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1. 发明授权

US08985929B2 Substrate processing apparatus, substrate processing method and storage medium 有权
标题翻译：基板处理装置，基板处理方法和存储介质
公开(公告)号：US08985929B2
公开(公告)日：2015-03-24
申请号：US13611555
申请日：2012-09-12
申请人： Suguru Enokida , Masahiro Nakaharada , Akira Miyata , Hidekazu Kiyama , Naruaki Iida
发明人： Suguru Enokida , Masahiro Nakaharada , Akira Miyata , Hidekazu Kiyama , Naruaki Iida
IPC分类号： H01L21/677 , H01L21/67 , H01L21/687
CPC分类号： H01L21/67178 , H01L21/67745 , H01L21/67766 , H01L21/67769 , H01L21/67781 , H01L21/68707 , Y10S414/137 , Y10S414/139
摘要： A substrate processing apparatus includes: a carrier block including first and second carrier placement units spaced apart in a right and left direction; a processing block having a layered structure in which a plurality of layered parts are vertically arranged, the layered parts each including a substrate transport mechanism for transporting a substrate and a processing module for processing a substrate; a tower unit including plural substrate placement units located at height positions where a substrate is transferred by the substrate transport mechanism of the layered part corresponding to the substrate placement unit; a first substrate transfer mechanism configured to transfer a substrate between the carrier on the first carrier placement unit and the substrate placement unit of the tower unit; and a second substrate transfer mechanism configured to transfer a substrate between the carrier on the second substrate placement unit and the substrate placement unit of the tower unit.
摘要翻译：基板处理装置包括：载体块，其包括沿左右方向间隔开的第一和第二载体放置单元; 具有层叠结构的处理块，其中多个层叠部分垂直布置，所述层叠部分各自包括用于输送基板的基板传送机构和用于处理基板的处理模块; 塔架单元，其包括多个基板放置单元，位于基板通过与基板放置单元对应的层叠部的基板输送机构转印的高度位置; 第一基板传送机构，被配置为在第一载体放置单元上的载体和塔单元的基板放置单元之间传送基板; 以及第二基板输送机构，被配置为将基板转移到第二基板放置单元上的载体和塔单元的基板放置单元之间。

2. 发明申请

US20070160454A1 SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND COMPUTER-READABLE STORAGE MEDIUM 有权
标题翻译：基板承载装置，基板执行方法和计算机可读存储介质
公开(公告)号：US20070160454A1
公开(公告)日：2007-07-12
申请号：US11616484
申请日：2006-12-27
申请人： Naruaki Iida
发明人： Naruaki Iida
IPC分类号： B65H1/00 , C23F1/00 , C23C16/00
CPC分类号： B65G49/065 , B65G2249/02 , B65G2249/04 , H01L21/67784
摘要： A substrate carrying device capable of causing a substrate to float by a gas can be manufactured at a low manufacturing cost and can suppress the consumption of a gas for carrying the substrate. The substrate carrying device includes a carrying passage forming member forming a carrying passage along which a substrate is carried, exhaust grooves extending parallel to the carrying passage in the upper surface of the carrying passage forming member, a plurality of pairs each of right and left carrying gas flow grooves formed in the upper surface of the carrying passage forming member, inclined to a substrate carrying direction so as to approach the exhaust grooves from the right-hand side and the left-hand side of the exhaust grooves, respectively, and having inner ends joined to the exhaust grooves, respectively, and gas spouting pores formed near outer ends of the carrying gas flow grooves to spout a gas for causing the substrate to float and for creating substrate carrying gas flows flowing from the outer ends of the carrying gas flow grooves toward the inner ends of the carrying gas flow grooves. The gas spouted through the gas spouting pores causes the substrate to float and creates gas flows in the carrying gas flow grooves to propel the substrate in a carrying direction. The carrying passage is divided with respect to the carrying direction into passage sections, and the spouting of the gas through groups of the gas spouting pores assigned respectively to the passage sections is controlled to suppress the consumption of the gas.
摘要翻译：能够以低的制造成本制造能够使基板由气体漂浮的基板承载装置，并且可以抑制用于承载基板的气体的消耗。基板承载装置包括：承载通道形成构件，其形成承载基板的承载通道，在承载通道形成构件的上表面中平行于输送通道延伸的排出槽，多个左右的承载通道形成在输送通道形成部件的上表面中的气体流动槽分别倾斜到基板输送方向，以便从排气槽的右侧和左侧接近排气槽，并且具有内部分别连接到排气槽的端部和在承载气体流动槽的外端附近形成的气体喷出孔，以喷出用于使基板浮起的气体，以及用于产生从承载气体流的外端流动的衬底承载气体流凹槽朝向承载气流槽的内端。通过气体喷出的气体喷出的气体导致基板浮起并在承载气体流动槽中产生气体流动，从而沿着输送方向推进基板。输送通道相对于输送方向被分割成通道部分，并且通过分配到通道部分的气体喷出孔的组中的气体的喷射被控制以抑制气体的消耗。

