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1. 发明申请

US20080125016A1 Method for Producing Polishing Agent, Polishing Agent Produced Thereby and Method for Producing Silicon Wafer 审中-公开
标题翻译：生产抛光剂的方法，由此生产的抛光剂和生产硅晶片的方法
公开(公告)号：US20080125016A1
公开(公告)日：2008-05-29
申请号：US11791837
申请日：2005-11-25
申请人： Mikio Nakamura , Takahiro Kida , Tomofumi Takano , Toshihiko Imai , Masaaki Ohshima
发明人： Mikio Nakamura , Takahiro Kida , Tomofumi Takano , Toshihiko Imai , Masaaki Ohshima
IPC分类号： B24B1/00 , B24D3/00
CPC分类号： C09K3/1463 , B24B37/044 , C09G1/02
摘要： The present invention is a method for producing a polishing agent in which silica particles are dispersed in an aqueous solution, comprising at least a step of removing metal compound ions from a prepared silica sol by ion exchange (B); a step of purifying further the ion-exchanged silica sol (D); a step of adding alkali metal hydroxide to the purified silica sol (F); and a step of adding an acid to the silica sol to which the alkali metal hydroxide is added (G). There is provided a method for producing a polishing agent which can extremely effectively suppress metal contamination when a silicon wafer or the like is polished can be produced.
摘要翻译：本发明是一种生产抛光剂的方法，其中二氧化硅颗粒分散在水溶液中，其至少包括通过离子交换（B）从制备的二氧化硅溶胶中除去金属化合物离子的步骤; 进一步纯化离子交换硅溶胶（D）的步骤; 向纯化的硅溶胶（F）中加入碱金属氢氧化物的步骤; 以及向添加有碱金属氢氧化物的硅溶胶中添加酸的工序（G）。提供了可以制造抛光剂的方法，其可以在制造硅晶片等被抛光时极其有效地抑制金属污染。

2. 发明授权

US08542511B2 Single-phase voltage source AC/DC converter and interconnection system 有权
标题翻译：单相电压源AC / DC转换器和互连系统
公开(公告)号：US08542511B2
公开(公告)日：2013-09-24
申请号：US13330222
申请日：2011-12-19
申请人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao
发明人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao
IPC分类号： H02M7/04 , H02M7/68 , H02M5/42
CPC分类号： H02M7/217 , H02J3/40 , H02J3/46 , H02M7/1626 , H02M7/219 , Y10T307/25
摘要： A single-phase voltage source AC/DC converter according to the present invention generates a second axis voltage command from difference between a DC voltage detection value at a DC terminal and a DC voltage command value and controls a DC voltage by increasing and decreasing active power with the second axis voltage command. For example, the voltage at the DC terminal is increased by decreasing active power when the DC voltage detection value at the DC terminal is lower than the DC voltage command, while the DC voltage detection value at the DC terminal is decreased by increasing the active power when the DC voltage detection value at the DC terminal is higher than the DC voltage command.
摘要翻译：根据本发明的单相电压源AC / DC转换器根据DC端子的直流电压检测值与直流电压指令值之间的差产生第二轴电压指令，并通过增加和减小有功功率来控制直流电压与第二轴电压指令。例如，当DC端子的直流电压检测值低于直流电压指令时，通过降低有功功率来增加直流端子处的电压，同时通过增加有功功率来减小直流端子处的直流电压检测值当DC端子处的直流电压检测值高于直流电压指令时。

3. 发明授权

US07889527B2 Electrical power source, operational method of the same, inverter and operational method of the same 有权
标题翻译：电源，操作方法相同，变频器及其操作方法相同
公开(公告)号：US07889527B2
公开(公告)日：2011-02-15
申请号：US12550028
申请日：2009-08-28
申请人： Masaaki Ohshima , Shuuichi Ushiki , Jirou Fukui
发明人： Masaaki Ohshima , Shuuichi Ushiki , Jirou Fukui
IPC分类号： H02M7/493 , H02M7/53
CPC分类号： H02M7/53871 , H02M7/493
摘要： An electric power source in which a plurality of inverters operate on the same frequency and the plurality of inverters are connected in parallel so that a resistance value expressed by (1−β·G)/(α·G) where α is the output voltage feedback gain, β is the output current feed forward gain, and G is the inverter current gain, is made to be the equivalent output impedance; and is an electrical power source in which the cross-current between the inverters are made to be an acceptable value or below by adjusting the output of each of the inverters by controlling the equivalent output impedance by modifying both or either one of the output voltage feedback gain α or the output current feed forward gain β.
摘要翻译：其中多个逆变器在相同频率上操作并且多个反相器并联连接的电源，使得由（1-＆bgr·G）/（α·G）表示的电阻值，其中α是输出电压反馈增益是输出电流前馈增益，G为逆变器电流增益，为等效输出阻抗; 并且是通过通过通过修改输出电压反馈中的两个或任一个来控制等效输出阻抗来使逆变器之间的交叉电流变为可接受值或更低的电源，通过调节每个逆变器的输出增益α或输出电流前馈增益＆bgr。

