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1. 发明授权

US07518737B2 Displacement-measuring optical device with orifice 有权
标题翻译：带孔的位移测量光学装置
公开(公告)号：US07518737B2
公开(公告)日：2009-04-14
申请号：US11405053
申请日：2006-04-17
申请人： Neal Allen Hall , Fahrettin Levent Degertekin
发明人： Neal Allen Hall , Fahrettin Levent Degertekin
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B11/026 , G01B9/02051 , G01B2290/30 , G01D5/266 , H04R23/008
摘要： Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device can further include a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating and forming a wall of a cavity, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an orifice formed in the cavity to provide for the passage of air between the inside and outside of the cavity.
摘要翻译：公开了具有增强的性能特性的微米尺度位移测量装置。微米尺度位移测量装置的一个实施例包括用于反射入射光的第一部分并透射入射光的第二部分的相敏反射衍射光栅，使得入射光的第二部分被衍射。该装置还可以包括具有第一区域和第二区域的机械结构，机械结构定位在衍射光栅上方的距离d并形成空腔的壁，入射光的第二部分被反射离开第一区域的结构，使得由入射光的反射的第一部分和反射的第二部分形成干涉图案。该装置还可以包括形成在空腔中的孔口，以在空腔的内部和外部之间提供空气的通过。

2. 发明授权

US07440117B2 Highly-sensitive displacement-measuring optical device 有权
标题翻译：高灵敏度位移测量光学器件
公开(公告)号：US07440117B2
公开(公告)日：2008-10-21
申请号：US11405051
申请日：2006-04-17
申请人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
发明人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/02 , G01D5/266
摘要： Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device further includes a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an electrode extending toward, but spaced a distance away from, the second region of the mechanical structure.
摘要翻译：公开了具有增强的性能特性的微米尺度位移测量装置。微米尺度位移测量装置的一个实施例包括用于反射入射光的第一部分并透射入射光的第二部分的相敏反射衍射光栅，使得入射光的第二部分被衍射。该装置还包括具有第一区域和第二区域的机械结构，机械结构定位在衍射光栅上方的距离d处，入射光的第二部分被反射离开结构的第一区域，使得干涉图案由反射的第一部分和入射光的反射的第二部分形成。该装置还可以包括延伸到机械结构的第二区域的距离但间隔开距离的电极。

3. 发明授权

US07485847B2 Displacement sensor employing discrete light pulse detection 有权
标题翻译：采用离散光脉冲检测的位移传感器
公开(公告)号：US07485847B2
公开(公告)日：2009-02-03
申请号：US11297097
申请日：2005-12-08
申请人： Fahrettin Levent Degertekin , Wook Lee , Neal Allen Hall
发明人： Fahrettin Levent Degertekin , Wook Lee , Neal Allen Hall
IPC分类号： G01D5/36 , G02B27/42 , G02B5/18 , G01J1/32 , G01B11/02
CPC分类号： G01D5/38 , B33Y80/00 , G01D5/285
摘要： Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source for providing light. A first portion of the light can be reflected from the reflective diffraction grating and a second portion of the light passes through the grating to the reflector and is reflected back through the diffraction grating. The sensor may further include a detector for sensing an intensity of light in an interference pattern formed by the first portion of the light reflected from the diffraction grating and the second portion of the light reflected from the reflector. The sensor includes a controller configured to modulate an emission of the light.
摘要翻译：公开了用于操作光学传感器的光学传感器和方法。一个这样的传感器可以包括：与反射衍射光栅相距一定距离的反射器和用于提供光的光源。光的第一部分可以从反射衍射光栅反射，并且光的第二部分通过光栅到达反射器并通过衍射光栅被反射回来。传感器还可以包括用于感测由从衍射光栅反射的光的第一部分和从反射器反射的光的第二部分形成的干涉图案中的光强度的检测器。传感器包括配置成调制光的发射的控制器。

4. 发明授权

US07116430B2 Highly-sensitive displacement-measuring optical device 有权
标题翻译：高灵敏度位移测量光学器件
公开(公告)号：US07116430B2
公开(公告)日：2006-10-03
申请号：US10704932
申请日：2003-11-10
申请人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
发明人： Fahrettin Levent Degertekin , Neal Allen Hall , Wook Lee
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/026 , G01B9/02023 , G01B2290/30
摘要： The present invention relates to micron-scale displacement measurement devices. A first embodiment is a device that includes a substrate and a rigid structure suspended above the substrate to form a backside cavity. Formed in the rigid structure is a reflective diffraction grating positioned to reflect a first portion of an incident light and transmit a second portion of the incident light such that the second portion of the incident light is diffracted. The device also includes a membrane positioned a distance d above the reflective diffraction grating and at least a first photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the membrane.
摘要翻译：本发明涉及微米级位移测量装置。第一实施例是一种装置，其包括基板和悬挂在基板上方的刚性结构以形成背侧空腔。形成在刚性结构中的反射衍射光栅被定位成反射入射光的第一部分并透射入射光的第二部分，使得入射光的第二部分被衍射。该装置还包括位于反射衍射光栅上方距离d处的膜和至少第一光电检测器，用于接收从衍射光栅反射的入射光的第一部分产生的干涉图案，并将入射光的第二部分反射从膜。

