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    • 1. 发明申请
    • Spectroscopic analysis apparatus and method with excitation system and focus monitoring system
    • 光谱分析装置及方法与激励系统和焦点监测系统
    • US20060258942A1
    • 2006-11-16
    • US10547971
    • 2004-03-01
    • Michael Van BeekPeter Greve
    • Michael Van BeekPeter Greve
    • A61B6/00A61B5/00
    • A61B5/0059A61B5/0068G01J3/44G01N21/65G02B21/241
    • The present invention relates to an analysis apparatus, in particular a spectroscopic analysis apparatus, for analyzing an object, such as blood of a patient, and a corresponding analysis method. To aim the confocal detection volume inside a blood vessel orthogonal polarized spectral imaging (OPSI) is used to locate blood capillaries in the skin. An imaging system (img) with slightly shifted imaging planes (i1, i2) for OPS imaging of blood vessels is proposed to provide auto-focusing. The confocal Raman detection plane (dp) is located in between these two imaging planes (i1, i2). Based on measured amount of defocus for the imaging planes (i1, i2), the focusing of the imaging system (img), the excitation system (exs) for exciting the target region and the detection system (dsy) are adjusted such that the difference of the amount of defocus equals a predetermined amount so that the confocal detection plane (dp) is located inside the blood vessel (V). Thus, continuous auto-focusing with high accuracy can be achieved. The invention relates also to an optical tracking system for continuously tracking a point of a moving object (obj).
    • 本发明涉及用于分析患者血液等物体的分析装置,特别是光谱分析装置以及相应的分析方法。 为了瞄准血管内的共焦检测体积,使用正交偏振光谱成像(OPSI)来定位皮肤中的毛细血管。 提出了一种具有稍微偏移的成像平面(i 1,i 2)用于血管的OPS成像的成像系统(img),以提供自动聚焦。 共焦拉曼检测平面(dp)位于这两个成像平面(i 1,i 2)之间。 基于测量的成像平面(i 1,i 2)的散焦量,调整成像系统(img)的聚焦,用于激发目标区域的激发系统(exs)和检测系统(dsy),使得 散焦量的差别等于预定量,使得共焦检测平面(dp)位于血管(V)内。 因此,可以实现高精度的连续自动聚焦。 本发明还涉及用于连续跟踪移动物体(obj)的点的光学跟踪系统。
    • 4. 发明申请
    • Lithographic apparatus and device manufacturing method
    • 平版印刷设备和器件制造方法
    • US20060215132A1
    • 2006-09-28
    • US11373503
    • 2006-03-13
    • Mark KroonMichael Van BeekPeter DirksenRalph KurtCassandra Owen
    • Mark KroonMichael Van BeekPeter DirksenRalph KurtCassandra Owen
    • G03B27/52
    • G03F7/70983G03F7/70808G03F7/70916G03F7/70933
    • A lithographic apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The projection system includes an optical element that has a beam exit area through each of which the patterned beam passes. The apparatus further includes a fluid cleaning system that cleans a fluid to be introduced into a region in between the optical element and the substrate. The fluid cleaning system includes a fluid inlet, a fluid outlet, and a cleaning zone disposed between the inlet and outlet. The cleaning zone includes a nucleated surface provided with a plurality of nucleation sites.
    • 光刻设备包括提供辐射束的辐射系统和支撑图案化结构的支撑结构。 图形结构被配置为根据期望的图案对辐射束进行图案化。 该装置还包括支撑基板的基板支撑件和将图案化的光束投影到基板的目标部分上的投影系统。 投影系统包括光学元件,该光学元件具有通过图案化光束通过的每一个的光束出射区域。 该装置还包括清洁被引入到光学元件和基板之间的区域中的流体的流体清洁系统。 流体清洁系统包括流体入口,流体出口和布置在入口和出口之间的清洁区域。 清洁区包括具有多个成核位点的成核表面。
    • 6. 发明申请
    • Optical Analysis System With Background Signal Compensation
    • 具有背景信号补偿的光学分析系统
    • US20070291251A1
    • 2007-12-20
    • US11574181
    • 2005-08-24
    • Wouter RensenBernardus Leonardus BakkerMichael Van Beek
    • Wouter RensenBernardus Leonardus BakkerMichael Van Beek
    • G01N33/48G01N21/00G06F19/00
    • G01J3/30G01J3/02G01J3/0229G01J3/32G01J3/44
    • The invention provides an optical analysis system for efficient compensation of spectroscopic broadband back-ground, such as spectroscopic fluorescence background or background signals that are due to the dark current of a detector. The optical analysis system effectively provides multivariate optical analysis of a spectroscopic signal. It provides wavelength selective detection of various spectral components that are indicative of a superposition of spectroscopic peaks or bands and their broadband background. Additionally, the optical analysis system is adapted to acquire spectral components that predominantly correspond to the broadband background of the spectroscopic peaks or bands. Wavelength selective selection of various spectral components is performed on the basis of reconfigurable multivariate optical elements or on the basis of a position displacement of a spatial optical transmission mask.
    • 本发明提供了一种用于有效补偿光谱宽带背景的光学分析系统,例如由于检测器的暗电流引起的分光荧光背景或背景信号。 光学分析系统有效地提供了光谱信号的多变量光学分析。 它提供各种光谱分量的波长选择性检测,这些光谱分量指示光谱峰或带的叠加及其宽带背景。 此外,光学分析系统适于获取主要对应于光谱峰或带的宽带背景的光谱分量。 基于可重构多变量光学元件或者基于空间光学透射掩模的位置位移来执行各种光谱分量的波长选择性选择。
    • 8. 发明申请
    • Optical analysis system using multivariate optical elements
    • 光学分析系统采用多元光学元件
    • US20070177240A1
    • 2007-08-02
    • US10596564
    • 2004-12-16
    • Michael Van BeekFrank SchuurmansLevinus Bakker
    • Michael Van BeekFrank SchuurmansLevinus Bakker
    • G02B26/08
    • A61B5/1455A61B5/14532A61B5/14546A61B5/14552G01J3/36G01N21/65G01N33/49
    • The present invention provides an optical analysis system for determining an amplitude of a principal component of an optical signal. The principal component is indicative of the concentration of a particular compound or various compounds of a substance that is subject to spectroscopic analysis. The optical signal is subject to wavelength selective weighting and wavelength selective spatial separation specified by a weighting function. The optical signal is preferably separated into two parts that corresponding to a positive and negative spectral band of the weighting function, respectively. The separation provides separate detection of the separated parts of the optical signal without significant loss of intensity, thereby providing an improved signal to noise ratio of the determined principal component. Separation and weighting of the optical signal is realized by two multivariate optical elements.
    • 本发明提供了一种用于确定光信号的主分量的幅度的光学分析系统。 主要成分指示特定化合物或受光谱分析的物质的各种化合物的浓度。 光信号经受由加权函数指定的波长选择加权和波长选择性空间分离。 光信号优选分为对应于加权函数的正和负光谱带的两部分。 分离提供对光信号的分离部分的单独检测,而没有明显的强度损失,从而提供确定的主要分量的改善的信噪比。 光信号的分离和加权由两个多元光学元件实现。