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1. 发明授权

US08721295B2 Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system 失效
标题翻译：真空泵自诊断方式，真空泵自诊断系统和真空泵中央监控系统
公开(公告)号：US08721295B2
公开(公告)日：2014-05-13
申请号：US11813716
申请日：2006-04-07
申请人： Tetsuro Sugiura , Keiji Tanaka , Toshiharu Nakazawa , Koichi Kido , Tomoyuki Yamazaki
发明人： Tetsuro Sugiura , Keiji Tanaka , Toshiharu Nakazawa , Koichi Kido , Tomoyuki Yamazaki
IPC分类号： F04B37/14 , F04B49/00
CPC分类号： F04B51/00 , F04C18/126 , F04C18/16 , F04C23/001 , F04C25/02 , F04C2220/10 , F04C2270/80 , F04C2280/02
摘要： There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.
摘要翻译：提供真空泵自诊断方法，真空泵自诊断系统，能够对干式真空泵进行自诊断的真空泵中央监控系统。真空泵自诊断方法决定故障的发生，并且当超过预定的报警设定值的积分值或用于旋转所述真空泵的转子的电动机的电流的平均值时，产生报警。在用于进行真空泵的自诊断的真空泵自诊断系统中，所述真空泵包括壳体和可转动地设置在所述壳体中的转子，用于通过所述转子的旋转吸入和排出气体，所述转子包括多个级和压力传感器设置在转子级之间。提供自诊断单元，用于计算用于旋转所述转子的电动机的电流的积分值或平均值，并且当所述积分值或平均值超过预定报警设定值时，进行所述真空泵的自诊断。自诊断单元从一个自诊断计算方法切换到另一个，或者基于由所述压力传感器检测到的压力值中断自诊断计算。

2. 发明申请

US20090097984A1 OPERATION CONTROL DEVICE FOR VACUUM PUMP AND METHOD FOR STOPPING OPERATION THEREOF 有权
标题翻译：真空泵的操作控制装置及其停止操作的方法
公开(公告)号：US20090097984A1
公开(公告)日：2009-04-16
申请号：US12249285
申请日：2008-10-10
申请人： Koichi KIDO , Tetsuro SUGIURA , Hiroki FURUTA
发明人： Koichi KIDO , Tetsuro SUGIURA , Hiroki FURUTA
IPC分类号： F04B49/06
CPC分类号： F04C18/126 , F04C28/06 , F04C28/28 , F04C2220/10 , F04C2270/05
摘要： To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device 10 for a vacuum pump having a pump rotor 1 disposed in a casing 2 for free rotation includes a pump rotor control section 15 for controlling the rotation of the pump rotor 1. The pump rotor control section 15 has a function to, after a pump stop action has been taken, rotate the pump rotor 1 in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor 1.
摘要翻译：为了提供一种用于真空泵的操作控制装置和用于停止真空泵的操作的方法，其使得可以有效地除去由于壳体中的气体的固化和液化而导致的产物，并且可能阻碍泵转子的旋转，使得真空泵可以正常启动。一种用于真空泵的操作控制装置10，其具有设置在用于自由旋转的壳体2中的泵转子1，包括用于控制泵转子1的旋转的泵转子控制部15.泵转子控制部15具有：在采取泵停止动作之后，根据预定的定时模式使泵转子1沿正向和/或反向旋转，然后停止泵转子1。

3. 发明授权

US06332925B1 Evacuation system 失效
标题翻译：疏散系统
公开(公告)号：US06332925B1
公开(公告)日：2001-12-25
申请号：US08861007
申请日：1997-05-21
申请人： Nobuharu Noji , Yasuhiro Niimura , Hiroaki Ogamino , Hiroshi Hattori , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
发明人： Nobuharu Noji , Yasuhiro Niimura , Hiroaki Ogamino , Hiroshi Hattori , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
IPC分类号： C23C1600
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02 , Y02C20/30
摘要： An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.
摘要翻译：公开了一种使用寿命长，结构紧凑，可靠性高的疏散系统。该系统能够使工艺气体重复使用，从而降低资本投资和运营的总体成本。该系统包括处理室和通过用于抽空处理室的抽空管道与处理室连通的真空泵。排气管设有不少于两个串联布置的捕集装置，并在不同温度下操作，用于捕获从处理室排出的废气中所含的不同组分。

