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1. 发明申请

US20120026246A1 LIQUID EJECTION HEAD AND METHOD FOR PRODUCING THE SAME 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20120026246A1
公开(公告)日：2012-02-02
申请号：US13188211
申请日：2011-07-21
申请人： Mitsuru Chida , Jun Yamamuro , Kenji Fujii , Tetsuro Honda
发明人： Mitsuru Chida , Jun Yamamuro , Kenji Fujii , Tetsuro Honda
IPC分类号： B41J2/135 , C23F1/02
CPC分类号： B41J2/14024 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1645 , B41J2002/14387
摘要： A liquid ejection head includes a substrate having an energy-generating device configured to generate energy used for ejecting a liquid from an orifice; a transparent channel wall member forming an inner wall of a channel leading to the orifice; and an intermediate layer disposed between and in contact with a surface of the substrate and the channel wall member and having a refractive index different from a refractive index of the channel wall member. The intermediate layer has a first outer end surface forming contours of a symbol as viewed in a direction from the orifice toward the substrate and making a first angle with the surface of the substrate and a second outer end surface facing the channel and making a second angle with the surface of the substrate. The first angle is an obtuse angle. The second angle is smaller than the first angle.
摘要翻译：液体喷射头包括具有能量产生装置的基板，该能量产生装置被配置为产生用于从孔口喷射液体的能量; 形成通向所述孔口的通道的内壁的透明通道壁构件; 以及中间层，其设置在所述基板和所述通道壁构件的表面之间并且与所述通道壁构件的表面接触并且具有与所述通道壁构件的折射率不同的折射率。所述中间层具有第一外端表面，其形成从沿着所述孔朝向所述基板的方向观察的符号轮廓，并且与所述基板的表面形成第一角度，以及与所述通道相对的第二外端表面，并形成第二角度与基板的表面。第一个角度是钝角。第二角度小于第一角度。

2. 发明授权

US08408678B2 Liquid ejection head and method for producing the same 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US08408678B2
公开(公告)日：2013-04-02
申请号：US13188211
申请日：2011-07-21
申请人： Mitsuru Chida , Jun Yamamuro , Kenji Fujii , Tetsuro Honda
发明人： Mitsuru Chida , Jun Yamamuro , Kenji Fujii , Tetsuro Honda
IPC分类号： B41J2/135
CPC分类号： B41J2/14024 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1645 , B41J2002/14387
摘要： A liquid ejection head includes a substrate having an energy-generating device configured to generate energy used for ejecting a liquid from an orifice; a transparent channel wall member forming an inner wall of a channel leading to the orifice; and an intermediate layer disposed between and in contact with a surface of the substrate and the channel wall member and having a refractive index different from a refractive index of the channel wall member. The intermediate layer has a first outer end surface forming contours of a symbol as viewed in a direction from the orifice toward the substrate and making a first angle with the surface of the substrate and a second outer end surface facing the channel and making a second angle with the surface of the substrate. The first angle is an obtuse angle. The second angle is smaller than the first angle.
摘要翻译：液体喷射头包括具有能量产生装置的基板，该能量产生装置被配置为产生用于从孔口喷射液体的能量; 形成通向所述孔口的通道的内壁的透明通道壁构件; 以及中间层，其设置在所述基板和所述通道壁构件的表面之间并且与所述通道壁构件的表面接触并且具有与所述通道壁构件的折射率不同的折射率。所述中间层具有第一外端表面，其形成从沿着所述孔朝向所述基板的方向观察的符号轮廓，并且与所述基板的表面形成第一角度，以及与所述通道相对的第二外端表面，并形成第二角度与基板的表面。第一个角度是钝角。第二角度小于第一角度。

