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1. 发明申请

WO2005047944A1 A LOW LOSS SILICON OXYNITRIDE OPTICAL WAVEGUIDE, A METHOD OF ITS MANUFACTURE AND AN OPTICAL DEVICE 审中-公开
标题翻译：低损耗硅氧化物光波导，其制造方法和光学器件
公开(公告)号：WO2005047944A1
公开(公告)日：2005-05-26
申请号：PCT/EP2004/052913
申请日：2004-11-10
申请人： NKT RESEARCH & INNOVATION A/S , MATTSSON, Kent, Erik , NIELSEN, Lars, Pleth
发明人： MATTSSON, Kent, Erik , NIELSEN, Lars, Pleth
IPC分类号： G02B6/12
CPC分类号： C03C3/045 , C03C17/3435
摘要： The invention relates to an optical waveguide for guiding light in a predefined wavelength range, the optical waveguide comprising core and cladding regions for confining light, the core and/or cladding region or regions being formed on a substrate and comprising material of the stoichiometric composition Si a O X N y X z H v . The invention further relates to a method of manufacturing an optical waveguide, an optical waveguide obtainable by the method and an optical device comprising such a waveguide. The object of the present invention is to provide an optical waveguide with low optical loss due to a reduced hydrogen bond-originated absorption. The problem is solved in that X is selected from the group of elements B, AI, P, S, As, Sb and combinations thereof, and the ratio y/z is larger than 1. This has the advantage that a low optical absorption in the waveguide may be achieved, possibly over a broad wavelength range. Further, a relatively low annealing temperature may be used yielding a relatively low induced strain whereby a low birefringence may be achieved. The optical waveguide may e.g. be manufactured by PECVD, which is ideal for the further processing of low loss waveguides. Waveguides according to the invention show superior transmission characterized with losses below 0.05 dB/cm between 900 nm and 1600 nm. In particular the absorption due to the second overtone of the Si:N-H vibration may be lowered to a value below the detection level. The invention may e.g. be used for the optical communications systems, in particular for branching components (e.g. splitters) and components for wavelength division multiplexing (WDM) systems, e.g. telecommunication systems, fibre-to-the-home, etc.
摘要翻译：本发明涉及一种用于引导预定波长范围的光的光波导，该光波导包括用于限制光的芯和包层区域，在基底上形成的芯和/或包层区域或区域包括化学计量组成SiaOXNyXzHv的材料。本发明还涉及一种制造光波导的方法，通过该方法获得的光波导和包括这种波导的光学装置。本发明的目的是提供一种由于氢键起始吸收降低而导致光损耗低的光波导。解决的问题是X选自元素B，AI，P，S，As，Sb及其组合，并且y / z比大于1.这具有以下优点：可以在宽波长范围内实现波导。此外，可以使用相对低的退火温度，产生相对低的诱导应变，由此可以实现低双折射。光波导可以例如。由PECVD制造，是进一步处理低损耗波导的理想选择。根据本发明的波导显示出在900nm和1600nm之间的损耗低于0.05dB / cm的优良传输。特别地，由于Si：N-H振动的第二泛音引起的吸收可能降低到低于检测水平的值。本发明可以例如用于光通信系统，特别是用于分支组件（例如，分离器）和用于波分复用（WDM）系统的组件，例如，电信系统，光纤到户等