4. 发明授权

US6051053A Trapping device and method of operation therefor 失效
标题翻译：捕集装置及其操作方法
公开(公告)号：US6051053A
公开(公告)日：2000-04-18
申请号：US990577
申请日：1997-12-15
申请人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura
发明人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura
IPC分类号： B01D8/00 , B01D53/00 , C23C16/44
CPC分类号： C23C16/4412 , B01D53/002 , B01D8/00
摘要： A trapping device that performs a regeneration operation efficiently so as to raise the overall operational reliability by improving the service life as well as to lower the capital and operation cost of the processing system. The trapping device includes an exhaust path for evacuating a spent gas from a hermetic chamber through a vacuum pump; a trap section for trapping component substances from the spent gas flowing through the exhaust path; a cleaning path disposed adjacent to the exhaust path for flowing a cleaning solution for cleaning the trap section; and driving device for transposing the trap section to communicate either with the exhaust path or with the cleaning path.
摘要翻译：一种捕获装置，其有效地进行再生操作，以通过提高使用寿命来提高整体的运行可靠性，以及降低处理系统的资本和运营成本。捕集装置包括用于通过真空泵将来自密封室的废气排出的排气路径; 用于捕集来自流过排气路径的废气中的成分物质的捕集部分; 与排气通道相邻设置的清洁通道，用于使用于清洁捕集部分的清洁溶液流动; 以及驱动装置，用于转置捕获部分以与排气路径或与清洁路径通信。

5. 发明授权

US08439569B2 Combined bearing and rotary machine 失效
标题翻译：组合轴承和旋转机
公开(公告)号：US08439569B2
公开(公告)日：2013-05-14
申请号：US12915406
申请日：2010-10-29
申请人： Kazuma Ito , Kazuyuki Tatsuta , Tetsuro Sugiura
发明人： Kazuma Ito , Kazuyuki Tatsuta , Tetsuro Sugiura
IPC分类号： F16C33/66 , F01M11/02
CPC分类号： F16C37/007 , F16C19/54 , F16C33/58 , F16C33/60 , F16C33/6659 , F16C2360/45
摘要： A highly reliable combined bearing capable of achieving equal and sufficient lubrication of a plurality of roller bearings with a simple and compact structure is provided. The combined bearing includes a first roller bearing and a second roller bearing which are in contact with each other and arranged on the same axis. A lubricating oil inlet introduces a lubricating oil into an inner space formed between the first roller bearing and the second roller bearing, the lubricating-oil inlet being provided on at least one of an outer ring of the first rolling bearing and an outer ring of the second rolling bearing.
摘要翻译：提供了一种高度可靠的组合轴承，其能够以简单且紧凑的结构实现多个滚动轴承的相等且充分的润滑。组合的轴承包括彼此接触并且布置在同一轴线上的第一滚子轴承和第二滚子轴承。润滑油入口将润滑油引入到形成在第一滚子轴承和第二滚子轴承之间的内部空间中，润滑油入口设置在第一滚动轴承的外圈和外圈中的至少一个上第二滚动轴承。

6. 外观设计

USD660890S1 Unit bearing 有权
标题翻译：单元轴承
公开(公告)号：USD660890S1
公开(公告)日：2012-05-29
申请号：US29358537
申请日：2010-03-29
申请人： Kazuma Ito , Kazuyuki Tatsuta , Tetsuro Sugiura
设计人： Kazuma Ito , Kazuyuki Tatsuta , Tetsuro Sugiura

7. 发明申请

US20110103986A1 COMBINED BEARING AND ROTARY MACHINE 失效
标题翻译：组合轴承和旋转机
公开(公告)号：US20110103986A1
公开(公告)日：2011-05-05
申请号：US12915406
申请日：2010-10-29
申请人： Kazuma ITO , Kazuyuki Tatsuta , Tetsuro Sugiura
发明人： Kazuma ITO , Kazuyuki Tatsuta , Tetsuro Sugiura
IPC分类号： F04B39/00 , F16C19/00
CPC分类号： F16C37/007 , F16C19/54 , F16C33/58 , F16C33/60 , F16C33/6659 , F16C2360/45
摘要： A highly reliable combined bearing capable of achieving equal and sufficient lubrication of a plurality of rolling bearings with a simple and compact structure is provided. The combined bearing includes a first rolling bearing and a second rolling bearing which are in contact with each other and arranged on the same axis; and a lubricating-oil inlet for introducing a lubricating oil into an inner space formed between the first rolling bearing and the second rolling bearing, the lubricating-oil inlet being provided on at least one of an outer ring of the first rolling bearing and an outer ring of the second rolling bearing.
摘要翻译：提供了一种能够以简单紧凑的结构实现多个滚动轴承相等且充分润滑的高度可靠的组合轴承。组合轴承包括彼此接触并且布置在同一轴线上的第一滚动轴承和第二滚动轴承; 以及润滑油入口，用于将润滑油引入到形成在第一滚动轴承和第二滚动轴承之间的内部空间中，润滑油入口设置在第一滚动轴承的外圈和外部的外圈中的至少一个上第二滚动轴承的环。

