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1. 发明授权

US07830068B2 Actuator and electronic hardware using the same 失效
标题翻译：执行器和电子硬件使用相同
公开(公告)号：US07830068B2
公开(公告)日：2010-11-09
申请号：US12354182
申请日：2009-01-15
申请人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , B81B3/0021 , B81B2201/032 , H01G5/18 , H01H2057/006 , H01L41/094 , H01L41/0973
摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.
摘要翻译：致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

2. 发明授权

US07770274B2 Piezoelectric thin film device and method for manufacturing the same 失效
标题翻译：压电薄膜器件及其制造方法
公开(公告)号：US07770274B2
公开(公告)日：2010-08-10
申请号：US11946910
申请日：2007-11-29
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H04R17/00
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译：压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。

3. 发明授权

US07732990B2 Piezoelectric driven MEMS device 失效
标题翻译：压电式MEMS器件
公开(公告)号：US07732990B2
公开(公告)日：2010-06-08
申请号：US11683755
申请日：2007-03-08
申请人： Michihiko Nishigaki , Toshihiko Nagano , Takashi Miyazaki , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Takashi Miyazaki , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/094
摘要： A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.
摘要翻译： MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作，第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

4. 发明申请

US20080072408A1 PIEZOELECTRIC THIN FILM DEVICE AND METHOD FOR MANUFACTURING THE SAME 失效
标题翻译：压电薄膜装置及其制造方法
公开(公告)号：US20080072408A1
公开(公告)日：2008-03-27
申请号：US11946910
申请日：2007-11-29
申请人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01L41/22 , H04R31/00 , H05K3/10
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译：压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。

5. 发明申请

US20090189487A1 ACTUATOR AND ELECTRONIC HARDWARE USING THE SAME 失效
标题翻译：使用其的执行器和电子硬件
公开(公告)号：US20090189487A1
公开(公告)日：2009-07-30
申请号：US12354182
申请日：2009-01-15
申请人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H02N2/00
CPC分类号： H01H57/00 , B81B3/0021 , B81B2201/032 , H01G5/18 , H01H2057/006 , H01L41/094 , H01L41/0973
摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.
摘要翻译：致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

6. 发明授权

US07420320B2 Piezoelectric thin film device and method for manufacturing the same 有权
标题翻译：压电薄膜器件及其制造方法
公开(公告)号：US07420320B2
公开(公告)日：2008-09-02
申请号：US11946913
申请日：2007-11-29
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01H47/00 , H01H51/22 , H01L41/04
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译：压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。

7. 发明申请

US20070228887A1 PIEZOELECTRIC DRIVEN MEMS DEVICE 失效
标题翻译：压电驱动MEMS器件
公开(公告)号：US20070228887A1
公开(公告)日：2007-10-04
申请号：US11683755
申请日：2007-03-08
申请人： Michihiko Nishigaki , Toshihiko Nagano , Takashi Miyazaki , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Takashi Miyazaki , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H01L41/00
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/094
摘要： A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.
摘要翻译： MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作，第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

8. 发明授权

US07463117B2 Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR 失效
标题翻译：薄膜体声波谐振器（FBAR），FBAR实现的滤波器和FBAR制造方法
公开(公告)号：US07463117B2
公开(公告)日：2008-12-09
申请号：US11169645
申请日：2005-06-30
申请人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
发明人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
IPC分类号： H03H9/13 , H03H9/15 , H03H9/54
CPC分类号： H03H9/02094 , H03H3/04 , H03H9/02133 , H03H9/173 , H03H9/174 , H03H9/703 , H03H2003/021 , H03H2003/023
摘要： A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.
摘要翻译：薄膜体声波谐振器包括具有空腔的基板; 部分地固定在基板上的底部电极，底部电极的一部分机械地悬挂在空腔上方; 设置在底部电极上的压电层; 以及设置在压电体层上的顶电极，其具有沿着压电体层的厚度方向取向的晶轴，所述晶轴的取向分布的半峰全宽小于或等于约6度。

9. 发明授权

US07323805B2 Piezoelectric thin film device and method for manufacturing the same 失效
公开(公告)号：US07323805B2
公开(公告)日：2008-01-29
申请号：US11043257
申请日：2005-01-27
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01L41/047
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

10. 发明授权

US08189319B2 MEMS variable capacitor having a piezoelectric actuation mechanism based on a piezoelectric thin film 失效
标题翻译：具有基于压电薄膜的压电致动机构的MEMS可变电容器
公开(公告)号：US08189319B2
公开(公告)日：2012-05-29
申请号：US12400815
申请日：2009-03-10
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Kazuhiko Itaya
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Kazuhiko Itaya
IPC分类号： H01G5/16 , H01G7/00
CPC分类号： H01G5/16 , H01G5/18 , H01H2057/006
摘要： A MEMS variable capacitor includes: a first connection beam having one end fixed to a substrate; a first actuation beam connected to the first connection beam; a second actuation beam connected to the first actuation beam and extending in a reverse direction; a second connection beam having one end fixed to the substrate; a third actuation beam connected to the second connection beam; a fourth actuation beam connected to the third actuation beam and extending in a reverse direction; a movable electrode provided between the second and fourth actuation beams; and a fixed electrode provided on the substrate opposed to the movable electrode. The first to fourth actuation beams have a piezoelectric film sandwiched between a lower electrode and an upper electrode, the first and third actuation beams are placed on a line, the second and fourth actuation beams are placed on a line, and the first and second actuation beams and the third and fourth actuation beams are placed symmetrically about a line.
摘要翻译： MEMS可变电容器包括：第一连接梁，其一端固定到基板; 连接到第一连接梁的第一致动梁; 连接到第一致动光束并沿相反方向延伸的第二致动光束; 第二连接梁，其一端固定到所述基板; 连接到第二连接梁的第三致动梁; 连接到第三致动光束并沿相反方向延伸的第四致动光束; 设置在所述第二和第四致动光束之间的可动电极; 以及设置在与可动电极相对的基板上的固定电极。第一至第四致动光束具有夹在下电极和上电极之间的压电膜，第一和第三致动光束被放置在一条线上，第二和第四致动光束被放置在一条线上，并且第一和第二致动梁和第三和第四致动梁围绕线对称放置。

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