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1. 发明授权

US5472564A Method of dry etching with hydrogen bromide or bromide 失效
标题翻译：用溴化氢或溴化物干蚀刻的方法
公开(公告)号：US5472564A
公开(公告)日：1995-12-05
申请号：US104546
申请日：1993-08-11
申请人： Moritaka Nakamura , Takashi Kurimoto , Katsuhiko Iizuka
发明人： Moritaka Nakamura , Takashi Kurimoto , Katsuhiko Iizuka
IPC分类号： H01L21/28 , H01L21/311 , H01L21/3213 , H01L29/423 , H01L21/306
CPC分类号： H01L21/31138 , H01L21/28114 , H01L21/32137 , H01L29/42376
摘要： Plasma etching with hydrogen bromide or bromine as an etching gas allows a precise control in attaining vertical etching or taper etching with a desired taper angle by controlling the temperature of a mass to be etched, which mass is usually a semiconductor wafer.
摘要翻译：使用溴化氢或溴作为蚀刻气体的等离子体蚀刻允许通过控制要蚀刻的质量的温度来获得具有期望的锥角的垂直蚀刻或锥形蚀刻的精确控制，该质量通常是半导体晶片。

2. 发明授权

US4798650A Method of dry etching aluminum 失效
标题翻译：铝蚀刻方法
公开(公告)号：US4798650A
公开(公告)日：1989-01-17
申请号：US174348
申请日：1988-03-28
申请人： Moritaka Nakamura , Takashi Kurimoto
发明人： Moritaka Nakamura , Takashi Kurimoto
IPC分类号： C23F4/00 , H01L21/302 , H01L21/3065 , H01L21/3213 , C23F1/02 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： H01L21/32136
摘要： A method of reactive ion etching (RIE) of aluminum or an alloy thereof (Al) in which a substrate with an Al layer coated thereon is maintained at a temperature of 60.degree. C. or less by cooling the substrate, so that the Al layer is taperingly etched to form conductor lines having sloped sidewalls. The substrate is clamped to a cooled electrode stage by an electrostatic chuck.

3. 发明授权

US5316616A Dry etching with hydrogen bromide or bromine 失效
标题翻译：用溴化氢或溴进行干蚀刻
公开(公告)号：US5316616A
公开(公告)日：1994-05-31
申请号：US68615
申请日：1993-05-27
申请人： Moritaka Nakamura , Takashi Kurimoto , Katsuhiko Iizuka
发明人： Moritaka Nakamura , Takashi Kurimoto , Katsuhiko Iizuka
IPC分类号： H01L21/28 , H01L21/311 , H01L21/3213 , H01L29/423 , H01L21/306
CPC分类号： H01L21/31138 , H01L21/28114 , H01L21/32137 , H01L29/42376
摘要： Plasma etching with hydrogen bromide or bromine as an etching gas allows a precise control of attaining vertical etching or taper etching with a desired taper angle by controlling a temperature of a mass to be etched, which mass is a phosphorus-doped n-type polycrystalline silicon, phosphorus-doped single crystalline or phosphorus-doped silicides semiconductor wafer.
摘要翻译：使用溴化氢或溴作为蚀刻气体的等离子体蚀刻允许通过控制要蚀刻的质量的温度来精确控制获得垂直蚀刻或具有期望的锥角的锥形蚀刻，该质量是磷掺杂的n型多晶硅磷掺杂单晶或磷掺杂硅化物半导体晶片。

4. 发明申请

US20060168316A1 Data transmission device and data transmission system 有权
标题翻译：数据传输设备和数据传输系统
公开(公告)号：US20060168316A1
公开(公告)日：2006-07-27
申请号：US10524613
申请日：2004-02-02
申请人： Keisuke Kabashima , Michihiro Aoki , Takashi Kurimoto , Takashi Miyamura , Masahiro Goshima , Nobuaki Matsuura , Shigeo Urushidani
发明人： Keisuke Kabashima , Michihiro Aoki , Takashi Kurimoto , Takashi Miyamura , Masahiro Goshima , Nobuaki Matsuura , Shigeo Urushidani
IPC分类号： G06F15/173
CPC分类号： H04L12/4666 , H04L12/4675 , H04L69/18
摘要： A data transfer apparatus and a data transfer system are provided that can reduce the cost of installing communication equipment compatible with each of several dissimilar communication protocols in one exchange office and can reduce the cost of constructing the network. The data transfer apparatus includes a data reception device (110) that receives packets that comply with dissimilar communication protocols from upstream data transfer apparatuses (51, 52, and 53); a content data extraction device (120) that extracts content data included in the packets; a line selection information storage device (130) that stores the line selection information for selecting communication lines that comply with dissimilar communication protocols; a line selection device (140) that selects the communication line compatible with content data based on the line selection information; and a data transfer device (150) that transfers data to downstream data transfer apparatuses (61, 62, and 63) that are connected to the communication line that has been selected by the line selection device.
摘要翻译：提供了一种数据传送装置和数据传送系统，其可以降低与一个交换局中的多个不同通信协议中的每一个兼容的通信设备的安装成本，并且可以降低构建网络的成本。数据传送装置包括从上游数据传送装置（51,52,53）接收符合不同通信协议的分组的数据接收装置（110）。提取包中包含的内容数据的内容数据提取装置（120）线选择信息存储装置，存储用于选择符合不同通信协议的通信线路的线路选择信息; 线路选择装置（140），其基于线选择信息选择与内容数据兼容的通信线路; 以及数据传送装置（150），其将数据传送到与由线选择装置选择的通信线路连接的下游数据传送装置（61,62,63）。

