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    • 4. 发明授权
    • Laser machining apparatus
    • 激光加工设备
    • US5310986A
    • 1994-05-10
    • US52897
    • 1993-04-26
    • Nobuyuki ZumotoToshinori YagiMasao IzumoMasaaki Tanaka
    • Nobuyuki ZumotoToshinori YagiMasao IzumoMasaaki Tanaka
    • B23K26/06H01L21/00H05K3/00B23K26/00
    • H05K3/0026B23K26/066H01L21/67092H05K2203/056
    • A laser machining apparatus comprises a mask, a reflecting mirror and an imaging optical system. The laser light reflected by the mask and also by the reflecting mirror passes through the mask and images on the work for machining the work. The laser machining apparatus comprises means for causing said mask to move in parallel with said work for machining the work. This laser machining apparatus is able to machine a work having a large surface using small apertured mask. Another type of laser machining apparatus comprises a mask and a platform and an imaging optical system. The mask and the work are puts in the same plane of the platform and driven so that the image of the mask is mapped on the work via the imaging optical system. The laser machining apparatus is able to machine a large area at low price and high accuracy.
    • 激光加工装置包括掩模,反射镜和成像光学系统。 由掩模和反射镜反射的激光通过掩模和工件上的图像进行加工。 激光加工设备包括用于使所述面罩与所述工件并行移动以便加工工件的装置。 该激光加工装置能够使用小孔径掩模加工具有大表面的工件。 另一种类型的激光加工设备包括掩模和平台以及成像光学系统。 掩模和工作放在平台的同一平面上并被驱动,使得掩模的图像经由成像光学系统映射到工件上。 激光加工设备能够以低价格和高精度加工大面积。
    • 9. 发明授权
    • Vehicle passenger detecting device
    • 车辆检测装置
    • US07478699B2
    • 2009-01-20
    • US11347365
    • 2006-02-06
    • Masatoshi KobayashiTakahiro KawakamiToshinori Yagi
    • Masatoshi KobayashiTakahiro KawakamiToshinori Yagi
    • B60R21/015
    • B60R21/01516
    • A vehicle passenger detecting device includes a judging circuit (6), which judges whether a passenger seated on a seat (1) is a child or not based on a load acting on each of areas of a seat portion (1a) of the seat for a vehicle, and the judging circuit (6), with a fastened sate of a seat belt (5a), judges whether or not a total load acting on the entire area of the seat portion is within a predetermined range, and when the total load is within the predetermined range, if a front outer load acting on a front outer area is a first threshold or more and the ratio of the front outer load to a front inner load acting on a front inner area is a second threshold or more, or the ratio of both outer loads acting on both of outer areas to both inner loads acting on both of inner areas is a third threshold or more, the judging circuit judges (6) that a seated passenger is a child.
    • 车辆乘客检测装置包括判断电路(6),其判断坐在座椅(1)上的乘客是否基于作用在座椅的座位部分(1a)的每个区域上的负载,用于 车辆和具有安全带(5a)的紧固状态的判断电路(6)判断作用在座椅部分的整个区域上的总负载是否在预定范围内,并且当总负载 如果作用在前外侧区域上的前外侧负载为第一阈值以上,前外侧负载与作为前侧内侧区域的前方内侧负载的比例为第二阈值以上,则 作用于两个外部区域的两个外部载荷与作用在两个内部区域上的两个内部负载的两个外部载荷的比率是第三阈值以上,判断电路判断(6)坐着的乘客是小孩。
    • 10. 发明授权
    • Excimer laser beam irradiation apparatus for optically processing
workpiece
    • 用于光学处理工件的准分子激光束照射装置
    • US5661744A
    • 1997-08-26
    • US512710
    • 1995-08-08
    • Kazuyuki MurakamiHajime NakataniAtsushi SugitatsuTadao MinagawaToshinori YagiKeiko Ito
    • Kazuyuki MurakamiHajime NakataniAtsushi SugitatsuTadao MinagawaToshinori YagiKeiko Ito
    • B23K26/38H05K3/00H05K3/46H01S3/22H01S3/223
    • B23K26/083B23K26/066
    • An excimer laser beam irradiation apparatus capable of processing a workpiece optimally with an excimer irradiation beam even when intensity distribution of the excimer laser beam undergone multiple reflections is non-uniform. A patterning mask has light-transmissive portions for allowing the excimer laser beam to pass through and a reflecting layer for reflecting it. A high reflectivity mirror disposed in opposition to the reflecting layer reflects the excimer laser beam reflected from the reflecting layer toward the patterning mask. An imaging lens images a pattern of the excimer laser beam transmitted through the patterning mask onto a workpiece for irradiation thereof. A workpiece moving mechanism and a mask moving mechanism move the workpiece and the mask moving mechanism, respectively. A control unit controls the workpiece moving mechanism and the mask moving mechanism such that the patterning mask and the workpiece are displaced along a same axis synchronously with each other in a scan moving direction which coincides with a direction in which the excimer laser beam shifts positionally while being reflected between the patterning mask and the reflecting means, for thereby allowing the workpiece to be scanned with the excimer laser beam. The workpiece can be processed uniformly and stably in accordance with a pattern of the patterning mask with high accuracy and reliability.
    • 即使准分子激光束的强度分布发生多次反射也能够用准分子照射光束最佳地处理工件的准分子激光束照射装置是不均匀的。 图形掩模具有用于允许准分子激光束通过的透光部分和用于反射它的反射层。 与反射层相对设置的高反射率反射镜将从反射层反射的准分子激光束朝向图案掩模反射。 成像透镜将通过图案化掩模透射的准分子激光束的图案成像到工件上以进行照射。 工件移动机构和掩模移动机构分别移动工件和掩模移动机构。 控制单元控制工件移动机构和掩模移动机构,使得图案掩模和工件沿着与准分子激光束在位置上移动的方向一致的扫描移动方向沿同一轴线同步地移位,同时 在图案掩模和反射装置之间被反射,从而允许用准分子激光束扫描工件。 可以以高精度和可靠性根据图案化掩模的图案均匀且稳定地加工工件。