3. 发明授权

US06709545B2 Substrate processing apparatus and substrate processing method 有权
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US06709545B2
公开(公告)日：2004-03-23
申请号：US10035122
申请日：2002-01-04
申请人： Naruaki Iida
发明人： Naruaki Iida
IPC分类号： C23F0100
CPC分类号： H01L21/67706 , H01L21/67017 , Y10S414/135 , Y10S414/139
摘要： In order to alleviate the affect of particles generated during operation of an elevation mechanism of a substrate conveyer means on the substrate that is transported in a substrate processing apparatus, a partition wall having a slit-like hole is provided in a casing that forms the outer housing of the elevation mechanism, whereby the casing is divided into a first chamber and a second chamber. A conveyer main unit holding a wafer is fixed to a rod-like support member. The support member has its end supported by a guide shaft. The guide shaft and a driving mechanism to move the support member upwards and downwards are provided in the first chamber. The support member descends and ascends along the guide shaft. A fan is disposed in the second chamber. A discharge outlet is formed at the bottom plane of the second chamber. By driving the fan, the atmosphere in the first chamber is attracted via the hole of the partition wall, whereby particles generated during the elevation of the conveyer main unit are discharged from the discharge outlet via the second chamber.
摘要翻译：为了减轻在基板处理装置中输送的基板上的基板输送装置的升降机构的运转时产生的粒子的影响，在形成外部的壳体中设置有具有狭缝状的孔的分隔壁升降机构的壳体，由此将壳体分成第一室和第二室。保持晶片的输送机主体固定在棒状支撑部件上。支撑构件的端部由导向轴支撑。引导轴和用于使支撑构件向上和向下移动的驱动机构设置在第一室中。支撑构件沿导向轴下降并上升。风扇设置在第二室中。排出口形成在第二室的底面。通过驱动风扇，第一室中的气氛通过分隔壁的孔而被吸引，由此在输送机主单元的升高期间产生的颗粒经由第二室从排出口排出。

4. 发明授权

US6050389A Carrier apparatus with more than one carrier belts and processing apparatus therewith 失效
标题翻译：具有多于一个传送带的载体设备及其处理设备
公开(公告)号：US6050389A
公开(公告)日：2000-04-18
申请号：US118830
申请日：1998-07-20
申请人： Naruaki Iida , Seiji Kozawa
发明人： Naruaki Iida , Seiji Kozawa
IPC分类号： B65G43/02 , B65G43/08 , B65G49/07 , H01L21/027 , H01L21/677 , B65G43/00
CPC分类号： H01L21/67742 , H01L21/67748 , Y10S414/137
摘要： A carrier apparatus is provided with a first carrier mechanism, a second carrier mechanism, and a sensor. The first carrier mechanism has a holding portion holding a substrate, a driving pulley, an idler pulley, and a first endless belt, the first endless belt being provided between the driving pulley and the idler pulley and the holding portion being attached to the first endless belt. The second carrier mechanism has a driving source with a rotation output shaft, a speed reducing pulley fixed on the driving pulley and more than one second endless belts, the above more than one second endless belts being provided between the rotation output shaft and the speed reducing pulley. A sensor detects the state of the second endless belt, for example, the occurrence of cutting. As a result, even if the state of a carrier belt deteriorates, the holding portion is prevented from falling.
摘要翻译：载体装置设置有第一载体机构，第二载体机构和传感器。第一承载机构具有保持基板，驱动带轮，惰轮和第一环形带的保持部，第一环形带设置在驱动带轮和惰轮之间，保持部附接到第一环带。第二承载机构具有驱动源，其具有旋转输出轴，固定在驱动滑轮上的减速轮和多于一个的第二环形带，上述多于一个的第二环形带设置在旋转输出轴与减速之间滑轮。传感器检测第二环形带的状态，例如发生切割。结果，即使载体带的状态劣化，也可以防止保持部落下。

5. 发明授权

US5460478A Method for processing wafer-shaped substrates 失效
标题翻译：晶圆基板的处理方法
公开(公告)号：US5460478A
公开(公告)日：1995-10-24
申请号：US403138
申请日：1995-03-13
申请人： Masami Akimoto , Kazutoshi Yoshioka , Naruaki Iida
发明人： Masami Akimoto , Kazutoshi Yoshioka , Naruaki Iida
IPC分类号： B65G1/00 , B65G1/07 , B65G49/07 , H01L21/677 , H01L21/683
CPC分类号： H01L21/67781 , H01L21/6838 , Y10S414/137 , Y10S414/141
摘要： An apparatus for coating and developing a resist on a wafer comprises a carrier station provided with a plurality of carriers for receiving wafers and transfer tables, a processing section having a plurality of processing units, and a transfer robot provided between the carrier station and the processing section. The robot comprises a plate-shaped arm for transferring wafers between the carriers and the transfer tables, and two horseshoe-shaped forks for transferring wafers between the processing units and transfer tables. The robot is movable along a transfer path so as to make the arm and forks face the carriers, processing units and transfer tables.
摘要翻译：一种用于在晶片上涂覆和显影抗蚀剂的设备包括：载体站，设置有用于接收晶片和转印台的多个载体，具有多个处理单元的处理部分和设置在载体站和处理之间的传送机器人部分。机器人包括用于在载体和转印台之间传送晶片的板状臂，以及用于在处理单元和转印台之间转印晶片的两个马蹄形叉。机器人可以沿传送路径移动，以使臂和叉面向载体，处理单元和传送台。

