会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明专利
    • SPUTTERING APPARATUS
    • JPH01139765A
    • 1989-06-01
    • JP29690087
    • 1987-11-25
    • ANELVA CORPNAT RES INST METALS
    • AOSHIMA SHOICHINOZAKI TOSHIYUKITANAKA YOSHIAKIFUKUTOMI KATSUOASANO TOSHIHISA
    • C23C14/54
    • PURPOSE:To stably form a delicate multielement thin film with good reproducibility by providing a spectroscopic monitor for measuring the intensity of the emission spectrum of the sputtered atom in the space surrounded by plural plate targets and a substrate holder. CONSTITUTION:The three cathode assemblies 20, to which the plate target 21 is fixed, are arranged at regular intervals so that the surface of the target 21 is inclined toward the surface of the substrate holder 31, and a thin film is formed on a substrate 32. At this time, the sensor head 41 constituting a part of the spectroscopic monitor 40 is arranged in the space surrounded by the target 21 and the substrate holder 31, the emission spectrum inherent in the atom emitted from the atom sputtered from the target 21 is taken out, and only the desired light is injected into a photodiode 45. The output 46 is injected into a comparator 47 and compared with a set level value, a signal 48 is outputted to a controller 49 in accordance with the intensity of the emitted light to control an RF power source 50, and the desired intensity level of the light emitted from the sputtered atom is maintained.