4. 发明申请

US20080115423A1 Polishing Composition For Silicon Wafer 审中-公开
标题翻译：硅片抛光组合物
公开(公告)号：US20080115423A1
公开(公告)日：2008-05-22
申请号：US11662804
申请日：2005-10-27
申请人： Yoshiyuki Kashima , Masaaki Ohshima , Eiichirou Ishimizu , Naohiko Suemura
发明人： Yoshiyuki Kashima , Masaaki Ohshima , Eiichirou Ishimizu , Naohiko Suemura
IPC分类号： C09K3/14
CPC分类号： H01L21/02024 , C09G1/02
摘要： The present invention relates to a polishing composition for silicon wafer comprising silica; a basic compound; at least one compound selected from the group consisting of amino acid derivatives represented by formula (1) wherein R1, R2 and R3 are identical or different one another, C1-12alkylene group that may be substituted by hydroxyl group, carboxyl group, phenyl group or amino group, and formula (2) wherein R4 and R5 are identical or different each other, hydrogen atom, or C1-12alkyl group that may be substituted by hydroxyl group, carboxyl group, phenyl group or amino group, with a proviso that both R4 and R5 are not hydrogen at the same time, and R6 is C1-12alkylene group that may be substituted by hydroxyl group, carboxyl group, phenyl group or amino group, and the salts of the amino acid derivatives; and water. The polishing composition can prevent metal contamination, particularly copper contamination in polishing of silicon wafer.
摘要翻译：本发明涉及包含二氧化硅的硅晶片抛光组合物; 一个基本的化合物; 选自由式（1）表示的氨基酸衍生物中的至少一种化合物，其中R 1，R 2和R 3是可以被羟基，羧基，苯基或氨基取代的C 1-12亚烷基，以及式（2）中R 1，R 2， >和R 5相同或不同，可以被羟基，羧基，苯基或氨基取代的氢原子或C 1-12烷基基团，条件是R 4和R 5都不同时为氢，R 6为C 1 可以被羟基，羧基，苯基或氨基取代的-12个亚烷基，以及氨基酸衍生物的盐; 和水。抛光组合物可以防止金属污染，特别是硅晶片抛光中的铜污染。

5. 发明授权

US08503206B2 Single-phase voltage source DC-AC power converter and three-phase voltage source DC-AC power converter 有权
标题翻译：单相电压源DC-AC电源转换器和三相电压源DC-AC电源转换器
公开(公告)号：US08503206B2
公开(公告)日：2013-08-06
申请号：US12695836
申请日：2010-01-28
申请人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao , Hirokazu Shimizu
发明人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao , Hirokazu Shimizu
IPC分类号： H02M7/5387
CPC分类号： H02M7/5395 , H02M7/53871
摘要： The present invention is a single-phase voltage source DC-AC power converter and a three-phase voltage source DC-AC power converter. Each of the single-phase voltage source DC-AC power converter and the three-phase voltage source DC-AC power converter includes a voltage source DC-AC power converting circuit that converts power from a DC voltage source into AC power to output the AC power from an AC terminal; and target current producing means that includes a filter voltage command device and a voltage controller, the filter voltage command device generating a filter voltage command value that becomes a reference of the AC power output from the AC terminal, the AC output voltage at the AC terminal being input as an input signal to the voltage controller, the voltage controller integrating a difference between the filter voltage command value from the filter voltage command device and the AC output voltage at the AC terminal, the target current producing means outputting a PWM command such that a DC component included in the AC output voltage at the AC terminal becomes zero.
摘要翻译：本发明是单相电压源DC-AC电力转换器和三相电压源DC-AC电力转换器。每个单相电压源DC-AC电力转换器和三相电压源DC-AC电力转换器包括电压源DC-AC电力转换电路，其将来自DC电压源的电力转换为AC电力以输出AC 交流电源的电源; 以及包括滤波器电压指令装置和电压控制器的目标电流产生装置，所述滤波器电压指令装置产生成为从AC端子输出的AC电力的基准的滤波器电压指令值，AC端子处的AC输出电压作为输入信号输入到电压控制器，电压控制器将来自滤波器电压指令装置的滤波器电压指令值之间的差异与AC端子处的AC输出电压进行积分，目标电流产生装置输出PWM命令，使得交流端子的交流输出电压中包含的直流成分为零。

