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1. 发明专利

JP2014145789A Electrical ionizer for aerosol charge adjustment and measurement 审中-公开
标题翻译：用于航空器充电调节和测量的电离离子
公开(公告)号：JP2014145789A
公开(公告)日：2014-08-14
申请号：JP2014106673
申请日：2014-05-23
申请人： Msp Corp , エムエスピーコーポレーション
发明人： DICK WILLIAM , ROMAY FRANCISCO J , LIU BENJAMIN Y H
IPC分类号： G01N15/02 , G01N27/60 , G01N27/62
CPC分类号： B03C3/38
摘要： PROBLEM TO BE SOLVED: To provide an electrical ionizer capable of generating a charge distribution similar to a Boltzmann distribution generated by a radioactive ionizer, in order to perform accurate aerosol measurement by DMS.SOLUTION: An apparatus for exposing particles in a gas to ions in order to cause the charge on the particles to change comprises: a chamber which has an inlet for the gas to enter and an outlet for the gas to exit and is surrounded by an enclosure having a conductive wall which is held at a ground potential; and an electrode which has an exposed tip being in contact with the gas in the chamber and is held at a potential different from the ground potential in a state where the exposed tip is arranged adjacently to one section of the conductive wall. The inlet and outlet define a gas flow path from the inlet to the outlet, and the electrode is connected to a source of a voltage sufficient to cause a corona discharge to bring about formation of ions in the chamber.
摘要翻译：要解决的问题：提供能够产生类似于由放射性电离器产生的玻尔兹曼分布的电荷分布的电离器，以便通过DMS进行精确的气溶胶测量。解决方案：一种用于将气体中的颗粒暴露于离子的装置导致颗粒上的电荷改变包括：具有用于气体进入的入口和用于气体出口的出口的腔室，并且被具有保持在地电位的导电壁的外壳包围; 以及电极，其具有与所述室中的气体接触的暴露尖端，并且在所述暴露尖端与所述导电壁的一个部分相邻地布置的状态下保持在与所述接地电位不同的电位。入口和出口限定从入口到出口的气体流动路径，并且电极连接到足以引起电晕放电以在室中形成离子的电压源。

2. 发明专利

JP2007057532A Measurement of aerosol by dilution and particle count 审中-公开
标题翻译：通过稀释和颗粒计数测定气溶胶
公开(公告)号：JP2007057532A
公开(公告)日：2007-03-08
申请号：JP2006225983
申请日：2006-08-23
申请人： Msp Corp , エムエスピーコーポレーション
发明人： LIU BENJAMIN Y H
IPC分类号： G01N15/14 , G01N15/06
CPC分类号： G01N15/065 , G01N1/2252 , G01N2001/2223 , G01N2001/2264
摘要： PROBLEM TO BE SOLVED: To provide a condensed particle counter capable of being used for accurately counting single particles for the high-level measurement of aerosol. SOLUTION: The condensed particle counter is a device for measuring aerosol having a high concentration of particles and provided with both a diluter for forming a stream of aerosol diluted by diluting the concentration of particulate substance in a stream of sample aerosol and a sensor for detecting particles in the stream of diluted aerosol by steam condensation, droplet growth, and optical detection. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于精确计数单个颗粒以用于气溶胶的高水平测量的冷凝颗粒计数器。冷凝颗粒计数器是用于测量具有高浓度颗粒的气溶胶的装置，并且具有稀释剂，用于形成通过稀释样品气溶胶和传感器流中的颗粒物质的浓度而稀释的气溶胶用于通过蒸汽冷凝，液滴生长和光学检测来检测稀释气溶胶流中的颗粒。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2013210095A Liquid flow control for film deposition 有权
标题翻译：用于膜沉积的液体流量控制
公开(公告)号：JP2013210095A
公开(公告)日：2013-10-10
申请号：JP2013048065
申请日：2013-03-11
申请人： Msp Corp , エムエスピーコーポレーション
发明人： LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
IPC分类号： F16K7/14 , F16K7/17 , F16K23/00 , F16K31/02 , F16K31/122 , G01F1/00 , G01F1/68 , G01F1/84
CPC分类号： H01L21/02104 , F16K7/14 , F16K31/007 , F16K31/1221 , Y10T137/0357 , Y10T137/7722 , Y10T137/7759
摘要： PROBLEM TO BE SOLVED: To provide a control valve intended to improve controllability and to reduce a dead volume, in a flow control valve used in a process of manufacturing a semiconductor the like.SOLUTION: In an apparatus for controlling a liquid flow, controlled fluid guided from an inlet flow path 240 is made variable by control by a piezoelectric transducer 310 of a distance between a lower surface 222 of a diaphragm 220 and an orifice inlet 245, and a gas outlet 300 is provided on an outer circumference of an outlet 255 of an orifice 250. A jet flow of gas shears and eliminates the drop-shaped controlled fluid accumulated in the orifice outlet 255 by a capillary phenomenon, so that a control amount of the diaphragm 220 can be surely reflected on a controlled fluid amount.
摘要翻译：要解决的问题：提供一种用于在制造半导体等的过程中使用的流量控制阀中提高可控制性和减少死体积的控制阀。解决方案：在用于控制液体流量的装置中，受控流体由入口流路240引导的压力变换器310由隔膜220的下表面222和孔入口245之间的距离的压电换能器310进行控制，并且气体出口300设置在出口255的外周上气流剪切机的喷射流，并且通过毛细管现象消除了积聚在孔口出口255中的液滴状受控流体，从而能够可靠地以受控流体量反映膜片220的控制量。

