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    • 6. 发明授权
    • Electrostatic actuator device having multiple gap heights
    • 具有多个间隙高度的静电致动器装置
    • US08450902B2
    • 2013-05-28
    • US11467660
    • 2006-08-28
    • Peter M. GulvinPeter J. Nystrom
    • Peter M. GulvinPeter J. Nystrom
    • H02N1/00H01H59/00B41J2/45
    • H01H59/0009H01G5/18
    • The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.
    • 本申请涉及新型静电致动器和制造静电致动器的方法。 在一个实施例中,静电致动器包括衬底,形成在衬底上的电极和位于电极附近的可偏转构件,以便在电极和可偏转构件之间提供间隙。 可偏转构件经由一个或多个锚固件锚定在基底上。 所述间隙包括至少一个第一区域,其具有位于所述一个或多个锚固件附近的第一间隙高度和至少一个第二区域,所述第二区域具有比所述第一区域更远离所述锚定件的第二间隙高度。 第一间隙高度小于第二间隙高度。