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1. 发明授权

US06320645B1 Stage system and exposure apparatus, and device manufacturing method using the same 有权
标题翻译：舞台系统和曝光装置以及使用其的装置制造方法
公开(公告)号：US06320645B1
公开(公告)日：2001-11-20
申请号：US09324652
申请日：1999-06-03
申请人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
发明人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
IPC分类号： G03B2742
CPC分类号： G03F7/70691 , G03B27/42 , Y10T74/20354
摘要： A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with which the rigidity of the guide mechanism can be increased, wherein a portion to be attracted by the magnetic attraction force is made of a material having a product of a residual magnetic flux density Br and a holding force Hc in a hysteresis curve, not greater than 100 J/m3, this being very effective to reduce the hysteresis force, which is resistance due to the residual magnetic force, as compared with the preloading attraction force, whereby high precision positioning of the stage is accomplished.
摘要翻译：舞台系统包括可动台，用于相对于预定方向引导舞台的引导机构，以及用于产生引力机构的刚性的磁吸引力的预加载机构，其中吸引的部分通过磁吸引力由具有残余磁通密度Br和滞后曲线中的保持力Hc的乘积的材料制成，不大于100J / m 3，这对减小滞后力是非常有效的，这是非常有效的与预载吸引力相比，由于剩余磁力产生的阻力，从而实现了台的高精度定位。

2. 发明申请

US20050018166A1 Stage system, exposure apparatus, and device manufacturing method 失效
标题翻译：舞台系统，曝光装置和装置制造方法
公开(公告)号：US20050018166A1
公开(公告)日：2005-01-27
申请号：US10862383
申请日：2004-06-08
申请人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
发明人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
IPC分类号： H01L21/68 , G03F7/20 , H01J37/20 , H01L21/027 , H02K41/03 , G03B27/58
CPC分类号： G03F7/70808 , G03F7/70716 , G03F7/70758 , G03F7/70816 , H01J37/20 , H01J2237/20292 , H01J2237/3175 , H02K1/278 , H02K16/00 , H02K41/031 , H02K2201/18
摘要： Disclosed is a stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide (1a, 1c) having a plane along X and Y directions, a first movable guide (3) to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in Y direction), a second fixed guide (1b, 1d) having a plane along X and Y directions, a second movable guide (2) to be guided by the second fixed guide (the second movable guide having an X guide 2f extending in X direction), and a central movable member (4) to be guided in the X and Y directions by the Y guide (3f) and X guide (2f).
摘要翻译：公开了一种能够满足行程放大的舞台系统，特别是可以适当地并入电子束曝光装置中。舞台系统包括具有沿X和Y方向的平面的第一固定导轨（1a，1c），由第一固定导向（第一可移动导轨具有在Y延伸的Y导引件3f）引导的第一可移动导向件方向），具有沿X和Y方向的平面的第二固定引导件（1b，1d），由所述第二固定引导件引导的第二可移动引导件（所述第二可移动引导件具有在X方向上延伸的X引导件2f ）和通过Y引导件（3f）和X引导件（2f）在X和Y方向上被引导的中心可动构件（4）。

3. 发明授权

US06172738B2 Scanning exposure apparatus and device manufacturing method using the same 失效
标题翻译：扫描曝光装置及其制造方法
公开(公告)号：US06172738B2
公开(公告)日：2001-01-09
申请号：US08934134
申请日：1997-09-19
申请人： Nobushige Korenaga , Mitsuru Inoue
发明人： Nobushige Korenaga , Mitsuru Inoue
IPC分类号： G03B2742
CPC分类号： G03F7/707 , G03F7/70358 , G03F7/70816
摘要： A scanning exposure apparatus includes a projection optical system, a reticle stage for scanningly moving a reticle relative to the projection optical system a wafer stage for scanningly moving a wafer relative to the projection optical system, in a timed relation with the reticle scan movement, and a holding mechanism for holding the reticle on the reticle stage during the reticle scan movement. The holding mechanism includes a first mechanism for confining an end edge portion of the reticle in a scan direction and a second mechanism for pressing the reticle in a direction perpendicular to a pattern surface of the reticle.
摘要翻译：扫描曝光装置包括投影光学系统，用于相对于投影光学系统相对于投影光学系统以相对于投影光学系统扫描移动晶片的晶片台相对于掩模版扫描运动以定时关系扫描地移动掩模版的掩模版台，以及保持机构，用于在掩模版扫描运动期间将掩模版保持在标线片台上。保持机构包括用于将掩模版的端边缘部分沿扫描方向限制的第一机构和用于在垂直于掩模版的图案表面的方向上按压光罩的第二机构。

