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1. 外观设计

USD571385S1 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：USD571385S1
公开(公告)日：2008-06-17
申请号：US29266560
申请日：2006-09-25
申请人： Mitsuru Onuma , Kuniyasu Nakamura , Koichirou Saito , Takahito Hashimoto , Hiromi Inada
设计人： Mitsuru Onuma , Kuniyasu Nakamura , Koichirou Saito , Takahito Hashimoto , Hiromi Inada
CPC分类号： H01J2237/28

2. 发明授权

US08710438B2 Scanning transmission electron microscope and axial adjustment method thereof 失效
标题翻译：扫描透射电子显微镜及其轴向调整方法
公开(公告)号：US08710438B2
公开(公告)日：2014-04-29
申请号：US13808134
申请日：2011-07-11
申请人： Kuniyasu Nakamura , Hiromi Inada
发明人： Kuniyasu Nakamura , Hiromi Inada
IPC分类号： G21K7/00 , H01J37/26 , H01J37/28 , G01N23/00
CPC分类号： H01J37/263 , H01J37/28 , H01J2237/0451 , H01J2237/1501 , H01J2237/2802
摘要： A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.
摘要翻译：配备有像差校正器的扫描透射电子显微镜能够自动地将会聚孔的位置与光轴的中心对齐，而与操作者的技术和经验无关。扫描透射电子显微镜系统包括电子源; 聚光透镜，被配置为会聚从电子源发射的电子束; 配置成使电子束对样品进行扫描的偏转器; 被配置为校正电子束的像差的像差校正装置; 收敛孔，被配置为确定电子束的收敛角; 以及检测器，其被配置为检测通过所述样品的衍射的电子。该系统获取通过通过样本的电子束形成的罗尼克拉姆的对比度的信息，并且基于该信息确定会聚孔径的位置。

3. 发明申请

US20140138542A1 SCANNING ELECTRON MICROSCOPE AND SCANNING TRANSMISSION ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜和扫描传输电子显微镜
公开(公告)号：US20140138542A1
公开(公告)日：2014-05-22
申请号：US14232526
申请日：2012-07-19
申请人： Hiromi Inada , Kuniyasu Nakamura
发明人： Hiromi Inada , Kuniyasu Nakamura
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/263 , G01N23/2206 , H01J37/153 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0455 , H01J2237/0492 , H01J2237/153 , H01J2237/1532 , H01J2237/21 , H01J2237/221 , H01J2237/225 , H01J2237/226 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2802
摘要： A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (9); a transmission electron detector (13); a forward scattered electron beam detector (12); a focusing unit (16); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer (18) for mixing a secondary electron signal and a specimen forward scattered electron signal.
摘要翻译：根据本发明的扫描透射电子显微镜包括具有小球面像差系数的电子透镜系统，用于实现0.1nm原子尺寸结构的三维观察。根据本发明的扫描透射电子显微镜还包括能够改变照明角度的孔; 能够改变电子束探头的探头尺寸和照明角度的照明电子透镜系统; 二次电子检测器（9）; 透射电子检测器（13）; 前向散射电子束检测器（12）; 聚焦单元（16）; 用于识别图像对比度的图像处理器; 用于计算图像清晰度的图像处理器; 用于图像的三维重建的处理器; 以及用于混合二次电子信号和样本前向散射电子信号的混合器（18）。

4. 发明申请

US20130112875A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF 失效
标题翻译：扫描传输电子显微镜及其轴向调整方法
公开(公告)号：US20130112875A1
公开(公告)日：2013-05-09
申请号：US13808134
申请日：2011-07-11
申请人： Kuniyasu Nakamura , Hiromi Inada
发明人： Kuniyasu Nakamura , Hiromi Inada
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/263 , H01J37/28 , H01J2237/0451 , H01J2237/1501 , H01J2237/2802
摘要： A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.
摘要翻译：配备有像差校正器的扫描透射电子显微镜能够自动地将会聚孔的位置与光轴的中心对齐，而与操作者的技术和经验无关。扫描透射电子显微镜系统包括电子源; 聚光透镜，被配置为会聚从电子源发射的电子束; 配置成使电子束对样品进行扫描的偏转器; 被配置为校正电子束的像差的像差校正装置; 收敛孔，被配置为确定电子束的收敛角; 以及检测器，其被配置为检测通过所述样品的衍射的电子。该系统获取通过通过样本的电子束形成的罗尼克拉姆的对比度的信息，并且基于该信息确定会聚孔径的位置。

