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    • 1. 发明申请
    • Method of flip-chip bonding
    • 倒装芯片接合方法
    • US20060097029A1
    • 2006-05-11
    • US11062959
    • 2005-02-23
    • Norio KainumaHidehiko KiraKenji KobaeTakayoshi MatsumuraYukio Ozaki
    • Norio KainumaHidehiko KiraKenji KobaeTakayoshi MatsumuraYukio Ozaki
    • B23K1/06
    • B23K20/10B23K1/0016B23K2101/40
    • A method of flip-chip bonding can favorably activate the bonding surfaces and remove oxide films when bonding pads and bumps of a semiconductor chip and a substrate and avoids problems such as the bumps being excessively flattened and the bonds between connection terminals being destroyed by subsequent ultrasonic vibration. The method includes an aligning step 2 that aligns and places in contact bumps or pads of a semiconductor chip and pads or bumps of a substrate, a leveling step 4 that levels the shapes of the bumps by pressing together the semiconductor chip and the substrate with a first predetermined load, a bonding preparation step 6 that applies ultrasonic vibration to the semiconductor chip and/or the substrate so that the amplitude of the ultrasonic vibration gradually increases while the first predetermined load weakens, and a bonding step 8 that bonds the bumps and pads by applying ultrasonic vibration to the semiconductor chip and/or the substrate in a state where the semiconductor chip and the substrate are pressed together with a second predetermined load that is smaller than the first predetermined load.
    • 倒装芯片接合的方法可以有利地激活接合表面并且在接合半导体芯片和基板的焊盘和凸点时去除氧化膜,并且避免诸如凸块过度平坦的问题,并且连接端子之间的接合被随后的超声波破坏 振动。 该方法包括:对准步骤2,其对准和放置在半导体芯片的接触凸块或焊盘以及衬底的焊盘或凸块;调平步骤4,其通过将半导体芯片和衬底压在一起来调整凸块的形状 第一预定负载,对半导体芯片和/或基板施加超声波振动的接合准备步骤6,使得当第一预定负载变弱时超声波振动的幅度逐渐增加;以及接合步骤8,其将凸块和焊盘 通过在半导体芯片和基板以比第一预定负载小的第二预定负载被压在一起的状态下,向半导体芯片和/或基板施加超声波振动。