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    • 5. 发明专利
    • Method for quantitative determination classified by states for component contained in base metal by emission spectrophotometry
    • 通过排放分光光度法测定基质金属元素的定量分析方法
    • JP2005345127A
    • 2005-12-15
    • JP2004161761
    • 2004-05-31
    • Nippon Steel Corp新日本製鐵株式会社
    • MIZUKAMI KAZUSANEKAWAKAMI KAZUTO
    • G01N21/67G01N33/20
    • PROBLEM TO BE SOLVED: To provide a state-classified fractional quantitative determination method for components in metal by emission spectrophotometry.
      SOLUTION: In this method, a sample is set in an emission spectrophotometer, a voltage is impressed between a sample surface and an electrode to generate spark discharge, so as to conduct measurement from 1 pulse to several pulses, an obtained emission spectrum is dispersed by a spectroscope, a pulse intensity re-arrayed (PSA) diagram, wherein a pulse intensity order is plotted on an abscissa, and wherein an emission pulse intensity is plotted on an ordinate, is prepared on the basis of a data where the spectral line emission intensity in every one pulse of the specified component is converted into a digital signal value, a product of 50% intermediate intensity multiplied by the total pulse number is made to revert to a total amount (Total) of the specified component, a difference provided by subtracting the total amount from the total pulse integrated area is made to revert to an insoluble component amount (Insol.), and a solid solution component amount (Sol.) is found on the basis of a difference between the total amount of the specified component and the insoluble component amount.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过发射分光光度法提供金属成分的状态分类分数定量测定方法。 解决方案:在该方法中,将样品置于发射分光光度计中,在样品表面和电极之间施加电压以产生火花放电,从而将测量从1脉冲传导到几个脉冲,获得的发射光谱 通过分光镜分散,脉冲强度重排(PSA)图,其中脉冲强度顺序绘制在横坐标上,其中发射脉冲强度绘制在纵坐标上,是基于数据,其中 将指定分量的每一个脉冲中的谱线发射强度转换为数字信号值,将50%中间强度乘以总脉冲数的乘积恢复为指定分量的总量(Total),a 通过从总脉冲积分区域减去总量而提供的差异恢复为不溶性成分量(Insol。),并且在此基础上发现固溶成分量(Sol。) 指定成分的总量与不溶成分量之间的差异。 版权所有(C)2006,JPO&NCIPI
    • 7. 发明专利
    • QUALITY INSPECTION METHOD OF SILICON WAFER
    • JPH09199562A
    • 1997-07-31
    • JP2591196
    • 1996-01-19
    • NIPPON STEEL CORP
    • IKEMATSU YOICHIDEAI HIROYUKIIWASAKI TOSHIOKAWAKAMI KAZUTO
    • G06M11/00H01L21/66
    • PROBLEM TO BE SOLVED: To enable quickly estimating fraction defective at a low cost as compared with the case measuring a practical oxide film withstand voltage, and with high precision as compared with the conventional simple method, by forming an oxide film, by thermal oxidation, on a washed surface subjected to mirror finish and counting the number of COP's which have appeared in the process. SOLUTION: After a silicon single crystal stick is grown, a wafer having a specified width is cut out from the single crystal stick, and the surface of the wafer is mirror finished and washed. An oxide film is formed on the surface by thermal oxidation, the number of COP's which have appeared in the process is counted, and the crystal quality is estimated. As to the condition of thermal oxidation, it is preferable that the width of the oxide film is set to be 7-40nm in dry oxygen atmosphere at 800-1100 deg.C. Thereby close positive correlation shown in a figure exists between the density of the COP's which have appeared after the oxide film is formed and that of oxide film withstand voltage deterioration factors, so that the oxide film withstand voltage can be indirectly estimated on the basis of the counting value of the COP's.
    • 9. 发明专利
    • SELECTIVE ETCHANT FOR SILICON CRYSTAL
    • JPH04209532A
    • 1992-07-30
    • JP40535590
    • 1990-12-06
    • NIPPON STEEL CORP
    • IWASAKI TOSHIOKAWAKAMI KAZUTOHAGA HIROTSUGU
    • C23F1/24H01L21/308
    • PURPOSE:To completely eliminate the danger of an operation due to a liquid containing chromium (VI), to completely eliminate the contamination of surroundings and to make the performance of the title etchant equal to or superior to the liquid by a method wherein nitric acid instead of chromium (VI) is contained as an oxidizing agent and the ratio of contained components is made optimum. CONSTITUTION:An etchant which is used to selectively etch a silicon crystal is composed of the following: 36.5 to 49.5vol.% nitric acid as an oxidizing agent; 1.5 to 5vol.% hydrofluoric acid as an oxide solvent; 12.5 to 33.5vol.% acetic acid as a reaction buffer agent; and water and unavoidable impurities as the remaining part. When a crystal including defects is etched by using the etchant composed of the components, a clear etching pit which reflects the shape of the defects is revealed irrespective of a crystal orientation on the surface, and the surface is roughened little. As a result, it is possible to accurately judge the type, the size, the density, the position, the distribution and the like of the defects. Thereby, it is possible to clarlify a crystal defect which causes the operation error, of a highly integrated operation element, whose cause has been unaccountable so far and to enhance the production yield of a device. In addition, it is possible to completely eliminate the danger of an operation and the contamination of surroundings and to make the performance of the title etchant excellent.
    • 10. 发明专利
    • Atom probe device
    • 原子探针装置
    • JP2008262879A
    • 2008-10-30
    • JP2007106450
    • 2007-04-13
    • Nippon Steel Corp新日本製鐵株式会社
    • TAKAHASHI ATSUSHIKAWAKAMI KAZUTOYAMAGUCHI YUKIKO
    • H01J37/285
    • PROBLEM TO BE SOLVED: To improve a function of an atom probe device capable of investigating an atom structure in a very minute region by directly measuring atoms one by one.
      SOLUTION: This invention provides this atom probe device characterized by including: an electric field ion microscope device; an electric field ion microscope image introduction device introducing an electric field ion microscope image imaged by the electric field ion microscope device; and an electric field ion microscope image analyzer analyzing the introduced electric field ion microscope image.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:通过直接测量原子来改善能够研究非常微小区域中的原子结构的原子探针装置的功能。 解决方案:本发明提供了这种原子探针装置,其特征在于包括:电场离子显微镜装置; 引入由电场离子显微镜装置成像的电场离子显微镜图像的电场离子显微镜图像引入装置; 和电场离子显微镜图像分析仪分析引入的电场离子显微镜图像。 版权所有(C)2009,JPO&INPIT