3. 发明申请

US20110020966A1 METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PRODUCING SUBSTRATE FOR LIQUID EJECTING HEAD 审中-公开
标题翻译：加工硅基板的方法和用于生产用于液体喷射头的基板的方法
公开(公告)号：US20110020966A1
公开(公告)日：2011-01-27
申请号：US12839301
申请日：2010-07-19
申请人： Mitsuru Chida , Keiji Edamatsu , Toshiyasu Sakai , Jun Yamamuro
发明人： Mitsuru Chida , Keiji Edamatsu , Toshiyasu Sakai , Jun Yamamuro
IPC分类号： H01L21/306
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1645
摘要： A method for processing a silicon substrate includes preparing a first silicon substrate including an etching mask layer including first and second opening portions; forming a first recess in a portion of the silicon substrate corresponding to a region in the first opening portion; etching the silicon substrate by crystal anisotropic etching through the etching mask layer with an etching apparatus and an etchant, the etching proceeding in the first and second opening portions to form a through hole in a position corresponding to the first opening portion and to form a second recess in a position corresponding to the second opening portion; calculating an etching rate of the silicon substrate in terms of the etchant by using the second recess; and determining, by using the calculated etching rate, an etching condition for etching another silicon substrate with the etching apparatus after the etching of the first silicon substrate.
摘要翻译：一种处理硅衬底的方法包括：制备包含第一和第二开口部分的蚀刻掩模层的第一硅衬底; 在所述硅衬底的与所述第一开口部分中的区域相对应的部分中形成第一凹部; 通过蚀刻装置和蚀刻剂通过蚀刻掩模层通过晶体各向异性蚀刻来蚀刻硅衬底，蚀刻在第一和第二开口部分中进行，以在对应于第一开口部分的位置形成通孔，并形成第二在与第二开口部相对应的位置处凹陷; 通过使用第二凹槽计算蚀刻剂方面的硅衬底的蚀刻速率; 以及通过使用所计算的蚀刻速率，在蚀刻所述第一硅衬底之后，使用所述蚀刻装置来确定用于蚀刻另一硅衬底的蚀刻条件。

4. 发明申请

US20120218350A1 LIQUID EJECTION HEAD AND PROCESS FOR PRODUCING THE SAME 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20120218350A1
公开(公告)日：2012-08-30
申请号：US13359249
申请日：2012-01-26
申请人： Makoto Watanabe , Yoshinori Tagawa , Hiroyuki Murayama , Mitsuru Chida , Masataka Nagai
发明人： Makoto Watanabe , Yoshinori Tagawa , Hiroyuki Murayama , Mitsuru Chida , Masataka Nagai
IPC分类号： B41J2/145 , H01L21/02 , B41J2/14
CPC分类号： B41J2/1603 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2002/14475
摘要： Provided is a process for producing a liquid ejection head including an ejection orifice member having a plurality of ejection orifices for ejecting liquid provided along an arrangement direction, the process including preparing a substrate provided with a resin layer which contains a photocurable resin;carrying out a first exposure treatment and a second exposure treatment which are each of an exposure treatment of subjecting the resin layer to exposure; and forming the ejection orifices of the resin layer subjected to the first exposure treatment and the second exposure treatment. An inclination angle of a side wall of the ejection orifices formed by the first exposure treatment with respect to the substrate differs from an inclination angle of a side wall of the ejection orifices formed by the second exposure treatment with respect to the substrate.
摘要翻译：本发明提供了一种液体喷射头的制造方法，该喷液头包括具有多个用于喷射沿着排列方向设置的液体的喷射口的喷射口部件，该喷射头部件准备具有含有可光固化树脂的树脂层的基板; 第一曝光处理和第二曝光处理，每个曝光处理使树脂层曝光; 以及形成经受第一曝光处理和第二曝光处理的树脂层的喷射孔。通过第一曝光处理相对于基板形成的喷射孔的侧壁的倾斜角度与由第二曝光处理相对于基板形成的喷射孔的侧壁的倾斜角不同。

5. 发明申请

US20120013682A1 LIQUID EJECTION HEAD AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20120013682A1
公开(公告)日：2012-01-19
申请号：US13170695
申请日：2011-06-28
申请人： Mitsuru Chida , Satoshi Ibe , Hiroto Komiyama , Yoshinori Tagawa
发明人： Mitsuru Chida , Satoshi Ibe , Hiroto Komiyama , Yoshinori Tagawa
IPC分类号： B41J2/14 , H01L41/22
CPC分类号： B41J2/14129 , B41J2/1404 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1645
摘要： Provided is a liquid ejection head, including: a flow path forming member including: an ejection orifice for ejecting liquid therefrom; and a liquid flow path communicated with the ejection orifice; a silicon substrate including a supply port for supplying the liquid to the liquid flow path; and a protective film which is formed on a wall surface of the supply port and which is formed of an organic resin which is the same as a material of a member forming the flow path forming member.
摘要翻译：提供一种液体喷射头，包括：流路形成构件，包括：用于从其喷射液体的喷射孔; 以及与所述喷射孔连通的液体流路; 硅基板，包括用于将液体供给到液体流路的供给口; 以及保护膜，其形成在供给口的壁面上，并且由与构成流路形成部件的部件的材料相同的有机树脂形成。

