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    • 4. 发明授权
    • Semiconductor memory device and antifuse programming method
    • 半导体存储器件和反熔丝编程方法
    • US08982648B2
    • 2015-03-17
    • US13193186
    • 2011-07-28
    • Takuji OnumaKenichi HidakaHiromichi TakaokaYoshitaka KubotaHiroshi Tsuda
    • Takuji OnumaKenichi HidakaHiromichi TakaokaYoshitaka KubotaHiroshi Tsuda
    • G11C7/00G11C17/18
    • G11C17/18
    • An antifuse comprised of an NMOS transistor or an NMOS capacitor includes a first terminal coupled to a gate electrode, a second terminal coupled to a diffusion layer, and a gate insulating film interposed between the gate electrode and the diffusion layer. A programming circuit includes a first programming circuit which has first current drive capability and which performs first programming operation and a second programming circuit which has second current drive capability larger than the first current drive capability and which performs second programming operation to follow the first programming operation. In the first programming operation, the first programming circuit breaks down the gate insulating film by applying a first programming voltage between the first terminal and the second terminal. In the second programming operation, the second programming circuit applies a second programming voltage lower than the first programming voltage between the first terminal and the second terminal.
    • 由NMOS晶体管或NMOS电容器构成的反熔丝包括耦合到栅电极的第一端子,耦合到扩散层的第二端子和介于栅极电极和扩散层之间的栅极绝缘膜。 编程电路包括具有第一电流驱动能力并执行第一编程操作的第一编程电路和具有大于第一电流驱动能力的第二电流驱动能力的第二编程电路,并且执行第二编程操作以跟随第一编程操作 。 在第一编程操作中,第一编程电路通过在第一端子和第二端子之间施加第一编程电压来分解栅极绝缘膜。 在第二编程操作中,第二编程电路在第一端子和第二端子之间施加低于第一编程电压的第二编程电压。