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1. 发明公开

EP1316832A4 RELAY IMAGE OPTICAL SYSTEM, AND ILLUMINATING OPTICAL DEVICE AND EXPOSURE SYSTEM PROVIDED WITH THE OPTICAL SYSTEM 审中-公开
标题翻译：光学像中继系统和光学系统光学照明设备和曝光系统
公开(公告)号：EP1316832A4
公开(公告)日：2006-08-09
申请号：EP01955665
申请日：2001-08-10
申请人： NIPPON KOGAKU KK
发明人： SUENAGA YUTAKA
IPC分类号： G02B13/14 , G02B13/18 , G02B13/24 , G02B19/00 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70066 , G02B13/143 , G02B13/24
摘要： This invention provides a relay imaging optical system which is composed of a small number of lenses and can be miniaturized and reduced in weight with maintaining required optical characteristics. This relay imaging optical system is provided for forming an image of a first plane (10) on a second plane (M), and comprises a first lens group G1 which is constructed so that an image plane thereof is positioned within a limited range, a second lens group G2, and a third lens group G3, from the first plane side. At least two lens groups of the first lens group through the third lens group have at least one aspheric surface respectively; and the total number of lenses which constitute this optical system are ten or fewer.

2. 发明公开

EP1091230A9 Projection optical system that projects an image of a pattern formed on a reticle onto a substrate 失效
标题翻译： Optisches Projektionssystem zur Projektion eines Musters einer Photomaske auf ein Substrat
公开(公告)号：EP1091230A9
公开(公告)日：2001-07-11
申请号：EP00127533
申请日：1995-10-30
申请人： NIPPON KOGAKU KK
发明人： SASAYA TOSHIRO , USHIDA KAZUO , SUENAGA YUTAKA , MERCADO ROMEO I
IPC分类号： G02B9/12 , G02B13/18 , G02B13/22 , G02B13/24 , G03F7/20 , G02B13/14
CPC分类号： G03F7/70241 , G02B9/12 , G02B13/18 , G02B13/22 , G02B13/24
摘要： A projection optical system that projects an image of a pattern formed on a reticle onto a substrate comprising, in the light path order from the reticle: a first group with positive refractive power, said first group comprising at least two positive lenses; a second group comprising at least four positive lenses and at least four negative lenses; a third group with positive refractive power, said third group comprising at least two positive lenses; and at least one aspherical lens surface included in at least one of said first, second and/or third group.
摘要翻译： 1。一种投影光学系统，将形成在光罩上的图案的图像投影到基板上，所述投影光学系统包括：从光罩开始的光路顺序：具有正折射光焦度的第一组，所述第一组包括至少两个正透镜; 包括至少四个正透镜和至少四个负透镜的第二组; 具有正屈光力的第三组，所述第三组包括至少两个正透镜; 以及包括在所述第一，第二和/或第三组中的至少一个中的至少一个非球面透镜表面。

3. 发明专利

JPS61240218A MICROSCOPE OBJECTIVE LENS 失效
公开(公告)号：JPS61240218A
公开(公告)日：1986-10-25
申请号：JP8195585
申请日：1985-04-17
申请人： NIPPON KOGAKU KK
发明人： SHIMIZU YOSHIYUKI , SUENAGA YUTAKA
IPC分类号： G02B21/02
摘要： PURPOSE:To obtain the titled lens which has 1.4 numerical aperture, about 60 times magnification, and a flat image surface, suppresses a chromatic aberration in an apochromat class, and has an excellent image formation performance, by satisfying a specified condition, in an immersion objective lens having a large numerical aperture. CONSTITUTION:The first lens component L1 consisting of a plano-convex lens and a meniscus lens which is cemented to said lens and turns the convex surface to an image side, the second lens component L2 of a positive lens which turns its larger refractive power to the image side, and the third - the fifth lens components L3-L5 which is constituted by cementing a negative lens and a positive lens are placed in order from an object side. Also, this lens is provided with the sixth component L6 of a meniscus shape which consists of a junction of a biconvex positive lens and a biconcave negative lens and turns the convex surface of the object side, the seventh component L7 of a meniscus shape which consists of a junction of a biconcave negative lens and a biconvex positive lens and turns the convex surface to the image side, and the eighth component L8 of a positive meniscus lens which turns the convex surface to the image side. Also, they are made to satisfy conditions shown by expressions (1)-(6).

4. 发明专利

JPS60225817A LARGE APERTURE EPIDARK OBJECTIVE LENS 失效
公开(公告)号：JPS60225817A
公开(公告)日：1985-11-11
申请号：JP8245584
申请日：1984-04-24
申请人： NIPPON KOGAKU KK
发明人： NAKAMURA EIJI , SUENAGA YUTAKA
IPC分类号： G02B21/02 , G02B21/06 , G02B21/10
摘要： PURPOSE:To supply uniform dark field illumination light efficiently by providing an annular outward deflecting member and an annular inward deflecting member which has a larger aperture than it between an annular light converging member and the incident light side end of the lens barrel of the objective lens. CONSTITUTION:Nearly parallel annular illumination light from a light source is reflected by a holed reflection mirror M to travel toward the periphery of the objective lens 10. Then, it is incident on an annular troidal positive lens 1a provided as the outward deflecting member near the incident light side end of the objective lens 10 in the objective lens barrel 11, and deflected outward and converged. This converged luminous flux is converted into parallel luminous flux traveling in parallel to the optical axis of the objective lens 10 by an annular troidal negative lens 2a arranged as the inward deflecting member between the positive lens 1a and an annular troidal negative lens 2a as the annular light converging member and the converted light is incident on the annular reflection mirror 3a and reflected toward an object surface 0.