6. 发明授权

US07901045B2 Ink jet recording head and method for manufacturing the same 有权
标题翻译：喷墨记录头及其制造方法
公开(公告)号：US07901045B2
公开(公告)日：2011-03-08
申请号：US12022741
申请日：2008-01-30
申请人： Kazuya Abe , Kenji Ono , Toshiyasu Sakai , Hiroyuki Abo , Noriyasu Ozaki , Mitsuru Chida
发明人： Kazuya Abe , Kenji Ono , Toshiyasu Sakai , Hiroyuki Abo , Noriyasu Ozaki , Mitsuru Chida
IPC分类号： B41J2/14 , H01L23/488
CPC分类号： B41J2/1603 , B41J2/14072 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1643 , B41J2/1645 , H01L2224/05001 , H01L2224/05022 , H01L2224/05027 , H01L2224/05124 , H01L2224/05166 , H01L2224/05184 , H01L2224/05572 , H01L2224/10126 , H01L2224/13565 , H01L2924/00014 , H01L2924/12044 , H01L2924/00 , H01L2224/05599
摘要： The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.
摘要翻译：本发明提供了一种喷墨记录头，其包括基板，设置在基板上并产生用于排出液体的能量的能量产生元件，设置在基板上并电连接到能量产生元件的电极，设置在基板上的通道形成部件，设置在基板上的粘合层，并且促进通道形成部件和基板之间的粘合，以及设置在电极上的凸块。凸块的上表面的面积大于凸块的下表面的面积，下表面位于基板侧，上表面与下表面相对，凸块的侧面为覆盖着粘附层。由此，在凸块周围形成保护膜。

7. 发明授权

US08652767B2 Liquid ejection head and process for producing the same 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US08652767B2
公开(公告)日：2014-02-18
申请号：US13359249
申请日：2012-01-26
申请人： Makoto Watanabe , Yoshinori Tagawa , Hiroyuki Murayama , Mitsuru Chida , Masataka Nagai
发明人： Makoto Watanabe , Yoshinori Tagawa , Hiroyuki Murayama , Mitsuru Chida , Masataka Nagai
IPC分类号： G03F1/00
CPC分类号： B41J2/1603 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1645 , B41J2002/14475
摘要： Provided is a process for producing a liquid ejection head including an ejection orifice member having a plurality of ejection orifices for ejecting liquid provided along an arrangement direction, the process including preparing a substrate provided with a resin layer which contains a photocurable resin; carrying out a first exposure treatment and a second exposure treatment which are each of an exposure treatment of subjecting the resin layer to exposure; and forming the ejection orifices of the resin layer subjected to the first exposure treatment and the second exposure treatment. An inclination angle of a side wall of the ejection orifices formed by the first exposure treatment with respect to the substrate differs from an inclination angle of a side wall of the ejection orifices formed by the second exposure treatment with respect to the substrate.
摘要翻译：本发明提供一种液体喷射头的制造方法，该喷液头包括具有多个用于喷射沿着排列方向设置的液体的喷射孔的喷射口部件，该喷射口部件准备具有含有光固化树脂的树脂层的基板; 进行第一曝光处理和第二曝光处理，其中每个曝光处理使树脂层曝光; 以及形成经受第一曝光处理和第二曝光处理的树脂层的喷射孔。通过第一曝光处理相对于基板形成的喷射孔的侧壁的倾斜角度与由第二曝光处理相对于基板形成的喷射孔的侧壁的倾斜角不同。

