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    • 1. 发明申请
    • CUTTING TOOL FOR SIMULTANEOUS FACING AND GROOVING OF CMP PAD
    • 切割工具同时进行和铺设CMP垫
    • WO2005087416A1
    • 2005-09-22
    • PCT/US2005/007019
    • 2005-03-03
    • MIPOX INTERNATIONAL CORPORATIONKODAKA, IchiroNAGAMINE, TakuyaKOBAYASHI, Toshihiro
    • KODAKA, IchiroNAGAMINE, TakuyaKOBAYASHI, Toshihiro
    • B23B27/06
    • B23B27/06Y10T407/23Y10T409/502624Y10T409/50328
    • A cutting tool for simultaneously carrying out a facing operation and a grooving operation on a target surface has a facing part and a grooving part that protrudes from and may be integrally formed with the facing part. The facing part has a facing surface for carrying out the facing operation and the grooving part has a grooving surface and is for cutting a groove of a specified depth and width on the target surface simultaneously as the cutting tool is moved in a specified forward direction parallel to the target surface. The dimensions of the facing and grooving parts, the roughness of their surfaces, the angles of their cutting edges and the sloping angles of the facing and grooving surfaces with respect to the forward direction are each required to be within a specified range. Where the grooving part protrudes from the facing part, the corners at which the facing surface joins the side surfaces of the grooving part are formed such that each corner has a beveled surface portion.
    • 用于在目标表面上同时进行面对操作和切槽操作的切削工具具有面对部分和从相对部分突出并与之形成一体的切槽部分。 面对部分具有用于进行面对操作的面对表面,并且切槽部分具有开槽表面,并且当切割工具沿着指定的正向平行移动时同时切割目标表面上指定深度和宽度的凹槽 到目标表面。 面向和切槽部分的尺寸,其表面的粗糙度,其切削刃的角度以及相对于向前方向的面对和切槽表面的倾斜角度均需要在特定范围内。 在切槽部从面对部突出的情况下,形成面对面与切槽部的侧面接合的角部,使得各角部具有斜面部。