5. 发明授权

US08878130B2 Scanning electron microscope and scanning transmission electron microscope 有权
标题翻译：扫描电子显微镜和扫描透射电子显微镜
公开(公告)号：US08878130B2
公开(公告)日：2014-11-04
申请号：US14232526
申请日：2012-07-19
申请人： Hiromi Inada , Kuniyasu Nakamura
发明人： Hiromi Inada , Kuniyasu Nakamura
IPC分类号： H01J37/26 , H01J37/28 , H01J37/244 , H01J37/153 , H01J37/21 , G01N23/22
CPC分类号： H01J37/263 , G01N23/2206 , H01J37/153 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0455 , H01J2237/0492 , H01J2237/153 , H01J2237/1532 , H01J2237/21 , H01J2237/221 , H01J2237/225 , H01J2237/226 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2802
摘要： A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (9); a transmission electron detector (13); a forward scattered electron beam detector (12); a focusing unit (16); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer (18) for mixing a secondary electron signal and a specimen forward scattered electron signal.
摘要翻译：根据本发明的扫描透射电子显微镜包括具有小球面像差系数的电子透镜系统，用于实现0.1nm原子尺寸结构的三维观察。根据本发明的扫描透射电子显微镜还包括能够改变照明角度的孔; 能够改变电子束探头的探头尺寸和照明角度的照明电子透镜系统; 二次电子检测器（9）; 透射电子检测器（13）; 前向散射电子束检测器（12）; 聚焦单元（16）; 用于识别图像对比度的图像处理器; 用于计算图像清晰度的图像处理器; 用于图像的三维重建的处理器; 以及用于混合二次电子信号和样本前向散射电子信号的混合器（18）。

6. 发明申请

US20060038125A1 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system 有权
标题翻译：电荷粒子束显微镜，带电粒子束显微镜，临界尺寸测量和临界尺寸测量系统
公开(公告)号：US20060038125A1
公开(公告)日：2006-02-23
申请号：US11189897
申请日：2005-07-27
申请人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
发明人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
IPC分类号： G21K7/00
CPC分类号： H01J37/265 , G01N23/22 , H01J37/222 , H01J37/263 , H01J2237/223 , H01J2237/24592 , H01J2237/2823 , H01J2237/2826
摘要： Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a first images whose magnification for the specimen is actually measured, is recorded, a second image, whose magnification for the specimen is unknowns is recorded, and the magnification of the second image for the first image is analyzed by using image analysis. Thereby, the magnification of the second image for the specimen is actually measured. Then, magnification is actually measured in the whole range of magnification by repeating the magnification analysis described above by taking the second image as the first image. Actually measuring the magnification of images for the specimen in the whole range of magnification and calibrating the same permits a reduction of magnification errors by a digit.
摘要翻译：在带电粒子束施加装置和关键尺寸测量仪器中，放大误差在所需的放大倍率范围内减小。为了实现这一点，记录实际测量样本的倍率的第一图像，记录其样本的放大倍数未知的第二图像，并且通过使用图像分析来分析第一图像的第二图像的放大率。由此，实际测定第2图像的放大率。然后，通过将第二图像作为第一图像重复上述的倍率分析，实际上在整个放大倍数中进行倍率测量。实际上，在整个放大倍率范围内测量样本的图像的放大倍率，可以通过数字缩小倍数误差。