8. 发明授权

US08608303B2 Ink jet recording head 有权
标题翻译：喷墨记录头
公开(公告)号：US08608303B2
公开(公告)日：2013-12-17
申请号：US13288141
申请日：2011-11-03
申请人： Hiroyuki Murayama , Yoshinori Tagawa , Mitsuru Chida , Kazuhiro Asai
发明人： Hiroyuki Murayama , Yoshinori Tagawa , Mitsuru Chida , Kazuhiro Asai
IPC分类号： B41J2/175 , B41J2/05
CPC分类号： B41J2/1629 , B41J2/14145 , B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2002/14403
摘要： An ink jet recording head capable of maintaining ink supply capability for a long period of time includes a substrate provided with a plurality of energy generating elements and an ink supply port, and a flow path member which has a plurality of discharge ports, a plurality of ink flow paths in communication with the plurality of discharge ports, and a common liquid chamber in communication with the plurality of ink flow paths. The common liquid chamber is divided into a discharge port area and a drainage port area, and the ink flows into the discharge port area through a filter. In the case where a smallest diameter among the diameters of the discharge ports and the diameters of the ink flow paths is denoted by A and a largest diameter of openings of the filter is denoted by B, A≧B is satisfied.
摘要翻译：能够长期维持供墨能力的喷墨记录头包括设置有多个能量产生元件和供墨口的基板和具有多个排出口的流路部件，多个排出口与多个排出口连通的墨流路，以及与多个墨流路连通的公共液室。公共液体室分为排出口区域和排水口区域，墨水通过过滤器流入排出口区域。在排出口的直径和油墨流路的直径之间的最小直径由A表示并且过滤器的最大开口直径用B表示的情况下，满足A> = B。

9. 发明授权

US08371680B2 Substrate having protection layers for liquid-ejection head, liquid ejection head, method for manufacturing substrate for liquid-ejection head, and method for manufacturing liquid ejection head 有权
标题翻译：具有用于液体喷射头的保护层的底物，液体喷射头，用于制造液体喷射头的基底的方法，以及用于制造液体喷射头的方法
公开(公告)号：US08371680B2
公开(公告)日：2013-02-12
申请号：US12968734
申请日：2010-12-15
申请人： Hiroto Komiyama , Yoshinori Tagawa , Satoshi Ibe , Mitsuru Chida , Kazuhiro Asai
发明人： Hiroto Komiyama , Yoshinori Tagawa , Satoshi Ibe , Mitsuru Chida , Kazuhiro Asai
IPC分类号： B41J2/05
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1643 , B41J2/1645 , B41J2/1646
摘要： When an insulating layer is provided in order to protect an energy generating element, there arises a possibility that the layer dissolves in a contacting liquid. Therefore, in order to eject liquid, a first protection layer containing metal is provided on the insulating layer facing a substrate for a liquid-ejection head and a second protection layer containing metal is provided on the surface of a liquid supply port to which a base containing silicon is exposed.
摘要翻译：当提供绝缘层以保护能量产生元件时，会出现该层溶解在接触液体中的可能性。因此，为了喷射液体，在与液体喷射头的基板相对的绝缘层上设置有含有金属的第一保护层，在液体供给口的表面上设有含有金属的第二保护层，含硅。

10. 发明授权

US08163187B2 Process of producing liquid discharge head 有权
标题翻译：生产液体排放头的工艺
公开(公告)号：US08163187B2
公开(公告)日：2012-04-24
申请号：US12478602
申请日：2009-06-04
申请人： Hiroyuki Abo , Masaki Ohsumi , Toshiyasu Sakai , Noriyasu Ozaki , Mitsuru Chida , Kazuya Abe
发明人： Hiroyuki Abo , Masaki Ohsumi , Toshiyasu Sakai , Noriyasu Ozaki , Mitsuru Chida , Kazuya Abe
IPC分类号： B41J2/05
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1643 , B41J2/1645
摘要： Provided is a process of producing a liquid discharge head having a substrate, a passage-forming member, and a patterned layer. The process includes providing a resin layer on a substrate; providing a resist pattern on the resin layer for patterning the resin layer; forming a patterned layer by patterning the resin layer using the resist pattern as a mask; providing a layer for forming a passage pattern having a shape of passage on the resist pattern lying on the patterned layer; forming a passage pattern by patterning the layer for forming a passage pattern; removing the resist pattern; providing a passage-forming member so as to cover the passage pattern and the patterned layer; and removing the passage pattern to give the passage.
摘要翻译：提供了一种制造具有基板，通道形成部件和图案化层的排液头的方法。该方法包括在基底上提供树脂层; 在树脂层上提供抗蚀剂图案，用于图案化树脂层; 通过使用抗蚀剂图案作为掩模对树脂层进行图案化来形成图案层; 提供用于在位于图案化层上的抗蚀剂图案上形成具有通道形状的通道图案的层; 通过图案化形成通道图案的层来形成通道图案; 去除抗蚀剂图案; 提供通道形成构件以覆盖通道图案和图案层; 并且去除通道图案以给出通道。

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