专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2012029998A2 MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG 审中-公开
标题翻译：电磁驱动器的微通道冷却线圈显示降低的涡流电流
公开(公告)号：WO2012029998A2
公开(公告)日：2012-03-08
申请号：PCT/JP2011070669
申请日：2011-09-05
申请人： NIPPON KOGAKU KK , BINNARD MICHAEL B , COAKLEY SCOTT , POON ALEX , TOTSU MASAHIRO , COON DEREK , KHO LEONARD , KESWANI GAURAV , COOPER ALEXANDER , PHARAND MICHEL , BJORK MATT
发明人： BINNARD MICHAEL B , COAKLEY SCOTT , POON ALEX , TOTSU MASAHIRO , COON DEREK , KHO LEONARD , KESWANI GAURAV , COOPER ALEXANDER , PHARAND MICHEL , BJORK MATT
IPC分类号： H02K3/24
CPC分类号： H02K9/22 , G03F7/70758 , G03F7/70875 , H02K9/19 , H02K41/031 , H02K2201/18
摘要： Linear and planar motors, as exemplary electromagnetic actuators, are disclosed that have at least one actively cooled coil assembly. An exemplary assembly includes a coil having first and second main surfaces. Also included is a respective thermally conductive cooling plate in thermal contact with at least one main surface of the coil. A coolant passageway is defined in or on each cooling plate, and a liquid coolant passes through the coolant passageway. The coolant passageway has a primary pattern that is coextensive with at least part of the main surface of the coil. The primary pattern can include a secondary pattern producing coolant flow through the coolant passageway in a manner that reduces eddy-current losses in the cooling plate. The coolant passageway desirably includes. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices provide more effective cooling, with better reliability and ease of maintenance, and reduced eddy-current drag than conventional actuators.
摘要翻译：作为示例性电磁致动器，公开了线性和平面电机，其具有至少一个主动冷却的线圈组件。示例性组件包括具有第一和第二主表面的线圈。还包括与线圈的至少一个主表面热接触的相应导热冷却板。冷却剂通路限定在每个冷却板中或上，并且液体冷却剂穿过冷却剂通路。冷却剂通道具有与线圈的主表面的至少一部分共同延伸的主要图案。主要模式可以包括次要模式，以减少冷却板中的涡流损失的方式产生通过冷却剂通道的冷却剂流。冷却剂通道理想地包括。示例性的次级模式是蛇形。示例性主要图案是径向或具有径向方面，诸如X形图案。该设备提供更有效的冷却，具有更好的可靠性和易于维护，并且比传统执行器减少了涡流阻力。

2. 发明申请

WO2013070568A3 SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY 审中-公开
标题翻译：用于控制反应组件温度的系统和方法
公开(公告)号：WO2013070568A3
公开(公告)日：2015-06-11
申请号：PCT/US2012063646
申请日：2012-11-06
申请人： NIPPON KOGAKU KK , PHARAND MICHEL , MAHADESWARASWAMY CHETAN , BINNARD MICHAEL B
发明人： PHARAND MICHEL , MAHADESWARASWAMY CHETAN , BINNARD MICHAEL B
IPC分类号： G05D23/275
CPC分类号： G03F7/70716 , B01J19/0093 , B01J2219/00783 , B01J2219/00873 , G03F7/70758 , G03F7/70858 , G03F7/70875 , H01L21/682
摘要： A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).
摘要翻译：一种舞台组件（10），包括（i）保持装置（26）的舞台（14）; （ii）与所述载物台（14）间隔开的反应组件（18）; （iii）移动所述载物台（14）的载物台移动器（16），所述载物台移动器（16）包括联接到所述载物台（14）的磁体阵列（38）和导体阵列（36），所述导体阵列反应组件（18）; （iv）温度调节器（20）; 和（v）选择性地控制温度调节器（20）的控制系统（22）。导体阵列（36）包括一组第一区导体单元（250）和一组第二区导体单元（252）。温度调节器（20）独立地调节该组第一区导体单元（250）和该组第二区导体单元（252）的温度。

3. 发明申请

WO2006052855A2 FINE STAGE Z SUPPORT APPARATUS 审中-公开
标题翻译：精美舞台Z支持装置
公开(公告)号：WO2006052855A2
公开(公告)日：2006-05-18
申请号：PCT/US2005040229
申请日：2005-11-04
申请人： NIPPON KOGAKU KK , BINNARD MICHAEL B , HAZELTON ANDREW J , WATSON DOUGLAS C , ARAI YOICHI
发明人： BINNARD MICHAEL B , HAZELTON ANDREW J , WATSON DOUGLAS C , ARAI YOICHI
IPC分类号： A47J43/08
CPC分类号： G03F7/70816 , G03F7/70716 , H01L21/682 , Y10T29/41
摘要： An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.
摘要翻译：公开了一种用于支撑物体的装置。该装置包括联接到空气波纹管的空气轴承。当在真空环境中使用时，装置优选地包括具有真空的空气轴承壳体，以去除在空气轴承中使用的加压流体。

