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    • 2. 发明申请
    • FORMING ELECTRICALLY INSULATIVE REGIONS
    • 形成电绝缘区
    • WO2010013067A1
    • 2010-02-04
    • PCT/GB2009/050963
    • 2009-07-31
    • NANO EPRINT LIMITEDSONG, AiminWHITELEGG, StephenSUN, Yanming
    • SONG, AiminWHITELEGG, StephenSUN, Yanming
    • H01L51/00
    • H01L51/0014H01L51/0023H01L2251/105
    • A method of forming an electrically insulative region from an area of a layer of electrically conductive or semi conductive material, such that electrical current flow within the layer and across said area is at least inhibited. The method comprises: forming at least one electrically insulative feature in said layer to define an insulative perimeter around said area, the or each insulative feature being arranged to at least inhibit electrical current flow within the layer of material; and forming at least one further electrically insulative feature inside said perimeter so as to divide said area into a plurality of parts, said parts being at least partially electrically insulated from each another. Devices incorporating such insulative regions are disclosed, as are different methods for forming the insulative features.
    • 从导电或半导电材料层的区域形成电绝缘区域的方法,使得至少抑制了层内并跨越所述区域的电流流动。 该方法包括:在所述层中形成至少一个电绝缘特征以限定围绕所述区域的绝缘周边,所述绝缘特征或每个绝缘特征被布置成至少阻止材料层内的电流流动; 以及在所述周边内部形成至少一个另外的电绝缘特征,以便将所述区域分成多个部分,所述部分至少部分地彼此电绝缘。 公开了结合这种绝缘区域的装置,形成绝缘特征的不同方法也是公开的。