4. 发明专利

JP2011185939A Electrical ionizer for aerosol charge conditioning and measurement 有权
标题翻译：用于航空器充电调节和测量的电离离子
公开(公告)号：JP2011185939A
公开(公告)日：2011-09-22
申请号：JP2011052188
申请日：2011-03-09
申请人： Msp Corp , エムエスピーコーポレーション
发明人： DICK WILLIAM , ROMAY FRANCISCO J , LIU BENJAMIN Y H
IPC分类号： G01N15/02
CPC分类号： B03C3/38
摘要： PROBLEM TO BE SOLVED: To provide an electrical ionizer that generates a charge distribution similar to Boltzmann distribution generated by a radioactive ionizer for an accurate measurement of aerosol by DMS.
SOLUTION: The electrical ionizer exposes particles in a gas to an ion in order to cause the charge on the particles to change, and comprises a chamber with an inlet for the gas to enter and an outlet for the gas to exit. The electrical ionizer includes: the chamber surrounded by an enclosure with a conductive wall, wherein the wall is held at a ground potential; and an electrode with an exposed tip coming into contact with the gas in the chamber, wherein the electrode is held at a different potential from the conductive wall, while the exposed tip is disposed adjacent to one region of the conductive wall. The inlet and outlet define a gas flow path from the inlet to the outlet. The electrode is connected to a source of voltage sufficient to cause a corona discharge to occur forming ions in the chamber.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种电离器，其产生类似于由放射性电离器产生的玻尔兹曼分布的电荷分布，以便通过DMS精确测量气溶胶。解决方案：电离器将气体中的颗粒暴露于离子，以使颗粒上的电荷改变，并且包括具有用于气体进入的入口和用于气体排出的出口的室。电离器包括：由具有导电壁的外壳围绕的腔室，其中该壁保持在地电位; 以及具有暴露尖端的电极与腔室中的气体接触，其中电极被保持在与导电壁不同的电位，而暴露尖端邻近导电壁的一个区域设置。入口和出口限定从入口到出口的气体流动路径。电极连接到足以引起在腔室中形成离子的电晕放电的电压源。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2004301689A Wide-range particle counter 有权
公开(公告)号：JP2004301689A
公开(公告)日：2004-10-28
申请号：JP2003095423
申请日：2003-03-31
申请人： Msp Corp , エムエスピー・コーポレーション
发明人： LIU BENJAMIN Y H
IPC分类号： G01N15/02 , G01N15/14
摘要： PROBLEM TO BE SOLVED: To measure aerosol with high accuracy and with high reliability over a wide particle size range.
SOLUTION: This wide-range particle counter 10 has partitions for separately detecting bulky particles and minute particles in the aerosol. Bulky particles are counted by an optical particle counter to determine their sizes. Minute particles are classified by a differential mobility analyzer to determine their sizes, then passed through an evaporator and a condenser, and counted. The use of the different partitions makes it possible to count and measure the wide ranging particle sizes with high accuracy and with high reliability in a single device.
COPYRIGHT: (C)2005,JPO&NCIPI