5. 发明授权

US07461543B2 Overlay measurement methods with firat based probe microscope 失效
标题翻译：覆盖测量方法与基于探针显微镜
公开(公告)号：US07461543B2
公开(公告)日：2008-12-09
申请号：US11548531
申请日：2006-10-11
申请人： Fahrettin Levent Degertekin
发明人： Fahrettin Levent Degertekin
IPC分类号： G01B5/28
CPC分类号： G01Q70/02 , G01Q20/04 , G01Q60/38
摘要： A method, system and unit for determining alignment in a layered device such as a semiconductor device includes providing a first layer having detectable surface and subsurface material properties and positioning a patterned photoresist layer over the first layer, patterned photoresist layer having detectable surface and subsurface material properties. The layers are imaged with a FIRAT probe to detect the material properties, and the detectable material properties are compared for mapping an alignment of the compared detectable material properties. The first layer may be a substrate or have a previously processed layer formed thereon. A surface topography may be included over the substrate and an etchable layer formed over the substrate or first layer. The FIRAT probe may be a single tip probe or a dual tip probe.
摘要翻译：用于确定诸如半导体器件的分层器件中的对准的方法，系统和单元包括提供具有可检测表面和次表面材料性质的第一层，并将图案化光致抗蚀剂层定位在第一层之上，具有可检测表面和表面下材料的图案化光致抗蚀剂层属性。这些层用FIRAT探针成像以检测材料性质，并且比较可检测的材料性质以绘制比较的可检测材料性质的对准。第一层可以是衬底或者在其上形成预先处理的层。表面形貌可以包括在衬底上，并且可蚀刻层形成在衬底或第一层上。 FIRAT探针可以是单个尖端探针或双尖端探针。

6. 发明授权

US06567572B2 Optical displacement sensor 有权
公开(公告)号：US06567572B2
公开(公告)日：2003-05-20
申请号：US09896889
申请日：2001-06-28
申请人： Fahrettin Levent Degertekin , Goksen G. Yaralioglu , Butrus Thomas Khuri-Yakub
发明人： Fahrettin Levent Degertekin , Goksen G. Yaralioglu , Butrus Thomas Khuri-Yakub
IPC分类号： G02B626
CPC分类号： G02B27/4255 , G01D5/38 , G02B6/34 , G02B6/3516 , G02B6/3534 , G02B6/357 , G02B6/4214
摘要： An optical displacement sensor is provided for optically measuring the static and dynamic displacement of one or more reflectors that can be integrated in electronics and optics applications. The sensor includes an optically transparent substrate and a reflective grating deposited on the substrate. A light source provides optical illumination on the reflector through the substrate and the reflective grating. The reflector is positioned over the substrate and over the reflective grating. Furthermore, one or more photo-detectors are included to monitor reflected and diffracted light from the reflector and the reflective grating. The position of the reflector can be adjusted by applying at least one DC voltage. An AC signal could be added to at least one DC bias voltage for calibration of the sensor. The present invention also includes an array of reflectors as well as a transmission grating to deflect the optical illumination to the array of reflectors.

