专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2023002226A1 IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY 审中-公开
公开(公告)号：WO2023002226A1
公开(公告)日：2023-01-26
申请号：PCT/GB2022/051946
申请日：2022-07-25
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： STATHAM, Peter , PINARD, Philippe
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28 , G01N23/2252
摘要： A method for analyzing a specimen in a microscope is described. The method comprises: acquiring a series of compound image frames using a first detector and a second detector, different from the first detector and displaying the series of compound image frames in real-time on a visual display, wherein the visual display is updated to show each compound image frame in sequence. Acquiring a compound image frame comprises: causing a charged particle beam to traverse a region of a specimen, the region corresponding to a configured field of view of the microscope, wherein: when a mode parameter has a first value, the traversal of the beam is along a first traversal path on the region and is according to a first set of traversal conditions, and when the mode parameter has a second value, the traversal of the beam is along a second traversal path on the region and is according to a second set of traversal conditions, wherein a first total time required for the beam to traverse the entire first traversal path according to a first set of traversal conditions is less than a second total time required for the beam to traverse the entire second traversal path according to the second set of traversal conditions; monitoring a first set of resulting particles generated within the specimen at a first plurality of locations within the region using the first detector so as to obtain a first image frame, the first image frame comprising a plurality of pixels corresponding to, and having values derived from the monitored particles generated at, the first plurality of locations, monitoring a second set of resulting particles generated within the specimen at a second plurality of locations within the region using the second detector, so as to obtain a second image frame, the second image frame comprising a plurality of pixels corresponding to, and having respective sets of values derived from the monitored particles generated at, the second plurality of locations, and combining the first image frame and the second image frame so as to produce the compound image frame, such that the compound image frame provides data derived from particles generated at the first and second pluralities of locations within the region and monitored by each of the first detector and the second detector.

2. 发明申请

WO2019016559A1 IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY 审中-公开
公开(公告)号：WO2019016559A1
公开(公告)日：2019-01-24
申请号：PCT/GB2018/052050
申请日：2018-07-19
申请人： OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
发明人： HYDE, Anthony , HOLLAND, James , BURGESS, Simon , STATHAM, Peter , PINARD, Philippe , CORRIN, James
IPC分类号： H01J37/244 , H01J37/28
摘要： A method and system for analyzing a specimen in a microscope are disclosed. The method comprises: acquiring a series of compound image frames using a first detector and a second detector, different from the first detector, wherein acquiring a compound image frame comprises: causing a charged particle beam to impinge upon a plurality of locations within a region of a specimen, the region corresponding to a configured field of view of the microscope, the microscope being configured with a set of microscope conditions, monitoring, in accordance with the configured microscope conditions, a first set of resulting particles generated within the specimen at the plurality of locations using the first detector so as to obtain a first image frame, monitoring, in accordance with the configured microscope conditions, a second set of resulting particles generated within the specimen at the plurality of locations using the second detector, so as to obtain a second image frame, wherein each image frame comprises a plurality of pixels corresponding to, and derived from the monitored particles generated at, the plurality of locations within the region, for each pixel of the second image frame, if the configured microscope conditions are the same as those for a stored second image frame of an immediately preceding acquired compound frame in the series, and if the respective pixel corresponds to a location within the region to which a stored pixel comprised by said stored second image frame corresponds, combining said stored pixel with the pixel so as to increase the signal-to-noise ratio for the pixel, and combining the first image frame and second image frame so as to produce the compound image frame, such that the compound image frame provides data derived from, for each of the plurality of pixels, the particles generated at the corresponding location within the region and monitored by each of the first detector and second detector; and displaying the series of compound image frames in real-time on a visual display.

4. 发明公开

EP3655985A1 IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY 有权
公开(公告)号：EP3655985A1
公开(公告)日：2020-05-27
申请号：EP18749076.8
申请日：2018-07-19
申请人： Oxford Instruments Nanotechnology Tools Limited
发明人： HYDE, Anthony , HOLLAND, James , BURGESS, Simon , STATHAM, Peter , PINARD, Philippe , CORRIN, James
IPC分类号： H01J37/244 , H01J37/28

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式