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    • 6. 发明申请
    • Semiconductor laser apparatus and manufacturing method thereof
    • 半导体激光装置及其制造方法
    • US20050238076A1
    • 2005-10-27
    • US10978487
    • 2004-11-02
    • Yasuaki KuwataHideo NakayamaAkemi MurakamiRyoji Ishii
    • Yasuaki KuwataHideo NakayamaAkemi MurakamiRyoji Ishii
    • H01S5/026H01S5/00H01S5/068H01S5/183H01S5/30
    • H01S5/0261H01S5/06825H01S5/18313H01S5/305H01S5/3054
    • A semiconductor laser apparatus includes a substrate, a vertical-cavity surface-emitting semiconductor laser diode (VCSEL) including a first and second mirror layers of a first and second conduction types, respectively, an active region between the first and second mirror layers, a first and second electrode layers electrically connected with the first and second mirror layers, respectively, and at least one Zener diode including a first and second semiconductor regions of a first and second conduction types, respectively, and a third and fourth electrode layers electrically connected with the first and second semiconductor regions, respectively. The second semiconductor region is formed in a portion of the first semiconductor region and forms a PN junction with the first semiconductor region. The VCSEL and the Zener diode are formed on the substrate. The first and second electrode layers are electrically connected with the fourth and third electrode layers, respectively.
    • 半导体激光装置包括基板,垂直腔表面发射半导体激光二极管(VCSEL),分别包括第一和第二导电类型的第一和第二反射镜层,第一和第二反射镜层之间的有源区, 分别与第一和第二镜层电连接的第一和第二电极层和分别包括第一和第二导电类型的第一和第二半导体区域的至少一个齐纳二极管以及与第一和第二电极层电连接的第三和第四电极层 第一和第二半导体区域。 第二半导体区域形成在第一半导体区域的一部分中并与第一半导体区域形成PN结。 在衬底上形成VCSEL和齐纳二极管。 第一和第二电极层分别与第四和第三电极层电连接。
    • 8. 发明授权
    • Semiconductor laser apparatus and manufacturing method thereof
    • 半导体激光装置及其制造方法
    • US07483464B2
    • 2009-01-27
    • US10978487
    • 2004-11-02
    • Yasuaki KuwataHideo NakayamaAkemi MurakamiRyoji Ishii
    • Yasuaki KuwataHideo NakayamaAkemi MurakamiRyoji Ishii
    • H01S5/00
    • H01S5/0261H01S5/06825H01S5/18313H01S5/305H01S5/3054
    • A semiconductor laser apparatus includes a substrate, a vertical-cavity surface-emitting semiconductor laser diode (VCSEL) including a first and second mirror layers of a first and second conduction types, respectively, an active region between the first and second mirror layers, a first and second electrode layers electrically connected with the first and second mirror layers, respectively, and at least one Zener diode including a first and second semiconductor regions of a first and second conduction types, respectively, and a third and fourth electrode layers electrically connected with the first and second semiconductor regions, respectively. The second semiconductor region is formed in a portion of the first semiconductor region and forms a PN junction with the first semiconductor region. The VCSEL and the Zener diode are formed on the substrate. The first and second electrode layers are electrically connected with the fourth and third electrode layers, respectively.
    • 半导体激光装置包括基板,垂直腔表面发射半导体激光二极管(VCSEL),分别包括第一和第二导电类型的第一和第二反射镜层,第一和第二反射镜层之间的有源区, 分别与第一和第二镜层电连接的第一和第二电极层和分别包括第一和第二导电类型的第一和第二半导体区域的至少一个齐纳二极管以及与第一和第二电极层电连接的第三和第四电极层 第一和第二半导体区域。 第二半导体区域形成在第一半导体区域的一部分中并与第一半导体区域形成PN结。 在衬底上形成VCSEL和齐纳二极管。 第一和第二电极层分别与第四和第三电极层电连接。