7. 发明授权

US07372051B2 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system 有权
标题翻译：电荷粒子束显微镜，带电粒子束显微镜，临界尺寸测量和临界尺寸测量系统
公开(公告)号：US07372051B2
公开(公告)日：2008-05-13
申请号：US11189897
申请日：2005-07-27
申请人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
发明人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
IPC分类号： G21K7/00 , H01J37/26
CPC分类号： H01J37/265 , G01N23/22 , H01J37/222 , H01J37/263 , H01J2237/223 , H01J2237/24592 , H01J2237/2823 , H01J2237/2826
摘要： Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a first image, whose magnification for the specimen is actually measured, is recorded, a second image, whose magnification for the specimen is unknown, is recorded, and the magnification of the second image for the first image is analyzed by using image analysis. Thereby, the magnification of the second image for the specimen is actually measured. Then, magnification is actually measured in the whole range of magnification by repeating the magnification analysis described above by taking the second image as the first image. Actually measuring the magnification of images for the specimen in the whole range of magnification and calibrating the same permits a reduction of magnification errors by a digit.
摘要翻译：在带电粒子束施加装置和关键尺寸测量仪器中，放大误差在所需的放大倍率范围内减小。为了实现这一点，记录实际测量样本的放大倍数的第一图像，记录其样本的放大倍数未知的第二图像，并且通过使用第一图像来分析第一图像的第二图像的放大率图像分析。由此，实际测定第2图像的放大率。然后，通过将第二图像作为第一图像重复上述的倍率分析，实际上在整个放大倍数中进行倍率测量。实际上，在整个放大倍率范围内测量样本的图像的放大倍率，可以通过数字缩小倍数误差。

8. 发明授权

US07164129B2 Method and device for observing a specimen in a field of view of an electron microscope 有权
公开(公告)号：US07164129B2
公开(公告)日：2007-01-16
申请号：US11297329
申请日：2005-12-09
申请人： Hiromi Inada , Isao Nagaoki , Hiroyuki Kobayashi
发明人： Hiromi Inada , Isao Nagaoki , Hiroyuki Kobayashi
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , G01N23/225 , G06K9/00127 , H01J37/222 , H01J37/26 , H01J37/265 , H01J2237/223
摘要： The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

9. 发明申请

US20060219908A1 Charged particle beam equipment 有权
公开(公告)号：US20060219908A1
公开(公告)日：2006-10-05
申请号：US11396654
申请日：2006-04-04
申请人： Hiromi Inada , Hiroyuki Tanaka , Shun-ichi Watanabe , Shigeto Isakozawa , Mitsugu Sato , Atsushi Takane , Satoshi Yamaguchi
发明人： Hiromi Inada , Hiroyuki Tanaka , Shun-ichi Watanabe , Shigeto Isakozawa , Mitsugu Sato , Atsushi Takane , Satoshi Yamaguchi
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/265 , H01J2237/15 , H01J2237/2487 , H01J2237/2826
摘要： Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.

10. 发明授权

US07112294B2 Method of producing ceramic body 失效
公开(公告)号：US07112294B2
公开(公告)日：2006-09-26
申请号：US10158933
申请日：2002-06-03
申请人： Hiromi Inada
发明人： Hiromi Inada
IPC分类号： C04B33/32
CPC分类号： C04B35/62204 , B28B1/26 , B28B17/026 , C04B35/6261 , C04B35/6262 , C04B35/62625 , C04B35/62635 , C04B35/62655 , C04B35/62695 , C04B2235/3225 , C04B2235/3244 , C04B2235/5436
摘要： This invention provides a production method of a ceramic body that can use waste and defectives generated during a production process. The invention includes a dust removal step of removing dust below a predetermined particle size from granulated powder in a slurry, a molding step of molding the slurry containing granulated powder into a primary molded body, a cutting step of cutting the resulting primary molded body into a non-sintered molded body having a desired shape, a deflocculation step of deflocculating the dust removed in the dust removal step so that at least 50 wt % of particles having a particle size of not greater than 5 μm are contained, and mixing water to obtain a regenerated slurry, and a step of molding a non-sintered molded body from at least the regenerated slurry so obtained, and sintering it to obtain a ceramic body.

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