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    • 2. 发明授权
    • Method of manufacturing gas sensors
    • 制造气体传感器的方法
    • US06777024B2
    • 2004-08-17
    • US10269135
    • 2002-10-11
    • Akiyoshi HattoriNobuyuki YoshiikeYoshikatsu Inoue
    • Akiyoshi HattoriNobuyuki YoshiikeYoshikatsu Inoue
    • B05D512
    • G01N27/12G01N33/0047G01N33/02
    • A gas sensor characterized in that the gas sensor has at least: an insulating substrate; a pair of thin film electrodes which are spaced apart at a given interval and provided on the insulating substrate; a thin film gas sensitive layer which is provided on both the substrate and the thin film electrodes, the gas sensitive layer containing a given material as main ingredient; and a pair of thick film electrodes which is correspondingly positioned over the pair of thin film electrodes and provided on the thin film gas sensitive layer, wherein the thin film electrodes and the thick film electrodes are formed so as to sandwich portions of the thin film gas sensitive layer between the two types of electrodes.
    • 一种气体传感器,其特征在于,所述气体传感器至少具有:绝缘基板;以一定间隔隔开设置在所述绝缘基板上的一对薄膜电极;设置在所述绝缘基板上的薄膜气体敏感层, 基材和薄膜电极,气敏剂层含有给定材料作为主要成分; 以及一对厚膜电极,其对应地位于所述一对薄膜电极上并设置在所述薄膜气体敏感层上,其中所述薄膜电极和所述厚膜电极形成为将所述薄膜气体敏感的部分夹在中间 两种电极之间的层。
    • 3. 发明授权
    • Deodorizing and sterilizing device having catalyst deterioration sensing
function
    • 具有催化剂劣化检测功能的除臭灭菌装置
    • US5961919A
    • 1999-10-05
    • US981823
    • 1998-03-12
    • Hirokazu TachibanaAkiyoshi HattoriNobuyuki YoshiikeAkihiko Yoshida
    • Hirokazu TachibanaAkiyoshi HattoriNobuyuki YoshiikeAkihiko Yoshida
    • A61L9/015C01B13/10A61L2/14
    • C01B13/10A61L9/015Y10S422/90
    • A deodorizing and disinfecting apparatus having catalyst deterioration detection function of the present invention comprises: an air supply portion for inhaling air inside; an ozone generating portion for discharging ozone to the inhaled air: a catalyst for accelerating deodorizing and disinfecting actions and decomposition of the ozone disposed downstream from the ozone generating portion; an ozone sensor for detecting the concentration of remaining ozone disposed downstream from the catalyst; and means for repeating a cycle including stop of ozone discharge from the ozone generating portion for a predetermined time period when the concentration of the remaining ozone reaches a predetermined concentration or more, and for determining that the catalyst is deteriorated when a condition wherein an interval between times when the concentration of the remaining ozone is not less than a predetermined concentration becomes shorter than a predetermined time period is recognized at a predetermined frequency, and then for stopping discharge of the ozone.
    • PCT No.PCT / JP97 / 01607 Sec。 371日期1998年3月12日 102(e)1998年3月12日PCT PCT 1997年5月13日PCT公布。 第WO97 / 42981号公报 日本1997年11月20日具有本发明的催化剂劣化检测功能的除臭消毒装置具有:内部吸入空气的供气部, 用于将臭氧排放到吸入空气中的臭氧发生部分:用于加速除臭和消毒作用的催化剂和设置在臭氧产生部分下游的臭氧的分解; 用于检测设置在催化剂下游的残留臭氧浓度的臭氧传感器; 以及用于重复循环的装置,包括当臭氧浓度达到预定浓度或更高时停止臭氧发生部分的臭氧排放达预定时间段,并且当确定催化剂劣化时, 当以预定频率识别剩余臭氧的浓度不小于预定浓度变得短于预定时间段的时间,然后停止臭氧的排放。
    • 5. 发明授权
    • Electrostatic chuck and manufacturing method thereof
    • 静电吸盘及其制造方法
    • US07633738B2
    • 2009-12-15
    • US11980007
    • 2007-10-30
    • Akiyoshi Hattori
    • Akiyoshi Hattori
    • H02N13/00H01T23/00
    • H01L21/6831
    • An electrostatic chuck includes a base, and includes an electrode embedded in the base in parallel to a substrate mounting surface of the base. A terminal loaded into a terminal hole drilled into a back surface of the base toward the electrode is bonded to the electrode having a protruded portion with a substantially conical trapezoidal shape, which is formed on a flat surface on the terminal side of the electrode toward the terminal hole. In the protruded portion, an angle made by the flat surface on the terminal side of the electrode and an inclined surface of the protruded portion is 40° or less, and a distance from the flat surface of the electrode to a terminal-bonding surface of the protruded portion is 0.01 to 0.8 mm.