5. 发明授权

US07142507B1 Traffic monitoring equipment and system and method for datagram transfer 失效
标题翻译：交通监控设备及数据报传送系统及方法
公开(公告)号：US07142507B1
公开(公告)日：2006-11-28
申请号：US09510349
申请日：2000-02-22
申请人： Takashi Kurimoto , Takashi Shimizu , Ikuo Yamasaki
发明人： Takashi Kurimoto , Takashi Shimizu , Ikuo Yamasaki
IPC分类号： H04L12/54
CPC分类号： H04L47/11 , H04L43/00 , H04L43/0888 , H04L43/0894 , H04L43/16
摘要： The purpose of the present invention is to provide a datagram transfer network that can operate stably by avoiding a state of congestion collapse by utilizing information derived from evaluating the impact of datagrams on the operation of the network. To achieve this objective, the results of evaluation is expressed as a preference value related to datagrams, and are inserted in the header in each datagram so that the datagrams are processed by an approach other than the methods based on arrival sequence of datagrams, when derived to the destination indicated in the header. In this approach, datagrams are protocol is controlled by priority order derived from the preference value which reflects traffic information obtained by a traffic monitoring equipment.
摘要翻译：本发明的目的是提供一种数据报传输网络，其可以通过利用从评估数据报对网络的操作的影响而导出的信息来避免拥塞崩溃的状态来稳定地运行。为了实现这一目标，评估结果被表示为与数据报相关的偏好值，并被插入到每个数据报的头部中，以便在导出时基于数据报的到达序列的方法来处理数据报到标头中指示的目的地。在这种方法中，数据报是通过优先级顺序控制协议的，该优先顺序是反映由交通监控设备获取的交通信息的偏好值。

6. 发明申请

US20060078333A1 Protocol speed increasing device 审中-公开
标题翻译：协议速度提升装置
公开(公告)号：US20060078333A1
公开(公告)日：2006-04-13
申请号：US10531436
申请日：2004-08-18
申请人： Masanori Uga , Takashi Kurimoto , Michihiro Aoki
发明人： Masanori Uga , Takashi Kurimoto , Michihiro Aoki
IPC分类号： H04B10/08
CPC分类号： H04L45/00 , G11C15/00 , H04L45/54 , H04L45/7453
摘要： A routing table generating unit that generates a routing table describing a next hop to which a packet is to be sent according to a destination address of the packet that is input via an input channel, including a ternary content addressable memory (TCAM); an external memory; a unit that classifies items in information that is received; and a unit that stores an item that uniquely identifies the information among the classified items in the TCAM and stores the rest of the items to the external memory.
摘要翻译：路由表生成单元，其根据通过输入信道输入的分组的目的地地址生成描述要发送分组的下一跳的路由表，包括三进制内容可寻址存储器（TCAM）; 外部记忆对接收到的信息中的项目进行分类的单元; 以及存储在TCAM中的分类项目中唯一地标识信息的项目并将其余的项目存储到外部存储器的单元。

7. 发明授权

US09059105B2 Ashing apparatus 有权
标题翻译：灰化装置
公开(公告)号：US09059105B2
公开(公告)日：2015-06-16
申请号：US12442834
申请日：2007-12-26
申请人： Masahisa Ueda , Takashi Kurimoto , Michio Ishikawa , Koukou Suu , Toshiya Yogo
发明人： Masahisa Ueda , Takashi Kurimoto , Michio Ishikawa , Koukou Suu , Toshiya Yogo
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H01L21/311 , H01J37/32
CPC分类号： H01L21/31138 , H01J37/3244
摘要： Disclosed is an ashing apparatus and its method of manufacture wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate.
摘要翻译：公开了一种灰化装置及其制造方法，其中抑制了加工效率的降低。具体而言，将淋浴板配置成面对放置有基板的基板台，并使供给到室内的氧自由基扩散。金属阻挡板布置在淋浴板和衬底台之间，并且具有氧自由基通过的通孔。此外，金属阻挡板具有在与基板相对的表面上由与基板中露出的金属相同的金属制成的第一层。