6. 发明申请

US20110182091A1 SYNCHRONIZATION DETECTING CIRCUIT AND AUTOMATIC SYNCHRONOUS PARALLELIZATION APPARATUS 有权
标题翻译：同步检测电路和自动同步并联装置
公开(公告)号：US20110182091A1
公开(公告)日：2011-07-28
申请号：US13006636
申请日：2011-01-14
申请人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao
发明人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao
IPC分类号： H02M1/36
CPC分类号： H02J3/42
摘要： An automatic synchronous parallelization apparatus capable of suppressing an inrush current by automatically adjusting the magnitude, the frequency, and the phase of the voltage when a single-phase voltage-type DC-to-AC converting device performing an autonomous parallel operation is connected in parallel with an external single-phase AC voltage source. The automatic synchronous parallelization apparatus includes a synchronization detecting circuit, a voltage amplitude command value generating circuit, and a frequency command value generating circuit. The voltage amplitude command value generating circuit generates the 1st-axis voltage command value, and the frequency command value generating circuit generates the 2nd-axis voltage command value, based on a value relating to a frequency difference between an external single-phase AC voltage source and a single-phase voltage-type DC-to-AC converting device and an effective value of a voltage of the external single-phase AC voltage source that are detected by synchronization detecting circuit. By using such command values, an output of the single-phase voltage-type DC-to-AC converting device can be adjusted to as to coincide with a voltage waveform of the external single-phase AC voltage source.
摘要翻译：一种自动同步并联装置，其能够通过在并行地连接进行自主并联运算的单相电压型DC-AC变换装置时自动调整电压的大小，频率和相位来抑制浪涌电流具有外部单相交流电压源。自动同步并行化装置包括同步检测电路，电压振幅指令值产生电路和频率指令值产生电路。电压幅度指令值产生电路产生第一轴电压指令值，并且频率指令值产生电路根据与外部单相交流电压源之间的频率差有关的值产生第二轴电压指令值以及由同步检测电路检测的单相电压型DC-AC转换装置和外部单相AC电压源的电压的有效值。通过使用这样的指令值，可以将单相电压型DC-AC转换装置的输出调整为与外部单相交流电压源的电压波形一致。

7. 发明申请

US20090127501A1 Polishing Composition for Silicon Wafer 审中-公开
标题翻译：硅晶片抛光组合物
公开(公告)号：US20090127501A1
公开(公告)日：2009-05-21
申请号：US11918253
申请日：2006-05-17
申请人： Yoshiyuki Kashima , Masaaki Ohshima , Eiichirou Ishimizu , Naohiko Suemura
发明人： Yoshiyuki Kashima , Masaaki Ohshima , Eiichirou Ishimizu , Naohiko Suemura
IPC分类号： C09K13/02 , C09K13/00
CPC分类号： C09K3/1463 , C09G1/02 , H01L21/02024
摘要： The present invention relates to a polishing composition for silicon wafer comprising silica, a basic compound, a polyaminopolycarboxylic acid compound having hydroxy group, and water. The polishing composition can prevent metal contamination by nickel, chromium, iron, copper or the like, particularly copper contamination in polishing of silicon wafer.
摘要翻译：本发明涉及包含二氧化硅，碱性化合物，具有羟基的多氨基多羧酸化合物和水的硅晶片抛光组合物。抛光组合物可以防止镍，铬，铁，铜等的金属污染，特别是硅晶片的抛光中的铜污染。

8. 发明申请

US20060245221A1 Electrical power source, operational method of the same, inverter and operational method of the same 有权
标题翻译：电源，操作方法相同，变频器及其操作方法相同
公开(公告)号：US20060245221A1
公开(公告)日：2006-11-02
申请号：US11414662
申请日：2006-04-27
申请人： Masaaki Ohshima , Shuuichi Ushiki , Jirou Fukui
发明人： Masaaki Ohshima , Shuuichi Ushiki , Jirou Fukui
IPC分类号： H02M7/537
CPC分类号： H02M7/53871 , H02M7/493
摘要： The objective of the present invention is to provide a power source and operational method in which a plurality of inverters are connected in parallel with the ability to suppress the crosscurrent with a very simple means. The present invention is an electric power source in which a plurality of inverted operate on the same frequency and the plurality of inverters are connected in parallel so that a resistance value expressed by (1−β·G)/(α·G) here α is the output voltage feedback gain, β is the output current feed forward gain, and G is the inverter current gain, is made to be the equivalent output impedance; and is an electrical power source in which the cross-current between the inverters are made to be an acceptable value or below by adjusting the output of each of the inverters by controlling the equivalent output impedance by modifying both or either one of the output voltage feedback gain α or the output current feed forward gain β.
摘要翻译：本发明的目的是提供一种电源和操作方法，其中多个逆变器以与非常简单的手段抑制交叉电流的能力并联连接。本发明是一种电源，其中多个反相工作在同一频率上，多个反相器并联连接，使得由（1-beta.G）/（alpha.G）表示的电阻值为α 是输出电压反馈增益，β为输出电流前馈增益，G为逆变器电流增益，为等效输出阻抗; 并且是通过通过通过修改输出电压反馈中的两个或任一个来控制等效输出阻抗来使逆变器之间的交叉电流变为可接受值或更低的电源，通过调节每个逆变器的输出增益α或输出电流前馈增益β。