    • 静电卡盘包括基座,并且包括平行于基座的基板安装表面嵌入基座中的电极。 将装载到基座朝向电极的后表面的端子孔的端子接合到具有大致圆锥形的突出部的电极,该突起形状形成在电极的端子侧的平坦表面上 端子孔。 在突出部中,由电极的端子侧的平坦面和突出部的倾斜面形成的角度为40°以下,从电极的平面到端子接合面的距离 突出部分为0.01〜0.8mm。
    • 6. 发明授权
    • Ceramic susceptor and a method of cleaning the same
    • 陶瓷感受器及其清洗方法
    • US07261780B2
    • 2007-08-28
    • US11087094
    • 2005-03-22
    • Taiji KikuAkiyoshi Hattori
    • Taiji KikuAkiyoshi Hattori
    • B08B3/04
    • H05B3/143H01L21/67103H05B6/806Y10S134/902
    • An object of the present invention is to provide a ceramic susceptor for considerably reducing the count number of metal atoms on the surface of a semiconductor after the semiconductor is treated, specifically to 1×1010 atoms/cm2 or lower. It is provided a ceramic susceptor 2 having a face for mounting semiconductor 2a wherein each of metal elements other than metal element(s) constituting the ceramic material has a count number of 1×1011 atoms/cm2 or lower. It is further provided a method of cleaning a ceramic susceptor 2 having a face 2a for mounting semiconductor, wherein the susceptor is cleaned using a complexing agent capable of forming a complex with a metal element.
    • 本发明的一个目的是提供一种用于在半导体被处理之后,显着地减少半导体表面上的金属原子计数的陶瓷基座,特别是1×10 10原子/ 2 或更低。 提供了一种具有用于安装半导体2a的面的陶瓷基座2,其中除了构成陶瓷材料的金属元素之外的金属元素中的每一个具有1×10 11原子/ cm 2的计数 > 2 或更低。 还提供了一种清洁具有用于安装半导体的面2a的陶瓷基座2的方法,其中使用能够与金属元素形成络合物的络合剂清洁基座。
    • 7. 发明授权
    • Electrostatic chuck with heater and manufacturing method thereof
    • 带加热器的静电吸盘及其制造方法
    • US08136820B2
    • 2012-03-20
    • US11841172
    • 2007-08-20
    • Ikuhisa MoriokaKazuhiro NoboriTetsuya KawajiriAkiyoshi Hattori
    • Ikuhisa MoriokaKazuhiro NoboriTetsuya KawajiriAkiyoshi Hattori
    • B23B31/28H01L21/683
    • H01L21/6831Y10T279/23
    • An electrostatic chuck with a heater includes: a base formed of a sintered body containing alumina; an ESC electrode provided in an upper portion side in the base; and a resistance heating body embedded in a lower portion side in the base. The base is composed of a dielectric layer from the ESC electrode to an upper surface of the base, and of a support member from the ESC electrode to a lower surface of the base. In the support member, a carbon content differs between an ESC electrode neighborhood in contact with the dielectric layer and a lower region below the ESC electrode neighborhood, a carbon content in the dielectric layer is 100 wt ppm or less, the carbon content in the ESC electrode neighborhood is 0.13 wt % or less, the carbon content in the lower region is 0.03 wt % or more and 0.5 wt % or less, and the carbon content in the ESC electrode neighborhood is smaller than the carbon content in the lower region. The resistance heating body contains niobium or platinum.
    • 具有加热器的静电卡盘包括:由含有氧化铝的烧结体形成的基体; 设置在所述基座的上部侧的ESC电极; 以及嵌入基座的下部侧的电阻加热体。 基体由从ESC电极到基底的上表面的电介质层和从ESC电极到基底的下表面的支撑构件构成。 在支撑构件中,与电介质层接触的ESC电极附近和ESC电极附近的下部区域之间的碳含量不同,电介质层中的碳含量为100重量ppm以下,ESC中的碳含量 电极附近为0.13重量%以下,下部区域的碳含量为0.03重量%以上且0.5重量%以下,ESC电极附近的碳含量低于下部区域的碳含量。 电阻加热体包含铌或铂。