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    • 1. 发明授权
    • Electrostatic actuator device having multiple gap heights
    • 具有多个间隙高度的静电致动器装置
    • US08450902B2
    • 2013-05-28
    • US11467660
    • 2006-08-28
    • Peter M. GulvinPeter J. Nystrom
    • Peter M. GulvinPeter J. Nystrom
    • H02N1/00H01H59/00B41J2/45
    • H01H59/0009H01G5/18
    • The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.
    • 本申请涉及新型静电致动器和制造静电致动器的方法。 在一个实施例中,静电致动器包括衬底,形成在衬底上的电极和位于电极附近的可偏转构件,以便在电极和可偏转构件之间提供间隙。 可偏转构件经由一个或多个锚固件锚定在基底上。 所述间隙包括至少一个第一区域,其具有位于所述一个或多个锚固件附近的第一间隙高度和至少一个第二区域,所述第二区域具有比所述第一区域更远离所述锚定件的第二间隙高度。 第一间隙高度小于第二间隙高度。
    • 7. 发明授权
    • Self-aligned precision datums for array die placement
    • 用于阵列管芯放置的自对准精密基准
    • US07681985B2
    • 2010-03-23
    • US12422532
    • 2009-04-13
    • Peter J. NystromPeter M. GulvinJohn P. Meyers
    • Peter J. NystromPeter M. GulvinJohn P. Meyers
    • B41J2/25
    • B41J2/16B41J2/1623B41J2/1626B41J2/1631B41J2/1632B41J2202/20
    • A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.
    • 本文描述了一种用于在包括更大的部分宽度阵列和全页宽度阵列的成像阵列中精确地定位管芯模块阵列的方法和所得到的装置。 该方法包括直接在单个硅模块上形成物理参考数据,并将各个模具模块定位在临时固定器上。 临时保持器包括对准工具,并且通过将物理基准原件抵靠对准工具而将单个模具放置在临时保持器上。 真空暂时固定定位在临时保持器上的模具,然后将永久基板附接到临时保持器的模具。 临时保持器被释放,有利于其上具有精确对准的模具模块的永久基板。
    • 8. 发明授权
    • Self-aligned precision datums for array die placement
    • 用于阵列管芯放置的自对准精密基准
    • US07571970B2
    • 2009-08-11
    • US11777475
    • 2007-07-13
    • Peter J. NystromPeter M. GulvinJohn P. Meyers
    • Peter J. NystromPeter M. GulvinJohn P. Meyers
    • B41J2/155
    • B41J2/16B41J2/1623B41J2/1626B41J2/1631B41J2/1632B41J2202/20
    • A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.
    • 本文描述了一种用于在包括更大的部分宽度阵列和全页宽度阵列的成像阵列中精确地定位管芯模块阵列的方法和所得到的装置。 该方法包括直接在单个硅模块上形成物理参考数据,并将各个模具模块定位在临时固定器上。 临时保持器包括对准工具,并且通过将物理基准原件抵靠对准工具而将单个模具放置在临时保持器上。 真空暂时固定定位在临时保持器上的模具,然后将永久基板附接到临时保持器的模具。 临时保持器被释放,有利于其上具有精确对准的模具模块的永久基板。