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1. 发明授权

US08035668B2 Exposure apparatus and device manufacturing method 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US08035668B2
公开(公告)日：2011-10-11
申请号：US11336754
申请日：2006-01-19
申请人： Mitsuro Sugita , Kazuaki Ohmi , Takao Yonehara , Toshihiko Tsuji , Takaaki Terashi , Tohru Kohda , Shinji Tsutsui
发明人： Mitsuro Sugita , Kazuaki Ohmi , Takao Yonehara , Toshihiko Tsuji , Takaaki Terashi , Tohru Kohda , Shinji Tsutsui
IPC分类号： G03G13/04
CPC分类号： G03F7/70275
摘要： An exposure apparatus which forms a pattern on an object. The apparatus includes an exposure head structure in which a plurality of elemental exposure units are arrayed, each elemental exposure unit including (i) at least one light source for emitting exposure light and (ii) an optical element which forms an image of the at least one light source on the object, for exposing the object. Positions of the images of the at least one light source in a direction perpendicular to a surface of the object include plural positions different from each other. A sensor detects a position of the surface of the object and produces a detection result. A controller receives the detection result and controls the exposure head structure such that a pattern is formed on the object by the exposure is selected to expose the object based on the detection result by the sensor.
摘要翻译：在物体上形成图案的曝光装置。该装置包括其中排列多个元素曝光单元的曝光头结构，每个元素曝光单元包括：（i）至少一个用于发射曝光光的光源;以及（ii）至少形成至少一个图像的光学元件对象上的一个光源，用于暴露对象。至少一个光源的图像在垂直于物体表面的方向上的位置包括彼此不同的多个位置。传感器检测物体表面的位置并产生检测结果。控制器接收检测结果并控制曝光头结构，使得通过曝光在物体上形成图案被选择以基于传感器的检测结果来曝光物体。

2. 发明申请

US20060158504A1 Exposure apparatus and device manufacturing method 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20060158504A1
公开(公告)日：2006-07-20
申请号：US11336754
申请日：2006-01-19
申请人： Mitsuro Sugita , Kazuaki Ohmi , Takao Yonehara , Toshihiko Tsuji , Takaaki Terashi , Tohru Kohda , Shinji Tsutsui
发明人： Mitsuro Sugita , Kazuaki Ohmi , Takao Yonehara , Toshihiko Tsuji , Takaaki Terashi , Tohru Kohda , Shinji Tsutsui
IPC分类号： B41J2/385
CPC分类号： G03F7/70275
摘要： An exposure apparatus which forms a pattern on an object includes an exposure head structure in which a plurality of elemental exposure units each including at least one light source and an optical element which forms an image of the light source on the object are arrayed, a sensor which detects the surface position of the object, and a controller which controls exposure by the exposure head structure based on the detection result by the sensor. The controller forms a pattern on the object while selectively operating one of the plurality of elemental exposure units, which satisfies a predetermined condition.
摘要翻译：在物体上形成图案的曝光装置包括曝光头结构，其中排列有多个元件曝光单元，每个元素曝光单元包括至少一个光源和形成物体上光源的图像的光学元件，传感器其检测物体的表面位置，以及控制器，其基于传感器的检测结果来控制曝光头结构的曝光。控制器在选择性地操作满足预定条件的多个元素曝光单元中的一个的同时，在物体上形成图案。

3. 发明申请

US20070285666A1 Device and Method for Acquiring Information on Objective Substance to Be Detected By Detecting a Change of Wavelength Characteristics on the Optical Transmittance 失效
标题翻译：通过检测光学透射率波长特性变化来获得要检测的物质信息的装置和方法
公开(公告)号：US20070285666A1
公开(公告)日：2007-12-13
申请号：US11659717
申请日：2005-09-14
申请人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
发明人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
IPC分类号： G01N21/00
CPC分类号： G01N21/554 , G01N21/648 , G01N2021/258 , G01N2201/0635 , G01N2201/0636
摘要： An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.
摘要翻译：一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

