专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06464466B1 Trap apparatus 失效
标题翻译：陷阱装置
公开(公告)号：US06464466B1
公开(公告)日：2002-10-15
申请号：US09706694
申请日：2000-11-07
申请人： Norihiko Nomura , Nobuharu Noji
发明人： Norihiko Nomura , Nobuharu Noji
IPC分类号： F04F1100
CPC分类号： C23C16/4412
摘要： A trap apparatus is provided for improving the efficiency of trapping a product or the efficiency of regenerating the trap unit, i.e., the efficiency of removing the product deposited on the trap unit. The trap apparatus is disposed in a discharge path for evacuating a hermetically sealed chamber through a vacuum pump. The trap apparatus comprises a trap unit for depositing thereon a product contained in a discharged gas and removing the product, and the trap unit has a surface which has been subjected to hydrophilization treatment.
摘要翻译：提供一种捕集装置，用于提高捕集产品的效率或再生捕集器的效率，即，去除沉积在捕集器上的产品的效率。捕集装置设置在用于通过真空泵抽真空密封室的排出路径中。捕集装置包括用于在其上沉积包含在排出气体中的产品并去除产品的捕集器，并且捕集单元具有已进行亲水处理的表面。

2. 发明授权

US6158226A Trapping device 失效
标题翻译：捕捉装置
公开(公告)号：US6158226A
公开(公告)日：2000-12-12
申请号：US990582
申请日：1997-12-15
申请人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
发明人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
IPC分类号： F04B37/16 , B01D53/00 , C23C16/44 , F25B21/02 , B01D8/00 , F25D17/06
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02
摘要： A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a regeneration means; not less than two trap sections communicable either with the exhaust path or with the regeneration path; and switching means for transposing the trap sections either to the exhaust path or to the regeneration path. A trapping operation and a regeneration operation can be performed concurrently respectively in the exhaust path and the regeneration path.
摘要翻译：提出一种捕集装置，以提高真空处理装置的生产效率。捕集装置包括用于通过真空泵将来自密封室的处理气体排出的排气路径; 再生路径，邻近排气通道设置并包括再生装置; 不少于两个可与排气路径或再生路径通信的陷阱段; 以及用于将收集部分转置到排气路径或再生路径的切换装置。可以在排气路径和再生路径中同时进行捕集操作和再生操作。

3. 发明授权

US06368371B1 Trap device and trap system 失效
标题翻译：陷阱设备和陷阱系统
公开(公告)号：US06368371B1
公开(公告)日：2002-04-09
申请号：US09485616
申请日：2000-02-14
申请人： Norihiko Nomura , Nobuharu Noji
发明人： Norihiko Nomura , Nobuharu Noji
IPC分类号： B01D4508
CPC分类号： F04B37/16 , B01D45/08 , F04B37/08
摘要： The present invention provides a trap apparatus which is capable of increasing the trapping efficiency while fulfilling a conductance allowed by a vacuum chamber in a depositing process or the like, for thereby increasing the service life of a vacuum pump and protecting a toxic substance removing device for increased operation reliability, and reducing equipment and running costs. The trap apparatus has a trap unit (18) disposed in a discharge passage (14) for discharging therethrough a gas from a vacuum chamber (10) with a vacuum pump (12) for trapping and removing a product in a discharged gas. The trap unit (18) has trap passages comprising an upstream passage portion (44) spreading outwardly from the center and a downstream passage portion (42) directed inwardly toward the center.
摘要翻译：本发明提供一种捕集装置，其能够在沉积处理等中实现真空室允许的导电性的同时提高捕集效率，从而提高真空泵的使用寿命并保护有毒物质去除装置提高运行可靠性，降低设备运行成本。捕集装置具有设置在排出通道（14）中的捕集单元（18），用于通过真空室（10）从真空室（10）中排出气体，用于捕集和去除排放气体中的产物。捕集器（18）具有捕集通道，该通道包括从中心向外展开的上游通道部分（44）和向内朝向中心的下游通道部分（42）。

4. 发明授权

US06763700B2 Trap apparatus 有权
公开(公告)号：US06763700B2
公开(公告)日：2004-07-20
申请号：US10387567
申请日：2003-03-14
申请人： Norihiko Nomura , Nobuharu Noji , Kiyoshi Yanagisawa
发明人： Norihiko Nomura , Nobuharu Noji , Kiyoshi Yanagisawa
IPC分类号： G01M302
CPC分类号： C23C16/4412 , B01D8/00 , Y10S55/15
摘要： A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.

