTRON BEAM DIFFRACTION ANALYSIS 审中-公开
标题翻译：电子束衍射分析方法
公开(公告)号：WO2014125295A1
公开(公告)日：2014-08-21
申请号：PCT/GB2014/050444
申请日：2014-02-14
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： PENMAN, Charles , SCHMIDT, Niels-Henrik , THOMSEN, Knud
IPC分类号： G01N23/203
CPC分类号： G01N23/203 , H01J37/261
摘要： A method is provided for analysing electron backscatter diffraction data generated from a sample material. An image data set representative of an image of electron backscatter diffraction bands is obtained from the sample material. A set of estimated first diffraction parameters is then generated, these defining individual electron backscatter diffraction bands in the image data set. A candidate phase is then selected together with a respective orientation for the material,based upon the generated set of estimated parameters thereby identifying diffraction bands in the image data set. Second diffraction parameters of the identified diffraction bands are simulated for the candidate phase according to the respective orientation. These second diffraction parameters are then adjusted for the identified simulated bands so as to fit the simulated bands to the bands in the image data. A fitted orientation for the candidate phase is then calculated together with a corresponding fitting parameter defining the quality of fit.
摘要翻译：提供了一种用于分析从样品材料产生的电子反向散射衍射数据的方法。从样品材料获得代表电子反向散射衍射带的图像的图像数据集。然后产生一组估计的第一衍射参数，这些定义了图像数据集中的各个电子反向散射衍射带。然后基于生成的估计参数集合，选择候选相位与材料的相应取向，从而识别图像数据集中的衍射带。根据相应的取向，针对候选相模拟识别的衍射带的第二衍射参数。然后对于所识别的模拟频带调整这些第二衍射参数，以便将模拟频带拟合到图像数据中的频带。然后与候选相位的拟合方向一起计算与定义拟合质量的相应拟合参数。

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