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    • 2. 发明申请
    • Non-volatile semiconductor memory device
    • 非易失性半导体存储器件
    • US20090184350A1
    • 2009-07-23
    • US12320102
    • 2009-01-16
    • Noriaki KodamaKenichi HidakaHiroyuki KobatakeTakuji Onuma
    • Noriaki KodamaKenichi HidakaHiroyuki KobatakeTakuji Onuma
    • H01L29/94H01L29/66
    • H01L27/112G11C17/16H01L27/11206
    • A non-volatile semiconductor memory device having a memory cell in which operating potentials are few and the scale of the peripheral circuitry is reduced includes a select transistor having a source/drain on both sides of a channel of a semiconductor substrate and having a gate electrode disposed on the channel via a thick gate insulating film; an element isolation region formed on the semiconductor substrate in an area adjacent to the select transistor; an antifuse adjacent to the element isolation region, having a lower electrode formed on the semiconductor substrate and having an upper electrode disposed on the semiconductor substrate in an area between the element isolation region and lower electrode via a thin gate insulating film; and a connection contact electrically connecting the source and upper electrode and contacting the source and the upper electrode.
    • 一种非易失性半导体存储器件,具有其中工作电位很小并且外围电路的规模减小的存储单元包括在半导体衬底的通道两侧具有源极/漏极的选择晶体管,并具有栅电极 通过厚栅绝缘膜设置在通道上; 在与所述选择晶体管相邻的区域中形成在所述半导体衬底上的元件隔离区; 邻近元件隔离区域的反熔丝,其具有形成在半导体衬底上的下电极,并且具有通过薄栅绝缘膜在元件隔离区和下电极之间的区域中设置在半导体衬底上的上电极; 以及电连接源极和上部电极并接触源极和上部电极的连接接点。
    • 3. 发明申请
    • Non-volatile semiconductor memory device
    • 非易失性半导体存储器件
    • US20110122672A1
    • 2011-05-26
    • US12931159
    • 2011-01-26
    • Noriaki KodamaKenichi HidakaHiroyuki KobatakeTakuji Onuma
    • Noriaki KodamaKenichi HidakaHiroyuki KobatakeTakuji Onuma
    • G11C17/16H01L27/105
    • H01L27/112G11C17/16H01L27/11206
    • A non-volatile semiconductor memory device having a memory cell in which operating potentials are few and the scale of the peripheral circuitry is reduced includes a select transistor having a source/drain on both sides of a channel of a semiconductor substrate and having a gate electrode disposed on the channel via a thick gate insulating film; an element isolation region formed on the semiconductor substrate in an area adjacent to the select transistor; an antifuse adjacent to the element isolation region, having a lower electrode formed on the semiconductor substrate and having an upper electrode disposed on the semiconductor substrate in an area between the element isolation region and lower electrode via a thin gate insulating film; and a connection contact electrically connecting the source and upper electrode and contacting the source and the upper electrode.
    • 一种非易失性半导体存储器件,具有其中工作电位很小并且外围电路的规模减小的存储单元包括在半导体衬底的通道两侧具有源极/漏极的选择晶体管,并具有栅电极 通过厚栅绝缘膜设置在通道上; 在与所述选择晶体管相邻的区域中形成在所述半导体衬底上的元件隔离区; 邻近元件隔离区域的反熔丝,其具有形成在半导体衬底上的下电极,并且具有通过薄栅绝缘膜在元件隔离区和下电极之间的区域中设置在半导体衬底上的上电极; 以及电连接源极和上部电极并接触源极和上部电极的连接接点。
    • 8. 发明授权
    • Semiconductor memory device and antifuse programming method
    • 半导体存储器件和反熔丝编程方法
    • US08982648B2
    • 2015-03-17
    • US13193186
    • 2011-07-28
    • Takuji OnumaKenichi HidakaHiromichi TakaokaYoshitaka KubotaHiroshi Tsuda
    • Takuji OnumaKenichi HidakaHiromichi TakaokaYoshitaka KubotaHiroshi Tsuda
    • G11C7/00G11C17/18
    • G11C17/18
    • An antifuse comprised of an NMOS transistor or an NMOS capacitor includes a first terminal coupled to a gate electrode, a second terminal coupled to a diffusion layer, and a gate insulating film interposed between the gate electrode and the diffusion layer. A programming circuit includes a first programming circuit which has first current drive capability and which performs first programming operation and a second programming circuit which has second current drive capability larger than the first current drive capability and which performs second programming operation to follow the first programming operation. In the first programming operation, the first programming circuit breaks down the gate insulating film by applying a first programming voltage between the first terminal and the second terminal. In the second programming operation, the second programming circuit applies a second programming voltage lower than the first programming voltage between the first terminal and the second terminal.
    • 由NMOS晶体管或NMOS电容器构成的反熔丝包括耦合到栅电极的第一端子,耦合到扩散层的第二端子和介于栅极电极和扩散层之间的栅极绝缘膜。 编程电路包括具有第一电流驱动能力并执行第一编程操作的第一编程电路和具有大于第一电流驱动能力的第二电流驱动能力的第二编程电路,并且执行第二编程操作以跟随第一编程操作 。 在第一编程操作中,第一编程电路通过在第一端子和第二端子之间施加第一编程电压来分解栅极绝缘膜。 在第二编程操作中,第二编程电路在第一端子和第二端子之间施加低于第一编程电压的第二编程电压。