5. 发明专利

JPS6275618A IMAGE FORMING OPTICAL DEVICE 失效
公开(公告)号：JPS6275618A
公开(公告)日：1987-04-07
申请号：JP21731185
申请日：1985-09-30
申请人： NIPPON KOGAKU KK
发明人： MIZUTANI HIDEO , SUENAGA YUTAKA
IPC分类号： G02B27/18 , G02B27/00 , G03F9/00
摘要： PURPOSE:To compensate the asymmetrical aberration for object image formation to make an object image distinct by providing the second parallel plane plate, which has the same optical path length as a parallel plane plate like a window glass provided at an angle to the optical axis, at an angle in the optical axis. CONSTITUTION:Since parallel plane plates 3 and 4 have the same thickness and the same refractive index, the resultant optical path length in the first and second parallel plane members 3 and 4 of a ray R1 passing the lower part of a relay lens 2 out of peripheral edge rays from an object point 1 on the axis and that of a ray R2 passing the upper part are equal to each other, and resultant optical paths are symmetrical with respect to the optical axis. Thus, the asymmetrical aberration generated in the first parallel plane plate 3 as a window glass is compensated by insertion of the second parallel plane plate 4. A cylindrical lens 2b is provided in the relay lens 2 to make a meridional image point and a sagittal image point coincident with each other, thereby compensating the astigmatism. Thus, the object image is made distinct.

6. 发明专利

JP2591582B2 失效
公开(公告)号：JP2591582B2
公开(公告)日：1997-03-19
申请号：JP15504693
申请日：1993-06-25
申请人： NIPPON KOGAKU KK
发明人： UEHARA MAKOTO , MATSUMOTO KOICHI , SUENAGA YUTAKA , MURAMATSU TAKAYUKI
IPC分类号： G03B27/32 , G02B13/00 , G02B27/10 , G03F9/00 , H01L21/027 , H01L21/30

7. 发明专利

JPH0644102B2 失效
公开(公告)号：JPH0644102B2
公开(公告)日：1994-06-08
申请号：JP8195585
申请日：1985-04-17
申请人： NIPPON KOGAKU KK
发明人： SHIMIZU YOSHIYUKI , SUENAGA YUTAKA
IPC分类号： G02B21/02

8. 发明专利

JPH0448203B2 失效
公开(公告)号：JPH0448203B2
公开(公告)日：1992-08-06
申请号：JP8245584
申请日：1984-04-24
申请人： NIPPON KOGAKU KK
发明人： NAKAMURA EIJI , SUENAGA YUTAKA
IPC分类号： G02B21/02 , G02B21/06 , G02B21/10

9. 发明专利

JPS62141512A DARK VISUAL FIELD LIGHTING EQUIPMENT 失效
公开(公告)号：JPS62141512A
公开(公告)日：1987-06-25
申请号：JP28266785
申请日：1985-12-16
申请人： NIPPON KOGAKU KK
发明人： SUENAGA YUTAKA
IPC分类号： G02B21/10
摘要： PURPOSE:To perform uniform lighting with a small irregularity and to eliminate the loss of the quantity of light by specifying the shape of the reflecting surface of a ring-shaped reflecting member. CONSTITUTION:The ring-shaped reflecting member 3 is arranged nearby the front end part of an objective so as to converge ring-shaped luminous flux 2 supplied from the periphery of the objective; and the sectional shape of the reflecting surface of the ring-shaped reflecting member 3 in a plane containing the optical axis 10 of the objective is so determined that the external diameter is H+D and the internal diameter is H-D while the width of the ring-shaped luminous flux is 2D. Then when the diameter of an irradiated area on a body surface 4 is 2R, the position on the irradiated surface that a light beam at distance (a) from the breadthwise center of the irradiated field reaches satisfies relation b=R(a/D) , where (b) is the distance from the center of the irradiated field that the beam reaches. When this condition is satisfied, the sectional shape of the ring-shaped reflecting member is a convex so as to diverge luminous flux almost in the breadthwise center of the ring-shaped luminous flux in the radial direction.

10. 发明专利

JPH0669014B2 失效
公开(公告)号：JPH0669014B2
公开(公告)日：1994-08-31
申请号：JP3885286
申请日：1986-02-24
申请人： NIPPON KOGAKU KK
发明人： MATSUMOTO KOICHI , SUENAGA YUTAKA , UEHARA MAKOTO , MURAMATSU MICHUKI
IPC分类号： G03F9/00 , H01L21/027 , H01L21/30 , H01L21/67 , H01L21/68

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