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1. 发明专利

JP2010126776A Corrosion resistant member and method for producing the same 审中-公开
标题翻译：耐腐蚀成员及其制造方法
公开(公告)号：JP2010126776A
公开(公告)日：2010-06-10
申请号：JP2008303520
申请日：2008-11-28
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SAKAMAKI MAKOTO , TSUTAI YOSHIFUMI , INOUE YUKIO
IPC分类号： C23C4/10 , B05B7/22 , B32B9/00 , C23C4/02 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a corrosion resistant member which has excellent corrosion resistance, and can reduce particles generated when used in a plasma environment, and to provide a method for producing the same. SOLUTION: The corrosion resistant member comprises: a base material; and a gadolinium oxide film formed on the base material by thermal spraying and having a porosity of 5 to 20%. Since the film of the corrosion resistant member is formed by gadolinium oxide having a low porosity, it has excellent corrosion resistance, and can reduce particles generated when used in a plasma environment. Further, since the porosity of the gadolinium oxide film is ≤20%, the strength of the film improves, chipping, peeling or the like are hard to be generated, and the risk that plasma passes through the film, so as to damage the base material is low as well. Besides, since the porosity of the gadolinium oxide film is ≥5% and the film is not too dense, cracks are hard to be generated. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供耐腐蚀性优异的耐腐蚀构件，并且可以减少在等离子体环境中使用时产生的颗粒，并提供其制造方法。耐腐蚀构件包括：基材; 以及通过热喷涂形成在基材上并具有5〜20％孔隙率的氧化钆膜。由于耐腐蚀部件的膜是由具有低孔隙率的氧化钆形成的，所以具有优异的耐腐蚀性，并且可以减少在等离子体环境中使用时产生的颗粒。此外，由于氧化钆膜的孔隙率为≤20％，因此难以产生膜的强度，破碎，剥离等，容易发生等离子体通过膜的危险，从而损坏基体材料也很低。此外，由于氧化钆膜的孔隙率≥5％，膜不致密，难以产生裂纹。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010106327A Corrosion-resistant member 有权
标题翻译：耐腐蚀成员
公开(公告)号：JP2010106327A
公开(公告)日：2010-05-13
申请号：JP2008280723
申请日：2008-10-31
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SAKAMAKI MAKOTO , TSUTAI YOSHIFUMI , SATO KEISUKE , INOUE YUKIO
IPC分类号： C23C28/04 , B32B9/00 , C04B41/87 , C04B41/89 , C23C4/10 , C23C18/12 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a corrosion-resistant member capable of reducing particles produced by the use in a halogen-based corrosive gas and halogen-based gas plasma.
SOLUTION: In the corrosion-resistant member, the surface to be exposed to the halogen-based corrosive gas, the halogen type gas plasma or the like, such as the inside of semiconductor manufacturing equipment, the inside of a flat panel display manufacturing apparatus or the inside of a solar cell manufacturing apparatus, is formed of a gadolinium oxide sol-gel film formed according to a sol-gel method and a thermally sprayed film formed according to a thermal spraying method on the gadolinium oxide sol-gel film.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够减少通过在卤素类腐蚀性气体和卤素系气体等离子体中使用而产生的微粒的耐腐蚀性构件。解决方案：在耐腐蚀构件中，暴露于卤素类腐蚀性气体的表面，卤素型气体等离子体等，例如半导体制造装置的内部，平板显示器的内部制造装置或太阳能电池制造装置的内部由根据溶胶 - 凝胶法形成的氧化钆溶胶凝胶膜和根据热喷涂法形成的热氧化钆溶胶凝胶膜形成的热喷涂膜。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2010106317A Corrosion-resistant member 有权
标题翻译：耐腐蚀成员
公开(公告)号：JP2010106317A
公开(公告)日：2010-05-13
申请号：JP2008279487
申请日：2008-10-30
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SAKAMAKI MAKOTO , TSUTAI YOSHIFUMI , INOUE YUKIO
IPC分类号： C23C4/10 , B32B9/00 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a corrosion-resistant member capable of preventing a coated film from peeling from a base material and maintaining high corrosion resistance even when a surface layer vanishes. SOLUTION: The corrosion-resistant member 1 comprises the base material 2, the surface layer 4 formed on the surface and a middle layer 3 which is formed on the base material 2 and in the middle of the base material 2 and the surface layer 4, and is substantially made of gadolinium oxide. By disposing the gadolinium oxide coated film as the middle layer 3 on the base material 2, the peeling of the middle layer 3 from the base material 2 can be prevented. Further, the middle layer 3 made of gadolinium oxide has high corrosion resistance even when the surface layer 4 vanishes and, therefore, particles are hardly produced from the vanished part. As the result, the corrosion-resistant member can be used for a long period of time. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够防止涂膜从基材剥离并且即使当表面层消失时也能保持高耐腐蚀性的耐腐蚀性构件。解决方案：耐腐蚀构件1包括基材2，形成在表面上的表面层4和形成在基材2上和基材2的中间的中间层3和表面层4，并且基本上由氧化钆制成。通过将氧化钆涂层膜作为中间层3设置在基材2上，可以防止中间层3从基材2的剥离。另外，由氧化钆构成的中间层3即使表层4消失也具有高耐腐蚀性，因此从消失部难以产生颗粒。结果，耐腐蚀构件可以长时间使用。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010106318A Corrosion-resistant member 有权
标题翻译：耐腐蚀成员
公开(公告)号：JP2010106318A
公开(公告)日：2010-05-13
申请号：JP2008279490
申请日：2008-10-30
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SAKAMAKI MAKOTO , TSUTAI YOSHIFUMI , INOUE YUKIO
IPC分类号： C23C4/00 , C23C16/44 , C23C28/04 , H01L21/205 , H01L21/3065 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide a corrosion-resistant member capable of maintaining product life for a long period of time without spoiling corrosion resistance by repairing the locally corroded member.
