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    • 3. 发明授权
    • Method for manufacturing SiC semiconductor device
    • SiC半导体器件的制造方法
    • US07745276B2
    • 2010-06-29
    • US12068263
    • 2008-02-05
    • Eiichi OkunoHiroki NakamuraNaohiro Suzuki
    • Eiichi OkunoHiroki NakamuraNaohiro Suzuki
    • H01L21/8234
    • H01L29/7828H01L29/045H01L29/0615H01L29/0619H01L29/0657H01L29/1608H01L29/45H01L29/66068H01L29/7802H01L29/7811H01L29/7813
    • A method for manufacturing a SiC semiconductor device includes: preparing a SiC substrate having a (11-20)-orientation surface; forming a drift layer on the substrate; forming a base region in the drift layer; forming a first conductivity type region in the base region; forming a channel region on the base region to couple between the drift layer and the first conductivity type region; forming a gate insulating film on the channel region; forming a gate electrode on the gate insulating film; forming a first electrode to electrically connect to the first conductivity type region; and forming a second electrode on a backside of the substrate. The device controls current between the first and second electrodes by controlling the channel region. The forming the base region includes epitaxially forming a lower part of the base region on the drift layer.
    • 一种制造SiC半导体器件的方法包括:制备具有(11-20)取向表面的SiC衬底; 在衬底上形成漂移层; 在漂移层中形成基极区; 在所述基底区域中形成第一导电类型区域; 在所述基极区上形成沟道区,以在所述漂移层和所述第一导电类型区之间耦合; 在沟道区上形成栅极绝缘膜; 在栅极绝缘膜上形成栅电极; 形成电连接到所述第一导电类型区域的第一电极; 以及在所述衬底的背面上形成第二电极。 该器件通过控制沟道区域来控制第一和第二电极之间的电流。 形成基极区域包括外延地形成漂移层上的基极区域的下部。