4. 发明申请

US20060082755A1 Stage system, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：舞台系统，曝光装置和装置制造方法
公开(公告)号：US20060082755A1
公开(公告)日：2006-04-20
申请号：US11289472
申请日：2005-11-30
申请人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
发明人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
IPC分类号： G03B27/58
CPC分类号： G03F7/70808 , G03F7/70716 , G03F7/70758 , G03F7/70816 , H01J37/20 , H01J2237/20292 , H01J2237/3175 , H02K1/278 , H02K16/00 , H02K41/031 , H02K2201/18
摘要： A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide having a plane along X and Y directions, a first movable guide to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in the Y direction), a second fixed guide having a plane along X and Y directions, a second movable guide to be guided by the second fixed guide (the second movable guide having an X guide extending in the X direction), and a central movable member to be guided in the X and Y directions by the Y guide and the X guide.
摘要翻译：能够满足行程的放大，特别是可以适合地并入电子束曝光装置的舞台系统。舞台系统包括具有沿X和Y方向的平面的第一固定引导件，由第一固定引导（第一可移动引导件具有沿Y方向延伸的Y引导件3f）引导的第一可移动引导件，第二固定引导件引导件沿着X和Y方向具有平面，第二可移动引导件由第二固定引导件（具有在X方向上延伸的X引导件的第二可移动引导件）引导，以及在X中被引导的中心可移动元件，以及 Y方向由Y指导和X指导。

5. 发明授权

US07030964B2 Stage system, exposure apparatus, and device manufacturing method 失效
标题翻译：舞台系统，曝光装置和装置制造方法
公开(公告)号：US07030964B2
公开(公告)日：2006-04-18
申请号：US10862383
申请日：2004-06-08
申请人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
发明人： Kotaro Akutsu , Nobushige Korenaga , Mitsuru Inoue
IPC分类号： G03B27/42 , G03B27/58 , H01J37/08 , H02K41/00
CPC分类号： G03F7/70808 , G03F7/70716 , G03F7/70758 , G03F7/70816 , H01J37/20 , H01J2237/20292 , H01J2237/3175 , H02K1/278 , H02K16/00 , H02K41/031 , H02K2201/18
摘要： A stage system including a first fixed guide having a first guide surface being parallel to a first direction and a second direction being orthogonal to the first direction, a first movable guide to be guided by the first fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about a third direction being orthogonal to the first and second directions, the first movable guide extending in the second direction, a second fixed guide having a second guide surface being parallel to the first and second directions, a second movable guide to be guided by the second fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about the third direction, the second movable guide having a second guide extending in the first direction, and a movable member to be guided in the first and second directions by the first and second movable guides.
摘要翻译：一种舞台系统，包括：第一固定导向器，具有平行于第一方向的第一导向表面和与第一方向正交的第二方向;第一可移动引导件，由第一固定引导件引导，并且具有三个直线运动自由度所述第一和第二方向以及围绕第三方向的旋转方向的运动与所述第一和第二方向正交，所述第一可移动引导件沿所述第二方向延伸;第二固定引导件，其具有与所述第一和第二方向平行的第二引导表面，第二方向，由第二固定引导件引导并且具有在第一和第二方向上的直线运动的三个自由度的第二可移动引导件和围绕第三方向的旋转方向的运动，第二可移动引导件具有延伸到第二方向的第二引导件第一方向，以及通过第一和第二可移动引导件在第一和第二方向上被引导的可动构件。

6. 发明申请

US20100315803A1 OPTICAL SHEET, SURFACE LIGHT SOURCE DEVICE AND TRANSMISSION-TYPE DISPLAY DEVICE 有权
标题翻译：光学片，表面光源器件和透射型显示器件
公开(公告)号：US20100315803A1
公开(公告)日：2010-12-16
申请号：US12918834
申请日：2009-07-17
申请人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
发明人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
IPC分类号： G02F1/13357 , F21V5/04 , F21V5/00
CPC分类号： G02B3/0068 , G02B5/0231 , G02B5/0278 , G02F1/1303 , G02F2001/133607
摘要： An optical sheet including a fly-eye lens is provided. This optical sheet can exhibit excellent optical functions, including desired light condensing ability, light diffusing ability and ability for rendering a light source image substantially invisible, as well as can be produced with high reproducibility. In one example, the optical sheet (40) includes: a sheet-like main body (45); first unit shaped elements (50) arranged on one surface (46) of the main body and constituting together the fly-eye lens; and second unit shaped elements (55) arranged on the one surface of the main body and extending in parallel with one direction on the sheet surface of the main body. In this case, the first unit shaped elements are arranged, with a space provided therebetween, on the one surface of the main body, while the second unit shaped elements are arranged, between the first unit shaped elements, on the one surface of the main body.
摘要翻译：提供了包括飞眼镜片的光学片。该光学片可以表现出优异的光学功能，包括期望的聚光能力，光漫射能力和使光源图像基本上不可见的能力，并且可以以高再现性制造。在一个示例中，光学片（40）包括：片状主体（45）; 第一单元形元件（50），布置在主体的一个表面（46）上，并构成飞眼透镜; 以及第二单元形元件（55），其布置在主体的一个表面上并且在主体的片材表面上与一个方向平行地延伸。在这种情况下，第一单元形状元件在主体的一个表面上设置有间隔开的空间，而第二单元形状元件布置在第一单元形状元件之间，主体的一个表面上身体。