5. 发明授权

US06553811B2 Trap apparatus 有权
公开(公告)号：US06553811B2
公开(公告)日：2003-04-29
申请号：US09986672
申请日：2001-11-09
申请人： Norihiko Nomura , Nobuharu Noji , Kiyoshi Yanagisawa
发明人： Norihiko Nomura , Nobuharu Noji , Kiyoshi Yanagisawa
IPC分类号： G01M308
CPC分类号： C23C16/4412 , B01D8/00 , Y10S55/15
摘要： A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.

6. 发明授权

US07217306B2 Trap apparatus 有权
标题翻译：陷阱装置
公开(公告)号：US07217306B2
公开(公告)日：2007-05-15
申请号：US10839288
申请日：2004-05-06
申请人： Norihiko Nomura , Nobuharu Noji , Kiyoshi Yanagisawa
发明人： Norihiko Nomura , Nobuharu Noji , Kiyoshi Yanagisawa
IPC分类号： B01D45/00
CPC分类号： C23C16/4412 , B01D8/00 , Y10S55/15
摘要： A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage for evacuating a hermetically sealed chamber by a vacuum pump, a hermetically sealed trapping and regenerating casing extending across the exhaust passage and a regenerating passage adjacent to the exhaust passage, and a trap unit movably housed in the trapping and regenerating casing for selective movement between a trapping position connected to the exhaust passage and a regenerating position connected to the regenerating passage. The trap apparatus further includes valve bodies disposed one on each side of the trap unit and supporting seals on outer circumferential surfaces thereof for sealing the exhaust passage and the regenerating passage from each other, and a monitoring mechanism for monitoring whether the seals are functioning normally.
摘要翻译：连续处理捕集装置能够在保持真空室所需的电导的同时提高捕集效率。捕集装置包括：排气通道，用于通过真空泵排出密封室;气密密封的捕集和再生壳体，其跨过排气通道延伸;再生通道和邻近排气通道的再生通道;以及捕集单元，可移动地容纳在捕集器中，再生壳体，用于在连接到排气通道的捕获位置和连接到再生通道的再生位置之间进行选择性运动。捕集装置还包括一个在收集单元的每一侧上设置的阀体和在其外圆周表面上的用于密封排气通道和再生通道的支撑密封件，以及用于监测密封件是否正常工作的监控机构。

7. 发明授权

US06332925B1 Evacuation system 失效
标题翻译：疏散系统
公开(公告)号：US06332925B1
公开(公告)日：2001-12-25
申请号：US08861007
申请日：1997-05-21
申请人： Nobuharu Noji , Yasuhiro Niimura , Hiroaki Ogamino , Hiroshi Hattori , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
发明人： Nobuharu Noji , Yasuhiro Niimura , Hiroaki Ogamino , Hiroshi Hattori , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
IPC分类号： C23C1600
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02 , Y02C20/30
摘要： An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.
摘要翻译：公开了一种使用寿命长，结构紧凑，可靠性高的疏散系统。该系统能够使工艺气体重复使用，从而降低资本投资和运营的总体成本。该系统包括处理室和通过用于抽空处理室的抽空管道与处理室连通的真空泵。排气管设有不少于两个串联布置的捕集装置，并在不同温度下操作，用于捕获从处理室排出的废气中所含的不同组分。