8. 发明申请

US20100089533A1 ASHING APPARATUS 有权
标题翻译：打磨装置
公开(公告)号：US20100089533A1
公开(公告)日：2010-04-15
申请号：US12442834
申请日：2007-12-26
申请人： Masahisa Ueda , Takashi Kurimoto , Michio Ishikawa , Koukou Suu , Toshiya Yogo
发明人： Masahisa Ueda , Takashi Kurimoto , Michio Ishikawa , Koukou Suu , Toshiya Yogo
IPC分类号： H01L21/3065
CPC分类号： H01L21/31138 , H01J37/3244
摘要： Disclosed is an ashing apparatus wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate.
摘要翻译：公开了一种抑制加工效率降低的灰化装置。具体而言，将淋浴板配置成面对放置有基板的基板台，并使供给到室内的氧自由基扩散。金属阻挡板布置在淋浴板和衬底台之间，并且具有氧自由基通过的通孔。此外，金属阻挡板具有在与基板相对的表面上由与基板中露出的金属相同的金属制成的第一层。

9. 发明授权

US07797444B2 Data transfer apparatus and data transfer system 有权
标题翻译：数据传输设备和数据传输系统
公开(公告)号：US07797444B2
公开(公告)日：2010-09-14
申请号：US10524613
申请日：2004-02-02
申请人： Keisuke Kabashima , Michihiro Aoki , Takashi Kurimoto , Takashi Miyamura , Masahiro Goshima , Nobuaki Matsuura , Shigeo Urushidani
发明人： Keisuke Kabashima , Michihiro Aoki , Takashi Kurimoto , Takashi Miyamura , Masahiro Goshima , Nobuaki Matsuura , Shigeo Urushidani
IPC分类号： G06F15/16
CPC分类号： H04L12/4666 , H04L12/4675 , H04L69/18
摘要： A data transfer apparatus and a data transfer system are provided that can reduce the cost of installing communication equipment compatible with each of several dissimilar communication protocols in one exchange office and can reduce the cost of constructing the network. The data transfer apparatus includes a data reception device (110) that receives packets that comply with dissimilar communication protocols from upstream data transfer apparatuses (51, 52, and 53); a content data extraction device (120) that extracts content data included in the packets; a line selection information storage device (130) that stores the line selection information for selecting communication lines that comply with dissimilar communication protocols; a line selection device (140) that selects the communication line compatible with content data based on the line selection information; and a data transfer device (150) that transfers data to downstream data transfer apparatuses (61, 62, and 63) that are connected to the communication line that has been selected by the line selection device.
摘要翻译：提供了一种数据传送装置和数据传送系统，其可以降低与一个交换局中的多个不同通信协议中的每一个兼容的通信设备的安装成本，并且可以降低构建网络的成本。数据传送装置包括从上游数据传送装置（51,52,53）接收符合不同通信协议的分组的数据接收装置（110）。提取包中包含的内容数据的内容数据提取装置（120）线选择信息存储装置，存储用于选择符合不同通信协议的通信线路的线路选择信息; 线路选择装置（140），其基于线选择信息选择与内容数据兼容的通信线路; 以及数据传送装置（150），其将数据传送到与由线选择装置选择的通信线路连接的下游数据传送装置（61,62,63）。

10. 发明申请

US20100193131A1 ASHING DEVICE 审中-公开
标题翻译： ASHING设备
公开(公告)号：US20100193131A1
公开(公告)日：2010-08-05
申请号：US12443912
申请日：2008-10-29
申请人： Masahisa Ueda , Takashi Kurimoto , Kyuzo Nakamura , Koukou Suu , Toshiya Yogo , Kazushige Komatsu , Nobusuke Tachibana
发明人： Masahisa Ueda , Takashi Kurimoto , Kyuzo Nakamura , Koukou Suu , Toshiya Yogo , Kazushige Komatsu , Nobusuke Tachibana
IPC分类号： C23F1/08
CPC分类号： H01L21/02068 , G03F7/427 , H01J37/32192 , H01J37/32467 , H01J37/32477 , H01L21/31138
摘要： An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind.
摘要翻译：灰化装置可防止灰度随时间变化。灰化装置在包括处理室中的暴露金属的基板上灰化有机材料。灰化装置包括形成在处理室中并通过其提供给处理室的活性物质通过的路径。该路径由其上由活性物质从衬底散射的金属可收集的表面限定，其表面被形成以暴露同一种类的金属。

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