会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Fabri-perot spectroscopy method and apparatus utilizing the same
    • Fabri-perot光谱法和利用该法的装置
    • US4850709A
    • 1989-07-25
    • US19665
    • 1987-02-27
    • Mikichi BanOsamu KakuchiHironori YamamotoMasaru OhtsukaOsamu ShibaKazuhiko Hara
    • Mikichi BanOsamu KakuchiHironori YamamotoMasaru OhtsukaOsamu ShibaKazuhiko Hara
    • G01J3/26
    • G01J3/26
    • Fabri-Perot spectroscopy method comprises a step of directing a light beam at a first refraction angle to a first Fabri-Perot interference plate and a step of directing a light beam transmitted through the first Fabri-Perot interference plate to a second Fabri-Perot interference plate at a second refraction angle, and Fabri-Perot spectroscopy apparatus comprises Fabri-Perot interference plates, a control device for changing a spacing between the Fabri-Perot interference plates, a first optical device for directing a light beam to the first Fabri-Perot interference plate at a first refraction angle, a second optical device for directing the light beam transmitted through the Fabri-Perot interference plate at a second refraction angle different from the first refraction angle to the second Fabri-Perot interference plate, and a seal for externally sealing the Fabri-Perot interference plates. Gas for protecting the Fabri-Perot interference plates is filled in the sealed space.
    • Fabri-Pérot光谱法包括将第一折射角的光束引导到第一Fabri-Pérot干涉板的步骤和将透射通过第一Fabri-Pérot干涉板的光束引导到第二Fabri-Pérot干涉 平板以第二折射角,Fabri-Pérot光谱装置包括Fabri-Pérot干涉板,用于改变Fabri-Pérot干涉板之间的间距的控制装置,用于将光束引导到第一Fabri-Pérot的第一光学装置 在第一折射角处的干涉板,用于将透射通过Fabri-Pérot干涉板的光束以不同于第一折射角的第二折射角引导到第二Fabri-Pérot干涉板的第二光学装置,以及用于外部的密封件 密封Fabri-Pérot干涉板。 用于保护Fabri-Pérot干涉板的气体填充在密封空间中。
    • 2. 发明授权
    • Movable stage mechanism
    • 活动舞台机制
    • US4993696A
    • 1991-02-19
    • US125566
    • 1987-11-25
    • Motomu FurukawaMakoto HigomuraMasaru OhtsukaHironori YamamotoShinkichi OhkawaKoichi MatsushitaYasuo KawaiTakao KariyaHaruyuki KusunokiToshihiko Yamaura
    • Motomu FurukawaMakoto HigomuraMasaru OhtsukaHironori YamamotoShinkichi OhkawaKoichi MatsushitaYasuo KawaiTakao KariyaHaruyuki KusunokiToshihiko Yamaura
    • G03F7/20
    • G03F7/70766G03F7/70358G03F7/70716G03F7/70991
    • A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints. The wafer chuck is resiliently supported by one of the air bearing assemblies, such that the wafer chuck can be moved in the vacuum ambience very accurately and without difficulties.
    • 公开了一种用于移动放置在真空环境中并由晶片卡盘保持的半导体晶片的X射线曝光设备中的舞台装置。 在平台装置中,晶片卡盘保持晶片,使得将要传输电路图案的晶片的表面放置在垂直平面中,并且晶片卡盘垂直和水平移动以进行步进和重复曝光 的晶片。 该装置包括引导机构,锁定机构和恒定张力弹簧机构,从而确保晶片卡盘在垂直方向上的高精度移动以及晶片的高精度定位。 此外,在平台装置中,在真空环境中设置产生移动晶片卡盘的驱动器的驱动源,而另一方面,向空气轴承组件供应工作流体,用于引导晶片卡盘的运动, 通过使用通过旋转接头联接的金属管实现。 晶片卡盘由空气轴承组件中的一个弹性地支撑,使得晶片卡盘可以非常准确且无困难地在真空环境中移动。
    • 5. 发明授权
    • Two-frequency distance and displacement measuring interferometer
    • 双频距离和位移测量干扰仪
    • US5106191A
    • 1992-04-21
    • US533518
    • 1990-06-05
    • Masaru Ohtsuka
    • Masaru Ohtsuka
    • G01B9/02
    • G01B9/02007G01B9/02003G01B9/02069G01B2290/45G01B2290/70
    • Semiconductor-laser length measuring apparatus includes first and second semiconductor lasers that oscillate in different wavelength regions. A frequency modulator modulates the oscillation frequency of the first semiconductor laser and a light beam splitter divides the first and second light beams output from the first and second semiconductor lasers into third, fourth, fifth and sixth light beams which are projected onto and are reflected from an object to be measured. The phase difference between the third and fourth light beams and the phase difference between the fifth and sixth light beams are detected and the difference in optical paths between the divided light beams is obtained according to the detection result. Incremental measurements are performed by obtaining the optical path difference between the divided laser light beams, for example, a difference between a beat signal produced from interference between the third and fourth laser light beams or from interference between the fifth and sixth laser light beams and an oscillation frequency driving the first and second modulators. The apparatus may be arranged to switch to incremental measurement after a measurement of the absolute optical path difference.