8. 发明授权

US6051053A Trapping device and method of operation therefor 失效
标题翻译：捕集装置及其操作方法
公开(公告)号：US6051053A
公开(公告)日：2000-04-18
申请号：US990577
申请日：1997-12-15
申请人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura
发明人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura
IPC分类号： B01D8/00 , B01D53/00 , C23C16/44
CPC分类号： C23C16/4412 , B01D53/002 , B01D8/00
摘要： A trapping device that performs a regeneration operation efficiently so as to raise the overall operational reliability by improving the service life as well as to lower the capital and operation cost of the processing system. The trapping device includes an exhaust path for evacuating a spent gas from a hermetic chamber through a vacuum pump; a trap section for trapping component substances from the spent gas flowing through the exhaust path; a cleaning path disposed adjacent to the exhaust path for flowing a cleaning solution for cleaning the trap section; and driving device for transposing the trap section to communicate either with the exhaust path or with the cleaning path.
摘要翻译：一种捕获装置，其有效地进行再生操作，以通过提高使用寿命来提高整体的运行可靠性，以及降低处理系统的资本和运营成本。捕集装置包括用于通过真空泵将来自密封室的废气排出的排气路径; 用于捕集来自流过排气路径的废气中的成分物质的捕集部分; 与排气通道相邻设置的清洁通道，用于使用于清洁捕集部分的清洁溶液流动; 以及驱动装置，用于转置捕获部分以与排气路径或与清洁路径通信。

9. 发明授权

US08431892B2 Detector and inspecting apparatus 有权
标题翻译：检测仪和检查仪器
公开(公告)号：US08431892B2
公开(公告)日：2013-04-30
申请号：US12899270
申请日：2010-10-06
申请人： Masahiro Hatakeyama , Shoji Yoshikawa , Kenichi Suematsu , Tsutomu Karimata , Nobuharu Noji
发明人： Masahiro Hatakeyama , Shoji Yoshikawa , Kenichi Suematsu , Tsutomu Karimata , Nobuharu Noji
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/261 , H01J37/244 , H01J37/28 , H01J2237/2441 , H01J2237/2446
摘要： An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors 11, 12, where the plurality of detectors 11, 12 are disposed in the same chamber MC. The plurality of detectors 11, 12 can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.
摘要翻译：用于减少与用于改变检测器的工作相关联的时间损失的检查装置的特征在于包括用于接收从样本W发射的电子束以捕获表示样本W的图像数据的多个检测器11,12，以及切换机构M，用于使电子束入射到多个检测器11,12中的一个上，其中多个检测器11,12设置在同一室MC中。多个检测器11,12可以是检测器的任意组合，该检测器包括用于将电子束转换为电信号的电子传感器，该检测器包括用于将电子束转换成光并将光转换成电信号的光学传感器。切换机构M可以是机械移动机构或电子束偏转器。

10. 发明授权

US07928382B2 Detector and inspecting apparatus 有权
标题翻译：检测仪和检查仪器
公开(公告)号：US07928382B2
公开(公告)日：2011-04-19
申请号：US12063604
申请日：2006-08-10
申请人： Masahiro Hatakeyama , Shoji Yoshikawa , Kenichi Suematsu , Tsutomu Karimata , Nobuharu Noji
发明人： Masahiro Hatakeyama , Shoji Yoshikawa , Kenichi Suematsu , Tsutomu Karimata , Nobuharu Noji
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/261 , H01J37/244 , H01J37/28 , H01J2237/2441 , H01J2237/2446
摘要： An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors 11, 12, where the plurality of detectors 11, 12 are disposed in the same chamber MC. The plurality of detectors 11, 12 can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.
摘要翻译：用于减少与用于改变检测器的工作相关联的时间损失的检查装置的特征在于包括用于接收从样本W发射的电子束以捕获表示样本W的图像数据的多个检测器11,12，以及切换机构M，用于使电子束入射到多个检测器11,12中的一个上，其中多个检测器11,12设置在同一室MC中。多个检测器11,12可以是包括用于将电子束转换为电信号的电子传感器的检测器的任意组合，该检测器包括用于将电子束转换成光并将该光转换成电信号的光学传感器。切换机构M可以是机械移动机构或电子束偏转器。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式