7. 发明授权

US6019000A In-situ measurement of deposition on reactor chamber members 失效
标题翻译：原位测量反应室成员上的沉积
公开(公告)号：US6019000A
公开(公告)日：2000-02-01
申请号：US975531
申请日：1997-11-20
申请人： Fred E Stanke , Butrus T. Khuri-Yakub , Fahrettin Levent Degertekin , Hung Pham
发明人： Fred E Stanke , Butrus T. Khuri-Yakub , Fahrettin Levent Degertekin , Hung Pham
IPC分类号： G01H5/00 , G01N29/07 , G01N29/32 , G01N29/34 , G01N9/24
CPC分类号： G01H5/00 , G01N29/075 , G01N29/326 , G01N29/348 , G01N2291/012 , G01N2291/0231 , G01N2291/02854 , G01N2291/02881 , G01N2291/0421 , G01N2291/0422
摘要： A system is disclosed that employs ultrasonic waves to perform in-situ measurements to determine the properties of films deposited on substrates in the course of various semiconductor or processing steps. In one embodiment a single transducer excites incident acoustic waves at multiple frequencies that reflect from the films. The reflected waves are received by the same transducer. An analysis system determines the phase shift of the received reflected waves and, based on the phase shift, determines the film properties. Other embodiments employ distinct source and receiving transducers. Embodiments are also disclosed that compensate the measured phase shift for temperature variations in the substrate. In one such system, temperature compensation is performed based on the processing of phase measurements made at multiple frequencies or incidence angles or with multiple ultrasonic modes. The disclosed techniques are equally applicable to determining the degree of erosion of chamber members.
摘要翻译：公开了一种采用超声波进行原位测量以确定在各种半导体或处理步骤过程中沉积在衬底上的膜的性质的系统。在一个实施例中，单个换能器以从膜反射的多个频率激发入射的声波。反射波由相同的传感器接收。分析系统确定接收的反射波的相移，并且基于相移来确定胶片特性。其他实施例采用不同的源和接收换能器。还公开了补偿测量的衬底温度变化的相移的实施例。在一个这样的系统中，基于在多个频率或入射角或多个超声波模式下进行的相位测量的处理来执行温度补偿。所公开的技术同样适用于确定室构件的侵蚀程度。

8. 发明授权

US07797757B2 Cantilevers with integrated actuators for probe microscopy 有权
标题翻译：具有集成执行器的悬臂用于探针显微镜
公开(公告)号：US07797757B2
公开(公告)日：2010-09-14
申请号：US11838547
申请日：2007-08-14
申请人： Fahrettin Levent Degertekin
发明人： Fahrettin Levent Degertekin
IPC分类号： G01Q20/04
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q60/38
摘要： An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.
摘要翻译：原子力显微镜传感器包括基底，悬臂梁和静电致动器。悬臂梁具有近端和相对的远端。近端与衬底处于固定关系，并且悬臂梁被配置为使得远端相对于衬底处于可移动的关系。静电致动器包括耦合到邻近近端的悬臂梁的第一电极和与衬底成固定关系的间隔开的第二电极。当在第一电极和第二电极之间施加电势时，第一电极被拉到第二电极，从而使悬臂梁的远端移动。

9. 发明授权

US07552625B2 Force sensing integrated readout and active tip based probe microscope systems 有权
标题翻译：力传感集成读数和有源尖探针显微镜系统
公开(公告)号：US07552625B2
公开(公告)日：2009-06-30
申请号：US11398650
申请日：2006-04-06
申请人： Fahrettin Levent Degertekin
发明人： Fahrettin Levent Degertekin
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q20/04 , G01Q20/02 , G01Q60/38
摘要： In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.
摘要翻译：根据本发明的实施例，存在用于基于探针的仪器的力传感器。力传感器可以包括检测表面和设置在检测表面上方第一距离的柔性机械结构，以便在柔性机械结构和检测表面之间形成间隙，其中柔性机械结构构造成在暴露于外力，从而改变第一距离。

10. 发明授权

US6070468A Micromachined ultrasonic leaky wave air transducers 失效
标题翻译：微加工超声波泄漏波空气传感器
公开(公告)号：US6070468A
公开(公告)日：2000-06-06
申请号：US842381
申请日：1997-04-23
申请人： Fahrettin Levent Degertekin , Abdullah Atalar , B. T. Khuri-Yakub
发明人： Fahrettin Levent Degertekin , Abdullah Atalar , B. T. Khuri-Yakub
IPC分类号： G01N29/02 , G10K11/28 , G10K11/36 , G10K15/04 , G01N29/24
CPC分类号： G01N29/022 , G10K11/28 , G10K11/36 , G10K15/04 , G01N2291/0421 , G01N2291/0428
摘要： A method is disclosed for selecting characteristics (i.e. thickness-frequency product, length and material) of leakage plates used in ultrasonic transducers that transfer ultrasonic energy via leakage to fluid media with low acoustic impedances. High leakage efficiency and wide bandwidths are achieved by exciting the low order antisymmetric Lamb wave mode (A0) at the selected frequency in the leakage plate. Various actuator configurations that can be used to excite and detect the A0 mode in the leakage plate are described. Some embodiments employ reflector structures to intercept the leaky waves and reform them into beams normal to the plane of the leakage plate.
摘要翻译：公开了一种用于选择在超声波换能器中使用的泄漏板的特性（即厚度 - 频率乘积，长度和材料）的方法，该超声换能器通过泄漏将超声波能量传递到具有低声阻抗的流体介质。通过在泄漏板中激励选定频率的低阶反对称兰姆波模式（A0）来实现高泄漏效率和宽带宽。描述了可用于激发和检测泄漏板中的A0模式的各种致动器配置。一些实施例采用反射器结构来拦截泄漏波并将其重新变换成垂直于泄漏板的平面的光束。

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