6. 发明授权

US08720873B2 Substrate holding device 有权
标题翻译：基板保持装置
公开(公告)号：US08720873B2
公开(公告)日：2014-05-13
申请号：US13418731
申请日：2012-03-13
申请人： Shinichi Hayashi , Suguru Enokida , Naruaki Iida , Hideki Kajiwara
发明人： Shinichi Hayashi , Suguru Enokida , Naruaki Iida , Hideki Kajiwara
IPC分类号： B25B1/00 , B24B5/00 , B24B29/00 , A47J45/00 , H01L21/683
CPC分类号： H01L21/6838
摘要： A substrate holding device including: a transfer arm body having a suction path; a pad body including a suction part having a suction surface and a suction port for holding the substrate by vacuum suction, and a cylindrical attachment part in which a suction hole communicating with the suction port is formed; a pad holding member provided with an insertion hole into which the attachment part of the pad body is loosely insertable and a communication path communicating with the suction hole and the suction path, and fixed to the transfer arm body; and an elastically deformable annular airtightness maintaining member with a circular cross-section interposed between an outer peripheral groove in an arc shape formed in the attachment part of the pad body and an inner peripheral groove in an arc shape formed at the insertion hole of the pad holding member.
摘要翻译：一种基板保持装置，包括：具有吸入路径的传送臂主体; 包括具有吸入面的吸引部和通过真空吸附保持基板的吸入口的垫体，以及形成有与吸入口连通的吸入孔的圆筒状的安装部，衬垫保持构件，其具有插入孔，所述垫体的安装部可松动地插入该插入孔中;以及连通路，其与所述吸入孔和所述吸入路径连通，并且固定到所述传送臂本体; 以及形成在所述垫主体的安装部分中的弧形外周槽和形成在所述垫的插入孔中的弧形的内周槽之间的具有圆形横截面的可弹性变形的环形气密保持构件控股成员

7. 外观设计

USD701498S1 Arm for wafer transportation for manufacturing semiconductor 有权
标题翻译：用于制造半导体的晶片运输的臂
公开(公告)号：USD701498S1
公开(公告)日：2014-03-25
申请号：US29414723
申请日：2012-03-02
申请人： Naruaki Iida , Hideki Kajiwara
设计人： Naruaki Iida , Hideki Kajiwara

8. 外观设计

USD695240S1 Arm for wafer transportation for manufacturing semiconductor 有权
标题翻译：用于制造半导体的晶片运输的臂
公开(公告)号：USD695240S1
公开(公告)日：2013-12-10
申请号：US29414720
申请日：2012-03-02
申请人： Naruaki Iida , Hideki Kajiwara
设计人： Naruaki Iida , Hideki Kajiwara

9. 外观设计

USD674761S1 Wafer holding member 有权
公开(公告)号：USD674761S1
公开(公告)日：2013-01-22
申请号：US29414719
申请日：2012-03-02
申请人： Naruaki Iida , Hideki Kajiwara
设计人： Naruaki Iida , Hideki Kajiwara

10. 发明授权

US07470098B2 Detecting apparatus and detecting method 有权
标题翻译：检测装置及检测方法
公开(公告)号：US07470098B2
公开(公告)日：2008-12-30
申请号：US11871422
申请日：2007-10-12
申请人： Naruaki Iida
发明人： Naruaki Iida
IPC分类号： H01L21/677 , G03D5/00
CPC分类号： H01L21/67265 , Y10S414/139
摘要： An optical sensor for detecting the housing state such as the thickness of a substrate in the present invention is provided at supporting arms. The supporting arms are attached to a supporting shaft. The supporting arms are in a vertical state in a state before detection of the substrate, but when detecting, the supporting shaft rotates to bring the supporting arms into a horizontal state so that the optical sensor enters a substrate housing body and is set at a predetermined detection position. Accordingly, a space for moving the optical sensor in the horizontal direction becomes unnecessary to reduce the space required for the detecting operation and the like, making it possible to reduce the size of a substrate processing apparatus in which the detecting apparatus is incorporated.
摘要翻译：在支撑臂上设有用于检测本发明的基板厚度等壳体状态的光学传感器。支撑臂连接到支撑轴。支撑臂在检测到基板之前的状态处于垂直状态，但是当检测到支撑轴旋转以使支撑臂处于水平状态，使得光学传感器进入基板壳体时并被设定在预定的检测位置。因此，不需要用于在水平方向上移动光学传感器的空间来减少检测操作等所需的空间，从而可以减小其中结合有检测装置的基板处理装置的尺寸。

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