4. 发明申请

WO2010041771A3 PLANAR MOTOR WITH WEDGE SHAPED MAGNETS AND DIAGONAL MAGNETIZATION DIRECTIONS 审中-公开
标题翻译：带楔形磁铁和对角线磁化方向的平面电机
公开(公告)号：WO2010041771A3
公开(公告)日：2010-08-12
申请号：PCT/JP2009067952
申请日：2009-10-09
申请人： NIPPON KOGAKU KK , BINNARD MICHAEL B , GERY JEAN-MARC
发明人： BINNARD MICHAEL B , GERY JEAN-MARC
IPC分类号： H02K41/03 , H02K1/17
CPC分类号： H02K1/17 , H02K1/278 , H02K41/031 , H02K2201/18
摘要： A planar motor (32) for positioning a stage (44) along a first axis, and along a second axis that is perpendicular to the first axis includes a conductor array (52) and a magnet array (34). The conductor array (52) includes at least one conductor (256). The magnet array (34) is positioned near the conductor array (52) and is spaced apart from the conductor array (52) along a third axis that is perpendicular to the first axis and the second axis. The magnet array (34) includes a first magnet unit (264) having a first diagonal magnet (Dl) with a diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. This leads to strong magnetic fields above the magnet array (34) and strong force generation capability. Further, the planar motor (32) provided herein has less stray magnetic fields that extend beyond the magnet array (34) than a comparable prior art planar motor. Moreover, the first magnet unit (264) can include a second diagonal magnet (D2), a third diagonal magnet (D3), and a fourth diagonal magnet (D4) that cooperate to provide a first combined magnetic flux (276) that is somewhat aligned along the third axis in a first flux direction. In this embodiment, each diagonal magnet (Dl) (D2) (D3) (D4) has the diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. Moreover, each diagonal magnet (Dl) (D2) (D3) (D4) can be generally triangular wedge shaped and the diagonal magnets (Dl) (D2) (D3) (D4) are arranged together into the shape of a parallelepiped.
摘要翻译：用于沿着第一轴线并且沿着垂直于第一轴线的第二轴线定位工作台（44）的平面马达（32）包括导体阵列（52）和磁体阵列（34）。导体阵列（52）包括至少一个导体（256）。磁体阵列（34）位于导体阵列（52）附近并且沿着垂直于第一轴线和第二轴线的第三轴线与导体阵列（52）间隔开。磁体阵列（34）包括具有第一对角磁体（D1）的第一磁体单元（264），第一对角磁体具有与第一轴线，第二轴线和第三轴线对角的对角磁化方向（268）。这导致磁体阵列（34）上方的强磁场和强大的力生成能力。此外，本文提供的平面电机（32）具有比可比较的现有技术平面电机更少的超出磁体阵列（34）的杂散磁场。此外，第一磁体单元（264）可以包括第二对角线磁体（D2），第三对角线磁体（D3）和第四对角线磁体（D4），它们协作以提供一定的第一组合磁通量（276）沿着第三轴线在第一通量方向上对齐。在该实施例中，每个对角线磁体（D1）（D2）（D3）（D4）具有与第一轴线，第二轴线和第三轴线对角的对角线磁化方向（268）。此外，每个对角线磁体（D1）（D2）（D3）（D4）可以是大致三角形楔形形状，并且对角线磁体（D1）（D2）（D3）（D4）一起布置为平行六面体形状。

5. 发明申请

WO2013112761A2 PLANAR MOTOR WITH ASYMMETRICAL CONDUCTOR ARRAYS 审中-公开
标题翻译：具有非对称导体阵列的平面电机
公开(公告)号：WO2013112761A2
公开(公告)日：2013-08-01
申请号：PCT/US2013023023
申请日：2013-01-24
申请人： NIPPON KOGAKU KK , BINNARD MICHAEL B , SHIBAZAKI YUICHI , WELLS J KYLE
发明人： BINNARD MICHAEL B , SHIBAZAKI YUICHI , WELLS J KYLE
IPC分类号： H04N3/02
CPC分类号： H02K41/031 , G03F7/70758 , H02K2201/18
摘要： A stage assembly (1 0) that moves a device (38) includes a stage mover (1 6) that moves the stage (14) along a first axis and along a second axis. The stage mover (16) includes a magnet assembly (20), and a conductor assembly (22). The conductor assembly (22) includes a plurality of first axis conductor units (24) and a plurality of second axis conductor units (26). The magnet assembly (20) includes a first axis magnet array (28A) and a second axis magnet array (30A). The first axis conductor units (24) are arranged in an alternating fashion with the second axis conductor units (26) along the first axis and along the second axis. The performance of the stage mover (16) can be different in the first and second axes. Either the conductor units (24) (26) and/or the magnet arrays (28A) (30A) can have a different geometry in the first and second axes.
摘要翻译：移动设备（38）的平台组件（110）包括沿着第一轴线并沿着第二轴线移动台架（14）的平台移动器（116）。载物台（16）包括磁体组件（20）和导体组件（22）。导体组件（22）包括多个第一轴导体单元（24）和多个第二轴导体单元（26）。磁体组件（20）包括第一轴磁体阵列（28A）和第二轴磁体阵列（30A）。第一轴导体单元（24）沿着第一轴线和第二轴线与第二轴线导体单元（26）交替地布置。在第一和第二轴上，载物台（16）的性能可以不同。导体单元（24）（26）和/或磁体阵列（28A）（30A）可以在第一和第二轴线上具有不同的几何形状。

6. 发明公开

EP1814427A4 FINE STAGE Z SUPPORT APPARATUS 审中-公开
标题翻译：细STAGE Z-载波设备
公开(公告)号：EP1814427A4
公开(公告)日：2009-01-07
申请号：EP05826284
申请日：2005-11-04
申请人： NIPPON KOGAKU KK
发明人： BINNARD MICHAEL B , HAZELTON ANDREW J , WATSON DOUGLAS C , ARAI YOICHI
IPC分类号： G03B27/42 , G03B27/58
CPC分类号： G03F7/70816 , G03F7/70716 , H01L21/682 , Y10T29/41
摘要： An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式