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    • 9. 发明授权
    • Single axis accelerometer and method therefore
    • 单轴加速度计和方法因此
    • US07142921B2
    • 2006-11-28
    • US10732990
    • 2003-12-11
    • Michael F. MattesRalph B. DanzlAndreas A. FennerLary R. Larson
    • Michael F. MattesRalph B. DanzlAndreas A. FennerLary R. Larson
    • A61N1/362
    • G01P15/125A61N1/36542G01P15/0802G01P2015/0828
    • Methods and apparatus are provided for an accelerometer. The apparatus includes first, second, and third substrates. The first substrate includes the first plate of a first capacitor. The second substrate includes a moveable mass that is coupled to the second substrate by at least one spring. The moveable mass is the second plate of the first capacitor and the first plate of a second capacitor. The third substrate includes the second plate of the second capacitor. The moveable mass is prevented from moving in any direction where the at least one spring is inelastically flexed. The first substrate couples to the second substrate. The third substrate couples to the second substrate. The method includes forming a moveable mass in a substrate. The moveable mass is formed having a plurality of springs coupling the moveable mass to the substrate. The moveable mass is released using a dry etch.
    • 为加速度计提供了方法和装置。 该装置包括第一,第二和第三基板。 第一基板包括第一电容器的第一板。 第二基板包括通过至少一个弹簧联接到第二基板的可移动质量块。 可移动质量是第一电容器的第二板和第二电容器的第一板。 第三基板包括第二电容器的第二板。 防止可移动质量块在至少一个弹簧非弹性弯曲的任何方向上移动。 第一衬底耦合到第二衬底。 第三衬底耦合到第二衬底。 该方法包括在基板中形成可移动质量块。 可移动质量体形成有多个弹簧,将弹性体联接到基底上。 使用干蚀刻释放可移动质量。
    • 10. 发明授权
    • Method and apparatus for wafer-level burn-in
    • 晶圆级老化的方法和装置
    • US06627917B1
    • 2003-09-30
    • US09557508
    • 2000-04-25
    • Andreas A. FennerLary R. LarsonPaul F. GerrishDaniel E. FultonJames W. BellJames Thomas May
    • Andreas A. FennerLary R. LarsonPaul F. GerrishDaniel E. FultonJames W. BellJames Thomas May
    • H01L2358
    • G01R31/2831G01R31/316
    • Methods and apparatus for burn-in of integrated circuit (IC) dies at the wafer level. In one embodiment, a wafer is fabricated having an array of dies formed thereon wherein the dies are separated by scribe areas. Surrounding each die is one or more ring conductors which are electrically coupled to various circuits on the die via die bond pads. The wafer further includes a series of conductive pads located in an inactive region of the wafer. Electrically connecting the conductive pads to the ring conductors is a series of redundant scribe conductors. During burn-in, a burn-in indicating apparatus located on each die monitors burn-in parameters such as elapsed burn-in time. The indicating apparatus further records the elapsed burn-in time (or other parameter). The indicating apparatus may be subsequently interrogated to verify the burn-in time.
    • 集成电路(IC)老化的方法和设备在晶圆级处死。 在一个实施例中,制造具有在其上形成的模具阵列的晶片,其中模具由划线区域分开。 每个管芯周围是一个或多个环形导体,其通过管芯接合焊盘电耦合到管芯上的各种电路。 晶片还包括位于晶片的无效区域中的一系列导电焊盘。 将导电焊盘电连接到环形导体是一系列冗余划线导体。 在老化期间,位于每个管芯上的老化指示装置会监视老化参数,例如经过的老化时间。 指示装置还记录经过的老化时间(或其他参数)。 随后询问指示装置以验证老化时间。