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    • 1. 发明授权
    • Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
    • 真空泵自诊断方式,真空泵自诊断系统和真空泵中央监控系统
    • US08721295B2
    • 2014-05-13
    • US11813716
    • 2006-04-07
    • Tetsuro SugiuraKeiji TanakaToshiharu NakazawaKoichi KidoTomoyuki Yamazaki
    • Tetsuro SugiuraKeiji TanakaToshiharu NakazawaKoichi KidoTomoyuki Yamazaki
    • F04B37/14F04B49/00
    • F04B51/00F04C18/126F04C18/16F04C23/001F04C25/02F04C2220/10F04C2270/80F04C2280/02
    • There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.
    • 提供真空泵自诊断方法,真空泵自诊断系统,能够对干式真空泵进行自诊断的真空泵中央监控系统。 真空泵自诊断方法决定故障的发生,并且当超过预定的报警设定值的积分值或用于旋转所述真空泵的转子的电动机的电流的平均值时,产生报警。 在用于进行真空泵的自诊断的真空泵自诊断系统中,所述真空泵包括壳体和可转动地设置在所述壳体中的转子,用于通过所述转子的旋转吸入和排出气体,所述转子包括多个级和 压力传感器设置在转子级之间。 提供自诊断单元,用于计算用于旋转所述转子的电动机的电流的积分值或平均值,并且当所述积分值或平均值超过预定报警设定值时,进行所述真空泵的自诊断。 自诊断单元从一个自诊断计算方法切换到另一个,或者基于由所述压力传感器检测到的压力值中断自诊断计算。
    • 10. 发明授权
    • Operation control device for vacuum pump and method for stopping operation thereof
    • 真空泵操作控制装置及其停止操作方法
    • US08172544B2
    • 2012-05-08
    • US12249285
    • 2008-10-10
    • Koichi KidoTetsuro SugiuraHiroki Furuta
    • Koichi KidoTetsuro SugiuraHiroki Furuta
    • F04B49/00
    • F04C18/126F04C28/06F04C28/28F04C2220/10F04C2270/05
    • To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device 10 for a vacuum pump having a pump rotor 1 disposed in a casing 2 for free rotation includes a pump rotor control section 15 for controlling the rotation of the pump rotor 1. The pump rotor control section 15 has a function to, after a pump stop action has been taken, rotate the pump rotor 1 in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor 1.
    • 为了提供一种用于真空泵的操作控制装置和用于停止真空泵的操作的方法,其使得可以有效地除去由于壳体中的气体的固化和液化而导致的产物,并且可能阻碍泵转子的旋转, 使得真空泵可以正常启动。 一种用于真空泵的操作控制装置10,其具有设置在用于自由旋转的壳体2中的泵转子1,包括用于控制泵转子1的旋转的泵转子控制部15.泵转子控制部15具有: 在采取泵停止动作之后,根据预定的定时模式使泵转子1沿正向和/或反向旋转,然后停止泵转子1。