SOLUTION: The corrosion-resistant member 1 comprises a base material 2, a first oxide film 3 formed on the base material 2 and a second oxide coated film 4 formed of a material different from the first oxide film 3 on the base material 2. Thus, in the corrosion-resistant member 1, the base material 2 is coated with two kinds of oxide films. The corrosion-resistant member 1 is prepared by covering and repairing a partially corroded part of the member used in a plasma environment, for example, with a highly plasma-resistant material. As the result, the repaired corrosion-resistant member 1 can be used for a long period of time. Further, the second oxide coated film 4 can be partially coated and, therefore, the number of times of re-coating can be reduced and the corrosion-resistant member 1 can be used for a long period of time.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够长时间保持产品寿命而不会通过修理局部腐蚀构件来破坏耐腐蚀性的耐腐蚀构件。解决方案：耐腐蚀构件1包括基材2，形成在基材2上的第一氧化物膜3和由与基材上的第一氧化物膜3不同的材料形成的第二氧化物被覆膜4 因此，在耐腐蚀构件1中，基材2涂覆有两种氧化物膜。耐腐蚀构件1通过覆盖和修复等离子体环境中使用的部件的部分腐蚀部分，例如用高等离子体材料来制备。结果，经修复的耐腐蚀构件1可以长时间使用。此外，第二氧化物被覆膜4可以被部分地涂覆，因此可以减少再次涂覆的次数，并且耐腐蚀构件1可以被长时间使用。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2010106319A Corrosion-resistant member 有权
标题翻译：耐腐蚀成员
公开(公告)号：JP2010106319A
公开(公告)日：2010-05-13
申请号：JP2008279492
申请日：2008-10-30
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SAKAMAKI MAKOTO , TSUTAI YOSHIFUMI , INOUE YUKIO
IPC分类号： C23C4/10
摘要： PROBLEM TO BE SOLVED: To provide a corrosion-resistant member capable of reducing particles produced by the use in a plasma environment. SOLUTION: The corrosion-resistant member comprises a base material and a gadolinium oxide coated film having purity of 99.9% or more formed on the base material. Since the corrosion-resistant member is provided with a coated film formed of the gadolinium oxide coated film of a plasma material having higher durability than yttrium oxide (Y 2 O 3 ), the production of particles can be suppressed and can be used for a long period of time even when being used in the plasma environment. Further, since the base material is covered with the gadolinium oxide coated film having purity of 99.9% or more, particles produced when being used in the plasma environment are further reduced. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够减少在等离子体环境中使用所产生的颗粒的耐腐蚀构件。解决方案：耐腐蚀构件包括基材和形成在基材上的纯度为99.9％以上的氧化钆涂覆膜。由于耐腐蚀构件设置有由比氧化钇（Y 2 3 ）更高的耐久性的等离子体材料的氧化钆涂覆膜形成的涂膜，即使在等离子体环境中使用时，也可以抑制粒子的产生，长时间使用。此外，由于基材被纯度为99.9％以上的氧化钆覆膜覆盖，所以在等离子体环境中使用时产生的颗粒进一步降低。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009206455A Vacuum chuck 有权
标题翻译：真空罐
公开(公告)号：JP2009206455A
公开(公告)日：2009-09-10
申请号：JP2008050097
申请日：2008-02-29
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SUGAYA ATSUSHI , INOUE YUKIO , SATO SEIHIRO
IPC分类号： H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a vacuum chuck that securely sucks a deformed wafer with large curvature etc.
SOLUTION: An intermediate barrier 7 is disposed concentrically with an outer peripheral rib 3 enclosing an outer periphery of a vacuum chuck main body between the outer peripheral rib 3 and ribs 8a around lift pins enclosing a plurality of through-holes 8 wherein the lift pins 6 for attaching and detaching a body to be sucked such as a substrate move up and down, and many slits 11 are formed in the intermediate barrier 7 successively at predetermined intervals. Consequently, sucking of a wafer etc., is started at the center part and then is performed at the peripheral part via the slits next, so that secure suction is carried out.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种可靠地吸收具有大曲率等的变形晶片的真空卡盘。解决方案：中间阻挡层7与包围真空卡盘的外周的外周肋3同心地设置主体在外周肋3和肋8a之间，围绕提升销围绕多个通孔8，其中用于附接和拆卸待吸取的主体的提升销6（诸如基板）上下移动，并且许多狭缝11是以预定间隔连续地形成在中间屏障7中。因此，在中心部分开始吸取晶片等，然后通过下一个狭缝在周边部分进行，从而进行安全的抽吸。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2010106328A Corrosion-resistant member 有权
标题翻译：耐腐蚀成员
公开(公告)号：JP2010106328A
公开(公告)日：2010-05-13
申请号：JP2008280724
申请日：2008-10-31
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： SAKAMAKI MAKOTO , TSUTAI YOSHIFUMI , SATO KEISUKE , INOUE YUKIO
IPC分类号： C23C28/04 , C23C4/10 , C23C20/06
摘要： PROBLEM TO BE SOLVED: To provide a corrosion-resistant member capable of reducing particles produced by the use in a halogen-based corrosive gas and halogen-based gas plasma. SOLUTION: In the corrosion-resistant member, the surface to be exposed to the halogen-based corrosive gas, the halogen type gas plasma or the like, such as the inside of semiconductor manufacturing equipment, the inside of a flat panel display manufacturing apparatus or the inside of a solar cell manufacturing apparatus, is formed of a thermally sprayed film formed according to a thermal spraying method and a gadolinium oxide sol-gel film formed according to a sol-gel method. COPYRIGHT: (C)2010,JPO&INPIT

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