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    • 1. 发明专利
    • FIXING JIG AND METHOD FOR ADHESION AND FIXATION
    • JPH09145947A
    • 1997-06-06
    • JP30291895
    • 1995-11-21
    • NIPPON TELEGRAPH & TELEPHONE
    • KUDO KAZUKIOHIRA FUMIKAZUKOYABU KUNIOMATSUNAGA KOJI
    • G02B6/24G02B6/40
    • PROBLEM TO BE SOLVED: To easily handle a small-sized transparent plate and enable high- precision positioning by providing a recessed part which has a depth less than the thickness of a transparent plate and contains the transparent plate at the center part of a plate type component and a through hole at a part of the recessed part. SOLUTION: The recessed part which has a depth less than the thickness of the glass plate 1 and contains the glass plate 1 is formed on the reverse surface of the center part of the fixing jig 6 and the through hole 8 which penetrates the fixing jig 6 is provided at a part of the recessed part. The fixing jig 6 and glass plate 1 which are held by vacuum suction pads 10-1 to 10-3 are moved and the glass plate part is positioned above optical fibers 3 arrayed in grooves on a substrate 2, and the glass plate 1 is pressed against the optical fibers 3. Then, the vacuum suction pads 10 are released the retract them, and an ultraviolet-ray-setting adhesive is injected between the glass plate 1 and substrate 2 and set by irradiation with ultraviolet rays through the through hole 8. After the adhesive is set, only the fixing jig 6 is sucked and collected. Consequently, the optical fibers 3 can be fixed between the substrate 2 and glass plate 1.
    • 8. 发明专利
    • MEASURING ERROR CORRECTION METHOD
    • JPH07190741A
    • 1995-07-28
    • JP33301793
    • 1993-12-27
    • NIPPON TELEGRAPH & TELEPHONE
    • KOYABU KUNIOMATSUNAGA KOJI
    • G01B11/26
    • PURPOSE:To enhance measuring accuracy in a simple constitution by measuring in advance a relation between the position of each stage, and each image at the aforesaid positions, or each error in posture for a measured object, and thereby removing errors made at the time of measurement based on the aforesaid relation. CONSTITUTION:Each coordinate of three marks MA through MC in the Z direction out of marks for the four corners of a two dimensional measuring reference scale 4, is obtained with X and Y axis stages 8 and 6 driven, based on the obtained coordinates, a parallel adjustment for the X Y scanning surface of the scale 4 and a photographing optical system is carried out, and the adjustment of a rotating angle around a Z axis for a Z axis (a Y axis) is also carried out, so that the relative error in posture between the stages 6 and 8 is thereby corrected. Next, the positional coordinate of each mark in the X direction from the mark MA is measured the difference between each aforesaid measured coordinate and the coordinate of each mark which is accurately measured in advance, is stored as measuring errors which depend on the posture of each stage 6 and 8 at the positions of the respective marks. In a practical measurement, a corrected value where each corresponding measuring error is added to each measured value at the measuring positions of the stages 6 and measured value where each measuring error due to the posture of each stage 6 and 8 is removed.