4. 发明申请

US20060147169A1 Optical device and method of manufacturing the same 失效
标题翻译：光学装置及其制造方法
公开(公告)号：US20060147169A1
公开(公告)日：2006-07-06
申请号：US10545157
申请日：2004-08-27
申请人： Mitsuro Sugita , Takao Yonehara
发明人： Mitsuro Sugita , Takao Yonehara
IPC分类号： G02B6/10 , C03B37/023 , C03B37/022
CPC分类号： G01N21/774 , B82Y20/00 , G01N21/7746 , G02B6/1225 , G02B6/1228 , G02B6/125 , G02B6/131 , G02B2006/12176
摘要： An optical device comprising a substrate, a porous layer laid on the substrate having a pore diameter smaller than the wavelength of light and a crystal layer laid on the porous layer showing a refractive index greater than that of the porous layer is presented. The optical device is manufactured by a method comprising a step of forming a porous layer having a pore diameter smaller than the wavelength of light on the surface of a substrate and a step of forming a crystal layer showing a refractive index greater than that of the porous layer on the porous layer. Since the porous layer is clad, light can be confined with ease.
摘要翻译：提供了一种光学装置，其包括基底，放置在基底上的孔径小于光波长的多孔层和放置在多孔层上的结晶层，其折射率大于多孔层的折射率。该光学器件通过包括形成孔径小于衬底表面上的光的波长的多孔层的步骤的方法制造，并且形成表现出比多孔层的折射率更大的折射率的晶体层的步骤在多孔层上。由于多孔层被包覆，所以可以容易地限制光。

5. 发明授权

US07659987B2 Device and method for acquiring information on objective substance to be detected by detecting a change of wavelength characteristics on the optical transmittance 失效
标题翻译：通过检测光透射率上的波长特性的变化来获取关于要检测的物质的信息的装置和方法
公开(公告)号：US07659987B2
公开(公告)日：2010-02-09
申请号：US11659717
申请日：2005-09-14
申请人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
发明人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
IPC分类号： G01N21/00
CPC分类号： G01N21/554 , G01N21/648 , G01N2021/258 , G01N2201/0635 , G01N2201/0636
摘要： An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.
摘要翻译：一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

6. 发明授权

US07231123B2 Photonic crystal optical element and manufacturing method therefor 失效
标题翻译：光子晶体光学元件及其制造方法
公开(公告)号：US07231123B2
公开(公告)日：2007-06-12
申请号：US10558830
申请日：2004-12-20
申请人： Mitsuro Sugita , Toshihiko Ouchi , Takao Yonehara
发明人： Mitsuro Sugita , Toshihiko Ouchi , Takao Yonehara
IPC分类号： G02B6/10
CPC分类号： G02B6/1225 , B82Y20/00
摘要： To provide a novel technique for producing a difference in refractive index between two regions. An optical element according to the present invention includes a first porous region (2002), a second porous region (2004), and a non-porous region (2003) formed between the first porous region (2002) and the second porous region (2004), the non-porous region having a refractive index higher than a refractive index of the first porous region.
摘要翻译：提供一种用于产生两个区域之间的折射率差异的新技术。根据本发明的光学元件包括形成在第一多孔区域（2002）和第二多孔区域（2004）之间的第一多孔区域（2002），第二多孔区域（2004）和无孔区域（2003）），所述非多孔区域的折射率高于所述第一多孔区域的折射率。

7. 发明申请

US20060263025A1 Photonic crystal optical element and manufacturing method therefor 失效
标题翻译：光子晶体光学元件及其制造方法
公开(公告)号：US20060263025A1
公开(公告)日：2006-11-23
申请号：US10558830
申请日：2004-12-20
申请人： Mitsuro Sugita , Toshihiko Ouchi , Takao Yonehara
发明人： Mitsuro Sugita , Toshihiko Ouchi , Takao Yonehara
IPC分类号： G02B6/10
CPC分类号： G02B6/1225 , B82Y20/00
摘要： To provide a novel technique for producing a difference in refractive index between two regions. An optical element according to the present invention includes a first porous region (2002), a second porous region (2004), and a non-porous region (2003) formed between the first porous region (2002) and the second porous region (2004), the non-porous region having a refractive index higher than a refractive index of the first porous region.
摘要翻译：提供一种用于产生两个区域之间的折射率差异的新技术。根据本发明的光学元件包括形成在第一多孔区域（2002）和第二多孔区域（2004）之间的第一多孔区域（2002），第二多孔区域（2004）和无孔区域（2003）），所述非多孔区域的折射率高于所述第一多孔区域的折射率。