2. 发明申请

WO2003034113A3 INTEGRATED PHOTONIC CRYSTAL STRUCTURE AND METHOD OF PRODUCING SAME 审中-公开
公开(公告)号：WO2003034113A3
公开(公告)日：2003-04-24
申请号：PCT/DK2002/000700
申请日：2002-10-21
申请人： NKT RESEARCH & INNOVATION A/S , DRIDI, Kim, Hakim , MATTSSON, Kent, Erik
发明人： DRIDI, Kim, Hakim , MATTSSON, Kent, Erik
IPC分类号： G02B6/12
摘要： An integrated photonic crystal (IPC) structure and method of producing same is disclosed. The (IPC) structure includes a first layered sub-structure (610, 620) with a surface and a one-dimensionalperiodic refractive index variation along the direction perpendicular to the surface. This first layered sub-structure enables a photonic band gap or high omnidirectional reflectivity for propagation of radiation having a spectrum of electromagnetic modes incident from a direction perpendicular to the plane of the surface. The IPC-structure further includes a first defect (630) in the first layered sub-structure that enables an electromagnetic mode to be localised in the vicinity of the first defect. The electromagnetic radiation is hereby vertically confined. Furthermore, the IPC-structure consists of a second sub-structure with a plurality of essentially straight identical passages (635) arranged in a two dimensional periodic pattern cutting through the layered structure at an angle α. This second sub-structure enables a two-dmensional photonic band gap for propagation of radiation having a spectrum of electromagnetic modes incident from any direction in the plane of the surface. A second defect (640) in the second sub-structure enables an electromagnetic mode to be localised in the vicinity of the second defect. By means of the first and second defects in the first layered and second sub-structures a photonic crystal waveguide may e.g. be constructed (650). This photonic crystal waveguide can control and filter light very efficiently and radiation losses can be minimised significantly. The method is particularly well-suited for providing layered structures in which the layers are non-mono-crystalline. The method is based on standard processing steps and tools from the semiconductor and integrated optics industry such as vapour deposition or sputtering, (photo)lithography and etching. With the invention a basic building block for a high-density integrated optics platform for telecommunications and advanced optical signal processing in general is disclosed.

3. 发明公开

EP1436652A2 INTEGRATED PHOTONIC CRYSTAL STRUCTURE AND METHOD OF PRODUCING SAME 审中-公开
标题翻译：新泽西州赫尔辛格大学的综合性学术研究所（INTEGRIERTE PHOTONENKRISTALLSTRUKTUR）
公开(公告)号：EP1436652A2
公开(公告)日：2004-07-14
申请号：EP02787418.9
申请日：2002-10-21
申请人： NKT Research & Innovation A/S
发明人： DRIDI, Kim, Hakim , MATTSSON, Kent, Erik
IPC分类号： G02B6/12
CPC分类号： G02B6/132 , B82Y20/00 , G02B6/1225 , G02B6/13 , G02B2006/12176
摘要： An integrated photonic crystal (IPC) structure and method of producing same is disclosed. The (IPC) structure includes a first layered sub-structure (610, 620) with a surface and a one-dimensionalperiodic refractive index variation along the direction perpendicular to the surface. This first layered sub-structure enables a photonic band gap or high omnidirectional reflectivity for propagation of radiation having a spectrum of electromagnetic modes incident from a direction perpendicular to the plane of the surface. The IPC-structure further includes a first defect (630) in the first layered sub-structure that enables an electromagnetic mode to be localised in the vicinity of the first defect. The electromagnetic radiation is hereby vertically confined. Furthermore, the IPC-structure consists of a second sub-structure with a plurality of essentially straight identical passages (635) arranged in a two dimensional periodic pattern cutting through the layered structure at an angle α. This second sub-structure enables a two-dmensional photonic band gap for propagation of radiation having a spectrum of electromagnetic modes incident from any direction in the plane of the surface. A second defect (640) in the second sub-structure enables an electromagnetic mode to be localised in the vicinity of the second defect. By means of the first and second defects in the first layered and second sub-structures a photonic crystal waveguide may e.g. be constructed (650). This photonic crystal waveguide can control and filter light very efficiently and radiation losses can be minimised significantly. The method is particularly well-suited for providing layered structures in which the layers are non-mono-crystalline. The method is based on standard processing steps and tools from the semiconductor and integrated optics industry such as vapour deposition or sputtering, (photo)lithography and etching. With the invention a basic building block for a high-density integrated optics platform for telecommunications and advanced optical signal processing in general is disclosed.
摘要翻译：一种集成光子晶体（IPC）结构及其制造方法，其中IPC结构包括沿垂直于该表面的方向具有表面和一维周期性折射率变化的第一分层子结构，以及第二子结构，其具有多个基本上直的相同的通道，其以二维周期性图案排列，以一角度α切割穿过层状结构。分别在第一和第二子结构中的第一和第二缺陷使得电磁模式能够被定位在缺陷附近，并且允许构造能够非常有效地控制和过滤光并使辐射损耗最小化的光子晶体波导。

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