7. 发明授权

US07454216B2 in-facility information provision system and in-facility information provision method 失效
标题翻译：设施内信息提供系统和设施信息提供方法
公开(公告)号：US07454216B2
公开(公告)日：2008-11-18
申请号：US11071342
申请日：2005-03-04
申请人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
发明人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
IPC分类号： H04Q7/20
CPC分类号： G06Q30/00
摘要： To enable an appropriate change of a path according to a situation of a user and a situation of a target store and the path without having a special terminal when the user of a facility utilizes the target store and an appropriate guidance, spatial recognition nodes respectively provided with a sensor and information processing equipment are installed in each location in the facility and connected via a network. The nodes recognize the position, the action and the behavior of a user of the facility. A server controlling a system manages the recognition result and constantly grasps the situation of the user. The situation of the user is recognized by the node installed at a destination and on a path, and notified to the server. The server displays appropriate path information based on the recognition result on any of plural information displays installed in the facility when the user approaches.
摘要翻译：为了在设施的用户利用目标存储和适当的指导的情况下，根据用户的情况和目标存储的情况以及路径而不具有特殊终端的路径的适当改变，分别提供了空间识别节点传感器和信息处理设备安装在设施的每个位置并通过网络连接。节点识别设施的用户的位置，动作和行为。控制系统的服务器管理识别结果并且不断掌握用户的情况。用户的情况由安装在目的地和路径上的节点识别，并通知给服务器。当用户接近时，服务器基于在设施中安装的多个信息显示器中的任一个上的识别结果来显示适当的路径信息。

8. 发明申请

US20080158530A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20080158530A1
公开(公告)日：2008-07-03
申请号：US11959197
申请日：2007-12-18
申请人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
发明人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
IPC分类号： G03B27/42
CPC分类号： G03B27/58 , G03F7/70725 , G03F7/709
摘要： An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.
摘要翻译：包括投影光学系统并经配置以经由投影光学系统将基板曝光于光的曝光装置包括：支撑构件，用于支撑投影光学系统;由支撑件支撑并可相对于支撑件移动的物体;致动器，物体，被配置为检测物体和支撑体之间的相对位置的检测器，以及被配置为基于检测器的输出执行致动器的控制以使物体跟随支撑件的控制器。控制器被配置为基于检测器的输出与控制并行地执行对支撑件的振动的估计，以使对象遵循支撑。

9. 发明申请

US20080068603A1 ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：防振装置，曝光装置和装置制造方法
公开(公告)号：US20080068603A1
公开(公告)日：2008-03-20
申请号：US11846904
申请日：2007-08-29
申请人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
发明人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
IPC分类号： G01N21/01 , G03B27/62 , H01S4/00
CPC分类号： G03B27/53 , G03F7/70833 , G03F7/709 , Y10T29/49002
摘要： An anti-vibration apparatus includes a target object, a reference object, a measuring device which measures the position of the target object relative to the reference object, a driving mechanism to drive the target object based on the measurement result obtained by the measuring device, a Lorentz's force actuator which supports the reference object, and a power supply device which supplies a constant current to the Lorentz's force actuator. The actuator which supports the reference object uses a Lorentz's force actuator or an actuator which supports the reference object by the pressure of a gas.
摘要翻译：防振装置包括目标物体，参考物体，测量目标物体相对于基准物体的位置的测量装置，基于由测量装置获得的测量结果来驱动目标物体的驱动机构，支撑参考对象的洛伦兹力致动器，以及向洛伦兹力致动器提供恒定电流的电源装置。支撑参考对象的致动器使用洛仑兹力致动器或通过气体压力支撑参考对象的致动器。

10. 发明申请

US20060098320A1 Storage control device and method for detecting write errors to storage media 失效
公开(公告)号：US20060098320A1
公开(公告)日：2006-05-11
申请号：US11022781
申请日：2004-12-28
申请人： Tsutomu Koga , Mitsuru Inoue
发明人： Tsutomu Koga , Mitsuru Inoue
IPC分类号： G11B5/09
CPC分类号： G06F11/1004 , G06F12/0866
摘要： There are provided a cache region that stores write data from a host device, storage media, a data storage region for the storage media, and a comparison unit. A first comparison object is generated for N items of write data on the cache region and the N items of write data are transferred to the data storage region. Write data is read from a designated address of the data storage region and this write data is written to the storage media. When N items of write data have been read, a second comparison object is generated in respect of the write data. The comparison unit compares the first comparison object and the second comparison object, and if the result of the comparison is a mismatch, the N items of write data on the cache region are again transferred to the data storage region.

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