6. 发明申请

WO0030755A2 A COMPACT HIGH EFFICIENCY ELECTROSTATIC PRECIPITATOR FOR DROPLET AEROSOL COLLECTION 审中-公开
标题翻译：用于喷雾气溶胶收集的紧凑型高效静电抑制剂
公开(公告)号：WO0030755A2
公开(公告)日：2000-06-02
申请号：PCT/US9927718
申请日：1999-11-22
申请人： MSP CORP
发明人： LIU BENJAMIN Y H , SUN JAMES J
IPC分类号： F01M13/04 , B03C3/00 , B03C3/017 , B03C3/02 , B03C3/06 , B03C3/155 , B03C3/16 , B03C3/40 , B03C3/41 , B03C3/45 , B03C3/49 , B03C3/70 , F01N3/02
CPC分类号： B03C3/41 , B03C3/017 , B03C3/16 , B03C3/70 , B03C2201/10 , F01N3/02 , Y02T10/20 , Y10S55/19
摘要： An electrostatic precipitator (10, 82, 98) has a high voltage electrode assembly (14, 100, 120, 214) including multiple wire segments (36, 77, 113A, 126, 228) that are positioned within a surrounding electrically conductive media (26, 114, 129, 200) having a central axis and wherein the electrode assembly (14, 100, 120, 214) has a plurality of wire lengths (36, 77, 113A, 126, 228) positioned to extend in a direction along the longitudinal axis of the conductive media (26, 114, 129, 200), and are arranged to thave a substantially longer total length than the length of extension along the longitudinal axis. An aerosol containing droplets is passed into the interior of the conductive media (26, 114, 129, 200), and they are charged with a high voltage. The conductive media (26, 114, 129, 200) is at a substantially lower or different voltage from the high voltage. The particles charged by the electrode assembly (14, 100, 120, 214) pass along or through the conductive media and are precipitated by the conductive media (26, 114, 129, 200).
摘要翻译：静电除尘器（10,82,98）具有高电压电极组件（14,100,120,214），其包括多个线段（36,77,113A，126,228），所述多个线段定位在周围的导电介质具有中心轴线，并且其中所述电极组件（14,100,120,214）具有多个线材长度（36,77,113A，126,228），所述多个线材长度定位成沿着沿着导电介质（26,114,129,200）的纵向轴线，并且被设置成比沿着纵向轴线的延伸长度大得多的总长度。含有液滴的气溶胶被传送到导电介质（26,114,129,200）的内部，并且它们以高电压充电。导电介质（26,114,129,200）处于与高电压基本上较低或不同的电压。由电极组件（14,100,120,214）充电的颗粒沿导电介质传导或穿过导电介质，并被导电介质（26,114,129,200）沉淀。

7. 发明申请

WO2011097238A3 FINE DROPLET ATOMIZER FOR LIQUID PRECURSOR VAPORIZATION 审中-公开
标题翻译：用于液体前驱体气化的细小液滴雾化器
公开(公告)号：WO2011097238A3
公开(公告)日：2011-12-01
申请号：PCT/US2011023362
申请日：2011-02-01
申请人： MSP CORP , LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
发明人： LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
IPC分类号： H01L21/205
CPC分类号： B05B17/04 , C23C16/4486
摘要： The present disclosure relates to an apparatus 10 and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus 10 includes a mechanism to control the rate of liquid flow through the apparatus 10, the mechanism including a piezoelectric actuator 240 to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source 70 such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.
摘要翻译：本公开涉及用于形成用于汽化和随后在基板上的薄膜沉积的微滴气溶胶的设备10和方法。设备10包括控制液体流过装置10的速率的机构，该机构包括用于调节液体流动速率的压电致动器240和雾化机构从压缩气体源70抽取气体，使得当气体源与液体结合时，液体被雾化以形成悬浮在气体中的液滴，由此形成适于随后在基板上的薄膜沉积的液滴气雾剂。该方法包括从压缩气体源抽取气体并从液体源抽取液体。液体和气体以同轴流动关系或径向流动关系或径向和同轴流动之间的角度关系联结，其中气体与液体接合以形成适于汽化和随后在基底上的薄膜沉积的液滴。

