专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2009075384A1 EXPOSURE APPARATUS, MANUFACTURING METHOD THEREOF, AND MAINTENANCE METHOD OF EXPOSURE APPARATUS 审中-公开
标题翻译：曝光装置及其制造方法和维护方法
公开(公告)号：WO2009075384A1
公开(公告)日：2009-06-18
申请号：PCT/JP2008/073022
申请日：2008-12-11
申请人： NIKON CORPORATION , ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi
发明人： ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70833 , G03F7/70808 , G03F7/70975
摘要： A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.
摘要翻译：投影光学系统PL用于投影图案的图像。曝光装置的制造方法包括：将投影光学系统定位在预定位置的定位步骤; 以及支撑定位的投影光学系统的支撑步骤。定位步骤包括在定位时将投影光学系统从下方向上移动的步骤。

2. 发明申请

WO2009093757A1 EXPOSURE APPARATUS, AND MANUFACTURING METHOD AND SUPPORTING METHOD THEREOF 审中-公开
标题翻译：曝光装置及其制造方法及其支持方法
公开(公告)号：WO2009093757A1
公开(公告)日：2009-07-30
申请号：PCT/JP2009/051513
申请日：2009-01-23
申请人： NIKON CORPORATION , ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi , NISHIKAWA, Jin
发明人： ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi , NISHIKAWA, Jin
IPC分类号： G03F7/20
CPC分类号： G03F7/709 , G03F7/70833
摘要： An exposure apparatus includes an illumination optical system (IL) that guides illumination light to a mask (M); a projection optical system (PL) that projects the pattern irradiated with the illumination light, onto a substrate (P); and a supporting device (32) that integrally suspendingly supports at least part of the illumination optical system (IL) and the projection optical system (PL), with a supporting member (30) having a flexible structure.
摘要翻译：曝光装置包括将照明光引导到掩模（M）的照明光学系统（IL）; 将照射光照射的图案投影到基板（P）上的投影光学系统（PL）; 以及支撑装置（32），其与具有柔性结构的支撑构件（30）一体地悬挂地支撑所述照明光学系统（IL）和所述投影光学系统（PL）的至少一部分。

3. 发明申请

WO2006052855A2 FINE STAGE Z SUPPORT APPARATUS 审中-公开
标题翻译：精美舞台Z支持装置
公开(公告)号：WO2006052855A2
公开(公告)日：2006-05-18
申请号：PCT/US2005040229
申请日：2005-11-04
申请人： NIPPON KOGAKU KK , BINNARD MICHAEL B , HAZELTON ANDREW J , WATSON DOUGLAS C , ARAI YOICHI
发明人： BINNARD MICHAEL B , HAZELTON ANDREW J , WATSON DOUGLAS C , ARAI YOICHI
IPC分类号： A47J43/08
CPC分类号： G03F7/70816 , G03F7/70716 , H01L21/682 , Y10T29/41
摘要： An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.
摘要翻译：公开了一种用于支撑物体的装置。该装置包括联接到空气波纹管的空气轴承。当在真空环境中使用时，装置优选地包括具有真空的空气轴承壳体，以去除在空气轴承中使用的加压流体。

4. 发明申请

WO2006052855A3 FINE STAGE Z SUPPORT APPARATUS 审中-公开
公开(公告)号：WO2006052855A3
公开(公告)日：2006-05-18
申请号：PCT/US2005/040229
申请日：2005-11-04
申请人： NIKON CORPORATION , BINNARD, Michael, B. , HAZELTON, Andrew, J. , WATSON, Douglas, C. , ARAI, Yoichi
发明人： BINNARD, Michael, B. , HAZELTON, Andrew, J. , WATSON, Douglas, C. , ARAI, Yoichi
IPC分类号： G03B27/42 , G03B27/58
摘要： An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.

5. 发明专利

JPH09276051A SET OF PANEL FOR PROTECTING PRIVACY IN CHECKING LIST OF NAMES 失效
公开(公告)号：JPH09276051A
公开(公告)日：1997-10-28
申请号：JP12518196
申请日：1996-04-10
申请人： ARAI YOICHI , OSA HIDETOSHI
发明人： ARAI YOICHI , OSA HIDETOSHI
IPC分类号： A47B37/00
摘要： PROBLEM TO BE SOLVED: To effectively protect the privacy of the voters when checking their identities at polling stations by forming right- and left-hand side-panels integrally with a bottom panel and by further forming a front and top panels and surrounding frames. SOLUTION: The lowermost sections of side panels 2 which connect with a front panel 1 are fixed to a bottom panel 3 by means of fastenings, and then a top panel 4 is similarly fixed to the uppermost sections of the side panels. To elaborate, the side panels 2 are bent inward along the half-cut lines between the front panel 1 and the side panels 2, and the lowermost sections of the side panels 2 are bent inward on the right- and left-hand sides of the bottom panel 3 which is bent inward along the half-cut line between the front panel 1 and the bottom panel 3, and the fastenings glued to the backs of the lowermost sections of the side panels and the fastenings glued to the bottom panel 3 are fastened together, with the front panel 1 and the side panels 2 thus connected. Further, the fastenings on the right- and left-hand sides of the top panel 4 which is bent inward are fastened to the fastenings glued onto the backs of the uppermost sections of the side panels 2 which are bent along the half-cut lines.. Then surrounding frames are supplied to the various sections to protect and reinforce the cut parts.

6. 发明专利

JPH09167266A VOTE COUNTING CLASSIFICATION SYSTEM RACK 失效
公开(公告)号：JPH09167266A
公开(公告)日：1997-06-24
申请号：JP32721795
申请日：1995-12-15
申请人： ARAI YOICHI
发明人： ARAI YOICHI
IPC分类号： G07C13/00 , B07C7/04
摘要： PROBLEM TO BE SOLVED: To rapidly and correctly execute the classification and totaling of votes for every candidate by preparing the same number of vote counting classification system racks as the number of the candidates so as to constitute a classification shelf and classifying and totaling the votes by candidate using the height difference of a vote inserting port and a vote taking-out port. SOLUTION: A vote counting classification system rack is formed out of a transparent polyvinyl chloride plate containing an static electricity preventing material as material and consists of a base plate, a side plate 12, a taking-out port door 13, a ceiling 14, an uppermost part top plate 15 and connecting fixtures connecting the uppermost top plate 15 to the side plate 12. The vote counting classification system racks 1 of the same number as the candidates 1 are integratedly bound by a rack pressing belt 2 and arranged on an exclusive desk 4 having a table with prescribed inclination θas the classification shelf. Here, hook parts at the both ends of the rack pressing belt 2 are restrained to the exclusive desk 4 by a picture rail 3 which is fitted inside a dovetail groove 5 formed on the exclusive desk 4. Thus, a prescribed height difference is formed in the vote inserting port 1a and the taking-out port 1b.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式