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    • 1. 发明申请
    • TRAVEL SPEED LIMITTING APPARATUS
    • 旅行速度限制装置
    • US20090037067A1
    • 2009-02-05
    • US12183103
    • 2008-07-31
    • Naoto SENHiroshi SATOTadayoshi OKADAKenichi NISHIDAYasuhiko TOMOKUNIHideo NAKAHAMA
    • Naoto SENHiroshi SATOTadayoshi OKADAKenichi NISHIDAYasuhiko TOMOKUNIHideo NAKAHAMA
    • B60T8/32
    • B60K31/00B60W2520/10B60W2520/105B60W2540/10B60W2710/105
    • A travel speed limiting apparatus including: a travel speed measurement device which measures a travel speed of a vehicle; a speed limit memory device which stores a speed limit set by an operator; a first driving force limit value calculation device which calculates a first driving force limit value based on a deviation of the travel speed from the speed limit; a requested driving force calculation device which calculates a requested driving force based on an operator's acceleration operation; and a second driving force limit value calculation device which calculates a second driving force limit value based on the requested driving force, wherein the driving force limiting device sets an eventual driving force limit value to the smaller of the first driving force limit value and the second driving force limit value, and controls the driving force of the vehicle to be less than the eventual driving force limit value.
    • 一种行驶速度限制装置,包括:行驶速度测量装置,其测量车辆的行驶速度; 存储由操作者设定的速度限制的速度限制存储装置; 第一驱动力限制值计算装置,其基于行驶速度与速度限制的偏差来计算第一驱动力限制值; 请求驱动力计算装置,其基于操作者的加速操作来计算要求的驱动力; 以及第二驱动力极限值计算装置,其基于所请求的驱动力来计算第二驱动力极限值,其中,所述驱动力限制装置将最终的驱动力极限值设定为所述第一驱动力极限值的较小值, 驱动力极限值,并且控制车辆的驱动力小于最终驱动力极限值。
    • 4. 发明申请
    • IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
    • 印刷装置和制品制造方法
    • US20120141659A1
    • 2012-06-07
    • US13305990
    • 2011-11-29
    • Hiroshi SATO
    • Hiroshi SATO
    • B05D5/00B05C11/00B05C9/12
    • G03F7/0002B05C9/10B05C9/12B05C11/00B05C11/1021B05D3/067B05D3/12B29C59/002B82Y10/00B82Y40/00H01L21/3105H01L22/20
    • The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit.
    • 本发明的压印装置包括:保持单元,其构造成保持模具; 粒子检查单元,被配置为检查在所述基板的形成树脂图案的印模区域上是否存在颗粒; 分配器,被配置为将未固化的树脂施加到所述压印区域; 可移动单元,其构造成相对于所述保持单元移动所述压印区域; 和控制器。 可移动单元能够通过检查单元,借助于分配器的施加位置和通过保持单元的接触位置将压印区域移动到检查位置。 此外,控制器使得检查单元通过可移动单元与压印区域的移动相关联地执行对压印区域的检查。
    • 10. 发明申请
    • IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
    • 印刷装置及其制造方法
    • US20110278768A1
    • 2011-11-17
    • US13101614
    • 2011-05-05
    • Hiroshi SATO
    • Hiroshi SATO
    • G01B15/00B29B15/00
    • G03F9/7042B82Y10/00B82Y40/00G03F7/0002G03F9/7049G03F9/7076
    • An imprint apparatus includes a detector and an adjusting device. A second mark formed on a substrate includes a grating pattern having grating pitches in first and second directions which are respectively parallel to first and second axes which are parallel to a pattern surface of a mold and orthogonal to each other. A first mark formed on the mold includes a grating pattern having a grating pitch in the first direction. The first and second marks have different grating pitches in the first direction. The detector includes an image sensor, and an optical system which forms a moire fringe on an image sensing surface of the image sensor. The adjusting device adjusts, in a plane including the second axis and a third axis that is perpendicular to the first and second axes, an angle between the optical axis of the detector and the third axis.
    • 压印装置包括检测器和调节装置。 形成在基板上的第二标记包括在第一和第二方向上具有光栅间距的光栅图案,它们分别平行于与模具的图案表面平行并且彼此正交的第一和第二轴。 形成在模具上的第一标记包括在第一方向上具有光栅间距的光栅图案。 第一和第二标记在第一方向具有不同的光栅间距。 检测器包括图像传感器和在图像传感器的图像感测表面上形成莫尔条纹的光学系统。 调整装置在包括第二轴和垂直于第一和第二轴的第三轴的平面中调整检测器的光轴与第三轴之间的角度。