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    • 4. 发明申请
    • Electrode Substrate and Its Manufacturing Method
    • 电极基板及其制造方法
    • US20070247066A1
    • 2007-10-25
    • US11547391
    • 2004-04-06
    • Hiroshi TokairinYoshikazu NagasakiTadao Shibuya
    • Hiroshi TokairinYoshikazu NagasakiTadao Shibuya
    • H01J1/62H01J9/02
    • H01L51/0096H01L27/322H01L27/3248H01L51/5088H01L51/5206Y02E10/549Y02P70/521
    • The purpose is to remove surface-defective layer existing on the surface of an anode on a CCM substrate, protect the anode surface, prevent a drive voltage of an organic EL element from rising, and maintain uniformity of luminescence. On a substrate (12) a CCM layer (14) for converting light wavelength is formed. On the CCM layer (14) an anode (16) of IZO is formed. On the anode (16) a surface protective layer (18) containing an inorganic compound is formed by an inductively coupled RF plasma support magnetron sputtering. A preferable inorganic compound is SiO2. The surface defective layer of the anode (16) can be removed by the sputtering and the state of being removed can be held by the inorganic compound. Therefore the electrical stability of the anode (16) can be maintained for a long time, thereby improving the display quality of an organic EL display (100).
    • 目的是去除存在于CCM基板上的阳极表面上的表面缺陷层,保护阳极表面,防止有机EL元件的驱动电压升高,并保持发光均匀性。 在衬底(12)上形成用于转换光波长的CCM层(14)。 在CCM层(14)上形成IZO的阳极(16)。 在阳极(16)上,通过感应耦合的RF等离子体支撑磁控溅射法形成含有无机化合物的表面保护层(18)。 优选的无机化合物是SiO 2。 可以通过溅射去除阳极(16)的表面缺陷层,并且被除去的状态可以由无机化合物保持。 因此,可以长时间保持阳极(16)的电稳定性,从而提高有机EL显示器(100)的显示质量。