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    • 1. 发明申请
    • Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device
    • 等离子体发生器,臭氧发生器,基板加工装置及半导体装置的制造方法
    • US20060189168A1
    • 2006-08-24
    • US10539569
    • 2003-12-26
    • Noriyoshi SatoTakeshi TaniguchiHiroshi MaseShuitsu FujiiTarmiya Fujiwara
    • Noriyoshi SatoTakeshi TaniguchiHiroshi MaseShuitsu FujiiTarmiya Fujiwara
    • H01L21/306C23C16/00H01L21/324C23F1/00
    • C01B13/11C01B13/115C01B2201/12H05H1/46H05H2001/466H05H2001/4682
    • To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.
    • 提供能够以简单的结构高效率且易于处理的能够产生等离子体和臭氧的发电机。 电极部分10由电极11和12形成,其间没有电介质材料。 作为用于存储电荷的电荷存储部的灭弧电容器13与电极部10串联连接。 通过施加交流电压对灭弧电容器13进行充电和放电,通过在电极11和12之间引起自身的放电而产生等离子体的交流电源15连接到电极部10的电路的两端 并且灭弧电容器13串联连接。 将灭弧电容器13和与其连接的电极部10的一个电极12组合,用于使电极部分多极化。 单元由用作电极部分10的一个电极12和灭弧电容器13的一个电极的浮动电极,设置在浮动电极周围的绝缘材料和设置在绝缘材料周围的接地电极构成。
    • 2. 发明授权
    • Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device
    • 等离子体发生器,臭氧发生器,基板加工装置及半导体装置的制造方法
    • US07514377B2
    • 2009-04-07
    • US10539569
    • 2003-12-26
    • Noriyoshi SatoTakeshi TaniguchiHiroshi MaseShuitsu FujiiTamiya Fujiwara
    • Noriyoshi SatoTakeshi TaniguchiHiroshi MaseShuitsu FujiiTamiya Fujiwara
    • H01L21/00
    • C01B13/11C01B13/115C01B2201/12H05H1/46H05H2001/466H05H2001/4682
    • To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.
    • 提供能够以简单的结构高效率且易于处理的能够产生等离子体和臭氧的发电机。 电极部分10由电极11和12形成,其间没有电介质材料。 作为用于存储电荷的电荷存储部分的灭弧电容器13与电极部分10串联连接。一种交流电源15,其通过在电极11和12之间施加交流电压而产生电弧而产生等离子体, 将灭弧电容器13的充放电连接到电极部10和灭弧电容器13串联连接的电路的两端。 将灭弧电容器13和与其连接的电极部10的一个电极12组合,用于使电极部分多极化。 单元由用作电极部分10的一个电极12和灭弧电容器13的一个电极的浮动电极,设置在浮动电极周围的绝缘材料和设置在绝缘材料周围的接地电极构成。
    • 4. 发明授权
    • Ferroelectric ceramic material
    • US4948767A
    • 1990-08-14
    • US356216
    • 1989-05-24
    • Yoshihisa UshidaNobuki HiraiHiroshi Mase
    • Yoshihisa UshidaNobuki HiraiHiroshi Mase
    • C04B35/493H01L41/187
    • H01L41/187C04B35/493
    • The present invention relates to a ferroelectric ceramic material which is a Perovskite solid solution comprising a solid solution represented by the formula:Pb.sub.1-a M.sub.a (Mg.sub.1/3 p0 Nb.sub.2/3).sub.x Ti.sub.y Zr.sub.z O.sub.3containing in the solution at least one oxide selected from the group A noted below and at least one oxide selected from the group B noted below.Group A : La.sub.2 O.sub.3 and Nd.sub.2 O.sub.3 ;Group B : ZnO, SnO.sub.2 and Ta.sub.2 O.sub.5.The proposed ferroelectric ceramic material has a large piezoelectric strain constant d. The present invention is further directed to ferroelectric ceramic which is a Perovskite solid solution comprising a solid solution represented by the formula:Pb.sub.1 -aM.sub.a (Mg.sub.1/3 Nb.sub.2/3).sub.x Ti.sub.y Zr.sub.z O.sub.3wherein M is Ba or Sr, x+y+z is 1, a is from 0 to 0.10, x is from 0.05 to 0.70, y is from 0.25 to 0.50 and z is from 0.05 to 0.70, containing in the solution at least one oxide selected from the group A noted below and at least one oxide selected from the group B noted below, the solid solution further containing in the solid solution MnO.sub.2.Group A : La.sub.2 O.sub.3 and Nd.sub.2 O.sub.3 ;Group B : ZnO and SnO.sub.2.
    • 10. 发明授权
    • Ferroelectric ceramic material
    • 铁电陶瓷材料
    • US4940681A
    • 1990-07-10
    • US356135
    • 1989-05-24
    • Yoshihisa UshidaNobuki HiraiHiroshi Mase
    • Yoshihisa UshidaNobuki HiraiHiroshi Mase
    • C04B35/493H01L41/187
    • C04B35/493H01L41/187
    • The present invention relates to a ferroelectric ceramic material which is a Perovskite solid said solution comprising a solid solution represented by the formulaPb.sub.1-a M.sub.a (Mg.sub.1/3 Nb.sub.2/3).sub.x Ti.sub.y Zr.sub.z O.sub.3containing in the solution at least one oxide selected from the group A noted below and at least one oxide selected from the group B noted below, with the proviso that NiO or Fe.sub.2 O.sub.3 is necessarily contained.Group A: La.sub.2 O.sub.3, Bi.sub.2 O.sub.3 and Nd.sub.2 O.sub.3 ;Group B: NiO, Fe.sub.2 O.sub.3, SnO.sub.2 and Ta.sub.2 O.sub.5.The proposed ferroelectric ceramic material has a large piezoelectric strain constant d. The present invention is further directed to a ferroelectric ceramic which is a Perovskite solid solution comprising a solid solution represented by the formulaPb.sub.1-a M.sub.a (Mg.sub.1/3 Nb.sub.2/3).sub.x Ti.sub.y Zr.sub.z O.sub.3wherein M is Ba or Sr, x+y+z is 1, a is from 0 to 0.10, x is from 0.05 to 0.70, y is from 0.25 to 0.50 and z is from 0.05 to 0.70, containing in solution at least one oxide selected from group A noted below and at least one oxide selected from group B noted below, with the proviso that NiO, Fe.sub.2 O.sub.3 or Ta.sub.2 O.sub.5 is necessarily contained, the solid solution further containing in the solid solution MnO.sub.2.Group A: La.sub.2 O.sub.3, Bi.sub.2 O.sub.3 and Nd.sub.2 O.sub.3 ;Group B: NiO, ZnO, Fe.sub.2 O.sub.3, SnO.sub.2 and Ta.sub.2 O.sub.5.