8. 发明申请

WO03091708A2 COMPACT, HIGH-EFFICIENCY CONDENSATION NUCLEUS COUNTER 审中-公开
标题翻译：紧凑，高效冷凝核子计数器
公开(公告)号：WO03091708A2
公开(公告)日：2003-11-06
申请号：PCT/US0309820
申请日：2003-04-02
申请人： MSP CORP
发明人： LIU BENJAMIN Y H
IPC分类号： G01N15/00 , G01N15/06
CPC分类号： G01N15/065
摘要： A condensation nucleus counter (20, 90) has a series of flow passageways forming a flow path, including a first passageway (24, 30, 42, 54, 56, 106, 110, 118, 122) for carrying the gas stream having the particles to be detected which is heated, so that the gas stream is heated prior to entering a saturator (30, 110). The saturator (30, 110) is positioned as part of the flow path (24, 30, 42, 54, 56, 106, 110, 118) for the gas stream and is made of a porous material having a portion immersed in a liquid working fluid (36). The porous material is selected so that capillary action will move the liquid working fluid (36, 114) along the length of the saturator (30, 110). Vapor from the working liquid will be transferred to the gas stream as it moves through the saturator (30). The gas stream then passes to a condenser or cooler (54, 122) that reduces the temperature of the gas stream and causes the working fluid vapor to condense on the particles in the gas stream to form droplets. A particle detector (58, 132), such as a light scattering particle detector (58, 132), then receives the gas stream and detects the droplets that have been formed.
摘要翻译：冷凝核计数器（20,90）具有形成流路的一系列流动通道，其包括用于承载气流的第一通道（24,30,42,54,56,106,110,118,122），所述第一通道具有要被检测的被加热的颗粒，使得气体流在进入饱和器（30,110）之前被加热。饱和器（30,110）被定位为用于气流的流动路径（24,30,32,44,56,106,110,118）的一部分，并且由多孔材料制成，该多孔材料具有浸入液体中的部分工作流体（36）。选择多孔材料使得毛细作用将沿着饱和器（30,110）的长度移动液体工作流体（36,114）。当工作液体流过饱和器（30）时，来自工作液体的蒸汽将被转移到气流中。气流然后传递到冷凝器或冷却器（54,122），该冷凝器或冷却器降低气流的温度并使工作流体蒸气冷凝在气流中的颗粒上以形成液滴。然后，诸如光散射粒子检测器（58,132）的粒子检测器（58,132）接收气流并检测已经形成的液滴。

9. 发明申请

WO0181891A3 SAMPLER FOR ELIMINATING PARTICLE-RELATED ARTIFACTS FOR FLUE GAS MEASUREMENT 审中-公开
标题翻译：用于消除用于气体气体测量的颗粒相关文献的采样者
公开(公告)号：WO0181891A3
公开(公告)日：2002-03-21
申请号：PCT/US0113377
申请日：2001-04-25
申请人： MSP CORP
发明人： LIU BENJAMIN Y H , ROBERTS DARYL L , MARPLE VIRGIL A , ROMAY FRANCISCO J
IPC分类号： G01N1/22 , G01N1/24 , B01D45/04 , B07B7/04
CPC分类号： G01N1/2208 , G01N1/2258 , G01N1/24 , G01N2001/227 , G01N2001/242
摘要： A sampler (10) for removing a sample of gas from a flue or stack (12) utilizes virtual impactor principles, together with a gas jet ejector (100, 105) to insure that the surfaces are kept free of particles. The gas that is discharged from the sampler (10) for analysis thus is not changed in character by contact with particles that may adhere to surfaces of the sampler.
摘要翻译：用于从烟道或烟囱（12）去除气体样本的采样器（10）利用虚拟冲击器原理与气体喷射喷射器（100,105）一起确保表面保持没有颗粒。因此，从采样器（10）排出的用于分析的气体的性质通过与可能附着在取样器的表面上的颗粒的接触而变化。

10. 发明公开

KR20150126584A 증기 및 가스 여과를 위한 방법 및 장치 审中-公开
标题翻译：用于蒸汽和气体过滤的方法和装置
公开(公告)号：KR20150126584A
公开(公告)日：2015-11-12
申请号：KR20150150463
申请日：2015-10-28
申请人： MSP CORP
发明人： LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
IPC分类号： B01D39/20 , B01D39/14 , B01D46/00 , B01D46/24 , B01D46/42
CPC分类号： B01D39/2044 , B01D46/0021 , B01D46/2403 , C23C16/448
摘要： 가스여과장치및 방법은가스가들어오기위한입구및 가스가나가기위한출구를갖는하우징을포함한다. 하우징은가스로부터침전된입자들을제거하기위하여가스가통과하는활성여과영역을갖는소결금속섬유들로구성되는필터를포함한다. 필터는실질적으로두께및 활성여과영역을통한다공성이균일하다. 필터여재는하우징내의금속구조체에밀봉되고금속구조체는가스가통과하는것을허용하기위하여개구부를갖는다. 증기/가스혼합물을만드는방법은증기/가스혼합물이통과하는소결금속섬유들로구성되는필터를포함하는하우징내의개구부를통하여빠져나가는증기/가스혼합물을형성하기위하여가스로증기를생산하는단계를포함한다.
摘要翻译：用于蒸气和气体过滤的方法和装置包括具有气体流入的入口的壳体和气体流出的出口。壳体包括由具有气体进入的有源过滤区域的烧结金属纤维构成的过滤器，用于除去从气体沉积的颗粒。过滤器通过活性过滤区域具有基本均匀的厚度和孔隙率。过滤介质被密封在壳体中的金属结构中，并且金属结构具有允许气体通过的开口。制造蒸汽/气体混合物的方法包括用气体生成蒸汽的步骤，用于形成通过壳体中的开口排出的蒸汽/气体混合物，其包括形成有气/气混合物通过的烧结金属纤维的过滤器。

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