会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Phase change memory device and method for manufacturing the same
    • 相变存储器件及其制造方法
    • US08416616B2
    • 2013-04-09
    • US13036916
    • 2011-02-28
    • Heon Yong ChangMyoung Sub KimGap Sok Do
    • Heon Yong ChangMyoung Sub KimGap Sok Do
    • G11C11/00
    • H01L27/2409H01L45/06H01L45/1233H01L45/126H01L45/128H01L45/144
    • A phase change memory device includes a silicon substrate having a bar-type active region and an N-type impurity region formed in a surface of the active region. A first insulation layer is formed on the silicon substrate, and the first insulation layer includes a plurality of first contact holes and second contact holes. PN diodes are formed in the first contact holes. Heat sinks are formed in the first contact holes on the PN diodes, and contact plugs fill the second contact holes. A second insulation layer having third contact holes is formed on the first insulation layer. Heaters fill the third contact holes. A stack pattern of a phase change layer and a top electrode is formed to contact the heaters. The heat sink quickly cools heat transferred from the heater to the phase change layer.
    • 相变存储器件包括具有棒状有源区和形成在有源区的表面中的N型杂质区的硅衬底。 第一绝缘层形成在硅衬底上,第一绝缘层包括多个第一接触孔和第二接触孔。 PN二极管形成在第一接触孔中。 在PN二极管上的第一接触孔中形成散热片,接触塞填充第二接触孔。 具有第三接触孔的第二绝缘层形成在第一绝缘层上。 加热器填充第三个接触孔。 形成相变层和顶部电极的堆叠图案以接触加热器。 散热片快速冷却从加热器传递到相变层的热量。