8. 发明授权

US08172544B2 Operation control device for vacuum pump and method for stopping operation thereof 有权
标题翻译：真空泵操作控制装置及其停止操作方法
公开(公告)号：US08172544B2
公开(公告)日：2012-05-08
申请号：US12249285
申请日：2008-10-10
申请人： Koichi Kido , Tetsuro Sugiura , Hiroki Furuta
发明人： Koichi Kido , Tetsuro Sugiura , Hiroki Furuta
IPC分类号： F04B49/00
CPC分类号： F04C18/126 , F04C28/06 , F04C28/28 , F04C2220/10 , F04C2270/05
摘要： To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device 10 for a vacuum pump having a pump rotor 1 disposed in a casing 2 for free rotation includes a pump rotor control section 15 for controlling the rotation of the pump rotor 1. The pump rotor control section 15 has a function to, after a pump stop action has been taken, rotate the pump rotor 1 in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor 1.
摘要翻译：为了提供一种用于真空泵的操作控制装置和用于停止真空泵的操作的方法，其使得可以有效地除去由于壳体中的气体的固化和液化而导致的产物，并且可能阻碍泵转子的旋转，使得真空泵可以正常启动。一种用于真空泵的操作控制装置10，其具有设置在用于自由旋转的壳体2中的泵转子1，包括用于控制泵转子1的旋转的泵转子控制部15.泵转子控制部15具有：在采取泵停止动作之后，根据预定的定时模式使泵转子1沿正向和/或反向旋转，然后停止泵转子1。

9. 发明申请

US20090035151A1 VACUUM PUMP SELF-DIAGNOSIS METHOD, VACUUM PUMP SELF-DIAGNOSIS SYSTEM, AND VACUUM PUMP CENTRAL MONITORING SYSTEM 失效
标题翻译：真空泵自诊断方法，真空泵自诊断系统和真空泵中央监测系统
公开(公告)号：US20090035151A1
公开(公告)日：2009-02-05
申请号：US11813716
申请日：2006-04-07
申请人： Tetsuro Sugiura , Keiji Tanaka , Toshiharu Nakazawa , Koichi Kido , Tomoyuki Yamazaki
发明人： Tetsuro Sugiura , Keiji Tanaka , Toshiharu Nakazawa , Koichi Kido , Tomoyuki Yamazaki
IPC分类号： F04B49/06 , G05D7/00
CPC分类号： F04B51/00 , F04C18/126 , F04C18/16 , F04C23/001 , F04C25/02 , F04C2220/10 , F04C2270/80 , F04C2280/02
摘要： There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.
摘要翻译：提供真空泵自诊断方法，真空泵自诊断系统，能够对干式真空泵进行自诊断的真空泵中央监控系统。真空泵自诊断方法决定故障的发生，并且当超过预定的报警设定值的积分值或用于旋转所述真空泵的转子的电动机的电流的平均值时，产生报警。在用于进行真空泵的自诊断的真空泵自诊断系统中，所述真空泵包括壳体和可转动地设置在所述壳体中的转子，用于通过所述转子的旋转吸入和排出气体，所述转子包括多个级和压力传感器设置在转子级之间。提供自诊断单元，用于计算用于旋转所述转子的电动机的电流的积分值或平均值，并且当所述积分值或平均值超过预定报警设定值时，进行所述真空泵的自诊断。自诊断单元从一个自诊断计算方法切换到另一个，或者基于由所述压力传感器检测到的压力值中断自诊断计算。

10. 发明授权

US6158226A Trapping device 失效
标题翻译：捕捉装置
公开(公告)号：US6158226A
公开(公告)日：2000-12-12
申请号：US990582
申请日：1997-12-15
申请人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
发明人： Nobuharu Noji , Norihiko Nomura , Tetsuro Sugiura , Yuji Matsuoka
IPC分类号： F04B37/16 , B01D53/00 , C23C16/44 , F25B21/02 , B01D8/00 , F25D17/06
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02
摘要： A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a regeneration means; not less than two trap sections communicable either with the exhaust path or with the regeneration path; and switching means for transposing the trap sections either to the exhaust path or to the regeneration path. A trapping operation and a regeneration operation can be performed concurrently respectively in the exhaust path and the regeneration path.
摘要翻译：提出一种捕集装置，以提高真空处理装置的生产效率。捕集装置包括用于通过真空泵将来自密封室的处理气体排出的排气路径; 再生路径，邻近排气通道设置并包括再生装置; 不少于两个可与排气路径或再生路径通信的陷阱段; 以及用于将收集部分转置到排气路径或再生路径的切换装置。可以在排气路径和再生路径中同时进行捕集操作和再生操作。

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