9. 发明授权

US08553436B2 Synchronization detecting circuit and automatic synchronous parallelization apparatus 有权
标题翻译：同步检测电路和自动同步并联装置
公开(公告)号：US08553436B2
公开(公告)日：2013-10-08
申请号：US13006636
申请日：2011-01-14
申请人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao
发明人： Masaaki Ohshima , Shuichi Ushiki , Jinbin Zhao
IPC分类号： H02M7/5395
CPC分类号： H02J3/42
摘要： An automatic synchronous parallelization apparatus capable of suppressing an inrush current by automatically adjusting the magnitude, the frequency, and the phase of the voltage when a single-phase voltage-type DC-to-AC converting device performing an autonomous parallel operation is connected in parallel with an external single-phase AC voltage source. The automatic synchronous parallelization apparatus includes a synchronization detecting circuit, a voltage amplitude command value generating circuit, and a frequency command value generating circuit. The voltage amplitude command value generating circuit generates the 1st-axis voltage command value, and the frequency command value generating circuit generates the 2nd-axis voltage command value, based on a value relating to a frequency difference between an external single-phase AC voltage source and a single-phase voltage-type DC-to-AC converting device and an effective value of a voltage of the external single-phase AC voltage source that are detected by synchronization detecting circuit. By using such command values, an output of the single-phase voltage-type DC-to-AC converting device can be adjusted to as to coincide with a voltage waveform of the external single-phase AC voltage source.
摘要翻译：一种自动同步并联装置，其能够通过在并行地连接进行自主并联运算的单相电压型DC-AC变换装置时自动调整电压的大小，频率和相位来抑制浪涌电流具有外部单相交流电压源。自动同步并行化装置包括同步检测电路，电压振幅指令值产生电路和频率指令值产生电路。电压幅度指令值产生电路产生第一轴电压指令值，并且频率指令值产生电路根据与外部单相交流电压源之间的频率差有关的值产生第二轴电压指令值以及由同步检测电路检测的单相电压型DC-AC转换装置和外部单相AC电压源的电压的有效值。通过使用这样的指令值，可以将单相电压型DC-AC转换装置的输出调整为与外部单相交流电压源的电压波形一致。

10. 发明授权

US07495936B2 Three-phase voltage-fed AC/DC converter 有权
标题翻译：三相电压AC / DC转换器
公开(公告)号：US07495936B2
公开(公告)日：2009-02-24
申请号：US11679475
申请日：2007-02-27
申请人： Masaaki Ohshima , Hirokazu Shimizu , Shuichi Ushiki , Jirou Fukui
发明人： Masaaki Ohshima , Hirokazu Shimizu , Shuichi Ushiki , Jirou Fukui
IPC分类号： H03J3/00 , H02M5/40
CPC分类号： H02M7/219 , H02M1/126
摘要： A three-phase voltage-fed AC/DC converter includes a conversion circuit which converts power from a DC voltage source to three-phase AC power. The converter further includes a UM conversion circuit which carries out dq conversion of the three-phase output voltage, a superior voltage control circuit which outputs a voltage reference vector based on a superior reference vector and an output voltage vector obtained by the UM conversion circuit, an inferior voltage control circuit which outputs a PWM reference based on the voltage reference vector and the output voltage vector, and a frequency control circuit which synchronizes a value generated based on a q-axis component from the UM conversion circuit with a rotation angle of a conversion matrix in the UM conversion circuit.
摘要翻译：三相电压AC / DC转换器包括将来自直流电压源的功率转换成三相交流电的转换电路。转换器还包括执行三相输出电压的dq转换的UM转换电路，输出基于优越参考矢量的电压参考矢量的优良电压控制电路和由UM转换电路获得的输出电压矢量，基于电压参考矢量和输出电压矢量输出PWM参考的劣质电压控制电路，以及频率控制电路，其将基于来自UM转换电路的q轴分量产生的值与转换矩阵在UM转换电路中。

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