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    • 1. 发明授权
    • Bi-Sr-Ca-Cu-O superconducting thin film
    • Bi-Sr-Ca-Cu-O超导薄膜
    • US5342826A
    • 1994-08-30
    • US950127
    • 1992-09-24
    • Nobuhiko KubotaTsunemi SugimotoKazushi SugawaraYuh Shiohara
    • Nobuhiko KubotaTsunemi SugimotoKazushi SugawaraYuh Shiohara
    • H01L39/24B32B9/00
    • H01L39/2458Y10S505/701
    • A Bi-Sr-Ca-Cu-O system superconducting thin film formed on a substrate comprising [110] single crystals of an ABO.sub.3 type oxide having a perovskite structure, in which a (119) face is selectively grown relative to a substrate surface. The film is formed on the substrate by chemical vapor deposition process. A method of manufacturing a BiSrCaCuO system superconducting film in which an a-axis is oriented preferentially relative to the surface of a substrate comprising MgO (100) single crystals, wherein the chemical composition ratio (Sr+Ca+Cu)/Bi of the BiSrCaCuO system superconducting film is made not less than 3.5. A Bi-Sr-Ca-Cu-O system superconducting thin film formed on a substrate comprising MgO [110] single crystals, in which a (110) face is selectively grown to the substrate surface. The film is formed on the substrate by a chemical vapor deposition process.
    • 在包含[110]具有钙钛矿结构的ABO 3型氧化物的单晶的衬底上形成的Bi-Sr-Ca-Cu-O系超导薄膜,其中(119)面相对于衬底表面选择性地生长。 该薄膜通过化学气相沉积工艺在基板上形成。 制造BiSrCaCuO系超导膜的方法,其中a轴相对于包含MgO(100)单晶的衬底的表面优先取向,其中BiSrCaCuO的化学组成比(Sr + Ca + Cu)/ Bi 系统超导薄膜不低于3.5。 在包含MgO [110]单晶的基板上形成的Bi-Sr-Ca-Cu-O系超导薄膜,其中(110)面选择性地生长到基板表面。 通过化学气相沉积工艺在基板上形成膜。