    • 6. 发明授权
    • Apparatus and method for measuring a shape using multiple probes
    • 使用多个探针测量形状的装置和方法
    • US06701633B2
    • 2004-03-09
    • US10086399
    • 2002-02-28
    • Masaru Ohtsuka
    • Masaru Ohtsuka
    • G01B5207
    • G01B11/007G01B5/207G01B11/005G01B11/245Y10S33/02
    • There is provided a shape measuring apparatus which defines an XYZ-axis coordinate and measures a surface shape of an object, the apparatus including a plurality of probes arranged in a Y-axis direction, the probes contacting a surface of the object, and moving in a Z-axis direction according to the surface shape of the object, a probe holder for holding each of the plurality of probes movable in the Z-axis direction, a moving mechanism for moving the probe holding mechanism in an X-axis direction relative to the object, first and second measuring instruments for measuring positions of each probe in the X-axis and Y-axis directions, a third measuring instrument for measuring a position of each probe in the Z-axis direction; and a computing unit for calculating the surface shape of the object based on measuring results from the first, second, and third measuring instruments.
    • 提供了一种形状测量装置,其定义XYZ轴坐标并测量物体的表面形状,该装置包括沿Y轴方向布置的多个探针,探针接触物体的表面,并移动到 根据物体的表面形状的Z轴方向,用于保持能够沿Z轴方向移动的多个探针的探针保持器,用于使探针保持机构沿X轴方向相对移动的移动机构, 用于测量每个探针在X轴和Y轴方向上的位置的第一和第二测量仪器,用于测量每个探针在Z轴方向上的位置的第三测量仪器; 以及基于来自第一,第二和第三测量仪器的测量结果来计算物体的表面形状的计算单元。
    • 8. 发明授权
    • Image forming apparatus, image forming system, and computer-readable recording medium having program
    • 图像形成装置,图像形成系统和具有程序的计算机可读记录介质
    • US08724124B2
    • 2014-05-13
    • US13552363
    • 2012-07-18
    • Masaru OhtsukaSusumu Kurihara
    • Masaru OhtsukaSusumu Kurihara
    • G06F15/00G06F3/12G06K1/00
    • G06F3/1217G06F3/121G06F3/1234G06F3/1282G06K15/403G06K15/408
    • An image forming apparatus that sets an output unit configured by a plurality of pages of which the order is determined as one copy and outputs the a plurality of copies of output units as a JOB includes an image forming unit that sequentially forms images corresponding to the plurality of pages on a plurality of sheets, a control unit that performs a calculation process of image eigenvalues based on the images for each of output units, a first storage unit storing a result of the calculation process performed for a reference copy of the output unit that is a specific one copy out of the plurality of copies of the output units, and a second storage unit storing a result of the calculation process performed for a copy of the output unit other than the reference copy out of the plurality of copies of the output units.
    • 一种图像形成装置,其将由所述顺序确定为多个页面的多个页面构成的输出单元设置为一个副本,并输出作为作业的输出单元的多个副本,所述图像形成装置包括顺序地形成与所述多个图像相对应的图像的图像形成单元 多个页面上的页面的控制单元,基于每个输出单元的图像执行图像特征值的计算处理的控制单元,存储针对输出单元的参考副本执行的计算处理的结果的第一存储单元, 是输出单元的多个副本中的特定一个副本,以及第二存储单元,存储对于输出的多个副本中的除了参考副本之外的输出单元的副本执行的计算处理的结果的结果 单位。
    • 9. 发明授权
    • Image forming apparatus and image forming method for displaying a first image while a corresponding second image is being processed
    • 图像形成装置和图像形成方法,用于在处理相应的第二图像的同时显示第一图像
    • US08339655B2
    • 2012-12-25
    • US12486259
    • 2009-06-17
    • Masaru Ohtsuka
    • Masaru Ohtsuka
    • G06K15/00G03G15/00G06F3/048G06F3/14
    • H04N1/00458G03G15/502H04N1/0044H04N1/00466H04N2201/0094
    • Disclosed is an image forming apparatus including: a display section for executing display based on image data including a plurality of images; a first image processing section for generating first images respectively corresponding to the images included in the image data, to which an image process based on information of a job is not executed; a second image processing section for generating a second image obtained by executing the image process based on the information of the job to the image data of the first image currently displayed in the display section; and a control section for causing the display section to display the first image corresponding to the image data to which the job is set and to switch the currently displayed first image to the corresponding second image after completing a generation of the second image by the second image processing section.
    • 公开了一种图像形成装置,包括:显示部分,用于基于包括多个图像的图像数据执行显示; 第一图像处理部分,用于产生分别对应于图像数据中包括的图像的第一图像,基于作业的信息不进行图像处理; 第二图像处理部分,用于生成通过基于作业的信息对当前显示在显示部分中的第一图像的图像数据执行图像处理而获得的第二图像; 以及控制部分,用于使得所述显示部分显示与所述作业被设置的所述图像数据相对应的所述第一图像,并且在通过所述第二图像完成所述第二图像的生成之后将当前显示的第一图像切换到对应的第二图像 处理部分。