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    • 4. 发明申请
    • Electrically erasable programmable read only memory (EEPROM) cell and method for making the same
    • 电可擦除可编程只读存储器(EEPROM)单元及其制作方法
    • US20060284243A1
    • 2006-12-21
    • US11146777
    • 2005-06-06
    • Tzu-Hsuan HsuYen-Hao ShihMing-Hsiu Lee
    • Tzu-Hsuan HsuYen-Hao ShihMing-Hsiu Lee
    • H01L29/792
    • H01L29/7885H01L29/7887H01L29/7923Y10S257/90
    • An asymmetrically doped memory cell has first and second N+ doped junctions on a P substrate. A composite charge trapping layer is disposed over the P substrate and between the first and the second N+ doped junctions. A N− doped region is positioned adjacent to the first N+ doped junction and under the composite charge trapping layer. A P− doped region is positioned adjacent to the second N+ doped junction and under the composite charge trapping layer. The asymmetrically doped memory cell will store charges at the end of the composite charge trapping layer that is above the P− doped region. The asymmetrically doped memory cell can function as an electrically erasable programmable read only memory cell, and is capable of multiple level cell operations. A method for making an asymmetrically doped memory cell is also described.
    • 不对称掺杂的存储单元在P衬底上具有第一和第二N +掺杂结。 复合电荷捕获层设置在P衬底上并且在第一和第二N +掺杂结之间。 N掺杂区域邻近第一N +掺杂结并位于复合电荷俘获层下方。 P-掺杂区域邻近第二N +掺杂结并位于复合电荷俘获层下方。 非对称掺杂的存储单元将在复合电荷捕获层的末端在P掺杂区域之上存储电荷。 非对称掺杂的存储单元可以用作电可擦除可编程只读存储器单元,并且能够进行多级单元操作。 还描述了制造非对称掺杂的存储单元的方法。