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    • 2. 发明公开
    • PLASMA PROCESSING DEVICE
    • 等离子体处理装置
    • EP2506689A1
    • 2012-10-03
    • EP10833018.4
    • 2010-10-26
    • NGK Insulators, Ltd.
    • SHIONOYA WataruSHIMIZU NaohiroIMANISHI YuichiroHOTTA Sozaburo
    • H05H1/24B01J19/08
    • B01J19/088B01J2219/0811B01J2219/0813B01J2219/0815B01J2219/083B01J2219/0835B01J2219/0841B01J2219/0875B01J2219/0894H05H1/2406H05H2001/2412H05H2240/10
    • There is provided a plasma treating apparatus in which an efficiency of a treatment through plasma is enhanced and a durability of an electrode is improved. A first electrode, a second electrode and a third electrode are provided in a middle of a passage. The second electrode is provided on an upstream side of the first electrode, and the third electrode is provided on a downstream side of the first electrode. A connecting line connects the first electrode to a first pole of a pulsed power supply, and connects the second electrode and the third electrode to a second pole of the pulsed power supply. The first electrode crosses a first gas passing surface and occupies a part of the first gas passing surface. The second electrode and the third electrode cross a second gas passing surface and a third gas passing surface and occupy a part of the second gas passing surface and the third gas passing surface respectively.
    • 提供了一种等离子体处理装置,其中通过等离子体的处理效率得到提高并且电极的耐久性得到改善。 第一电极,第二电极和第三电极设置在通道的中间。 第二电极设置在第一电极的上游侧,并且第三电极设置在第一电极的下游侧。 连接线将第一电极连接到脉冲电源的第一极,并将第二电极和第三电极连接到脉冲电源的第二极。 第一电极穿过第一气体通过表面并占据第一气体通过表面的一部分。 第二电极和第三电极分别与第二气体通过表面和第三气体通过表面相交,并分别占据第二气体通过表面和第三气体通过表面的一部分。