8. 发明授权

US07944564B2 Device and method for acquiring information on objective substance to be detected by detecting a change of wavelength characteristics on the optical transmittance 有权
标题翻译：通过检测光透射率上的波长特性的变化来获取关于要检测的物质的信息的装置和方法
公开(公告)号：US07944564B2
公开(公告)日：2011-05-17
申请号：US12642446
申请日：2009-12-18
申请人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
发明人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
IPC分类号： G01N22/00
CPC分类号： G01N21/554 , G01N21/648 , G01N2021/258 , G01N2201/0635 , G01N2201/0636
摘要： An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.
摘要翻译：一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

9. 发明申请

US20100097612A1 DEVICE AND METHOD FOR ACQUIRING INFORMATION ON OBJECTIVE SUBSTANCE TO BE DETECTED BY DETECTING A CHANGE OF WAVELENGTH CHARACTERISTICS ON THE OPTICAL TRANSMITTANCE 有权
标题翻译：通过检测光学传输波长特性的变化来获取有关物体的信息的设备和方法
公开(公告)号：US20100097612A1
公开(公告)日：2010-04-22
申请号：US12642446
申请日：2009-12-18
申请人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
发明人： Norihiko Utsunomiya , Mitsuro Sugita , Satoru Nishiuma , Takao Yonehara
IPC分类号： G01N21/55
CPC分类号： G01N21/554 , G01N21/648 , G01N2021/258 , G01N2201/0635 , G01N2201/0636
摘要： An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.
摘要翻译：一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

10. 发明授权

US07272290B2 Method for fabrication of optical element, and optical element having three-dimensional laminated structure 失效
标题翻译：光学元件的制造方法以及具有三维层叠结构的光学元件
公开(公告)号：US07272290B2
公开(公告)日：2007-09-18
申请号：US10571696
申请日：2004-11-08
申请人： Mitsuro Sugita , Takao Yonehara
发明人： Mitsuro Sugita , Takao Yonehara
IPC分类号： G02B6/10
CPC分类号： B82Y20/00 , G02B6/12 , G02B6/12002 , G02B6/1225 , G02B6/13 , G02B6/136 , G02B6/14
摘要： A method for production of an optical element includes preparing a first member having formed on the surface of a first substrate 101 a first layer 103 by at least one of epitaxial growth and pore-making (micropore-making) and a second member having a porous layer for layer separation formed on a second substrate 104 and having formed thereon a second layer by at least one of epitaxial growth and pore-making (micropore-making), bonding the first layer 103 and the second layer, separating the second substrate 104 and the second layer of the second member from each other at the porous layer for layer separation in the second member, to form a laminated structure on the first substrate 101, forming a refraction index distribution pattern produced by a difference in refraction index in the plane of at least one of the first layer 103 and the second layer.
摘要翻译：一种光学元件的制造方法包括：通过外延生长和制孔（微孔制造）中的至少一种，制备第一部件，该第一部件在第一基板101的表面上形成第一层103，第二部件具有多孔在第二基板104上形成的用于层间分离的层，并且通过外延生长和制孔（微孔制造）中的至少一个在其上形成第二层，将第一层103和第二层接合，分离第二基板104和所述第二构件的第二层在所述第二构件中用于层分离的多孔层处彼此形成，以在所述第一基板101上形成层压结构，形成折射率分布图案，所述折射率分布图案由第一层103和第二层中的至少一个。

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