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1. 发明授权

US5681215A Carrier head design for a chemical mechanical polishing apparatus 失效
标题翻译：用于化学机械抛光设备的载体头设计
公开(公告)号：US5681215A
公开(公告)日：1997-10-28
申请号：US549651
申请日：1995-10-27
申请人： Michael T. Sherwood , Harry Q. Lee , Norm Shendon , Semyon Spektor
发明人： Michael T. Sherwood , Harry Q. Lee , Norm Shendon , Semyon Spektor
IPC分类号： B24B37/30 , B24B37/32 , H01L21/304 , B24B5/02 , B24B29/02
CPC分类号： B24B37/30 , B24B37/32
摘要： A carrier uses multiple bellows to form two pressure chambers between the housing and carrier base and retaining ring assembly. By pressurizing the first chamber, an even load can be applied across the substrate. By pressurizing the second chamber, the retaining ring can pressed against the polishing pad. The bellows allow the carrier base to pivot with respect to the housing, but the downward force is evenly applied to the substrate through the first pressure chamber. Torque is transferred from the carrier housing to the carrier base through the bellows.
摘要翻译：载体使用多个波纹管在壳体和载体基座和保持环组件之间形成两个压力室。通过对第一腔室进行加压，可以跨衬底施加均匀的负载。通过对第二腔室进行加压，保持环可压靠抛光垫。波纹管允许载体基座相对于壳体枢转，但是向下的力通过第一压力室均匀地施加到基板。扭矩通过波纹管从载体壳体转移到载体基座。

2. 发明授权

US06051499A Apparatus and method for distribution of slurry in a chemical mechanical polishing system 失效
标题翻译：用于在化学机械抛光系统中分配浆料的装置和方法
公开(公告)号：US06051499A
公开(公告)日：2000-04-18
申请号：US982823
申请日：1997-12-02
申请人： Robert D. Tolles , William L. Guthrie , Jeffrey Marks , Tsungnan Cheng , Semyon Spektor , Ivan A. Ocanada , Norm Shendon
发明人： Robert D. Tolles , William L. Guthrie , Jeffrey Marks , Tsungnan Cheng , Semyon Spektor , Ivan A. Ocanada , Norm Shendon
IPC分类号： H01L21/304 , B24B37/04 , B24B57/02 , B24B1/00
CPC分类号： B24B37/04 , B24B57/02
摘要： Slurry is provided to the surface of the polishing pad by pumping the slurry up through a central port, or by dripping the slurry down onto the surface of the polishing pad from a slurry feed tube. A slurry wiper, which may have one or more flexible members, sweeps the slurry evenly and thinly across the polishing pad. A control system coordinates the distribution of slurry to the polishing pad with the motion of the carrier head.
摘要翻译：通过将浆料向上泵送通过中心口，或通过从浆料进料管将浆料向下滴落到抛光垫的表面上而将浆料提供到抛光垫的表面。可以具有一个或多个柔性构件的浆料刮水器将抛光浆料均匀且薄薄地扫过抛光垫。控制系统通过载体头的运动来协调浆料与抛光垫的分布。

3. 发明授权

US5709593A Apparatus and method for distribution of slurry in a chemical mechanical polishing system 失效
公开(公告)号：US5709593A
公开(公告)日：1998-01-20
申请号：US549481
申请日：1995-10-27
申请人： William L. Guthrie , Semyon Spektor , Ivan A. Ocanada , Norm Shendon
发明人： William L. Guthrie , Semyon Spektor , Ivan A. Ocanada , Norm Shendon
IPC分类号： H01L21/304 , B24B37/04 , B24B57/02 , B24B5/00
CPC分类号： B24B37/04 , B24B57/02
摘要： Slurry is provided to the surface of the polishing pad by pumping the slurry up through a central port, or by dripping the slurry down onto the surface of the polishing pad from a slurry feed tube. A slurry wiper, which may have one or more flexible members, sweeps the slurry evenly and thinly across the polishing pad. A control system coordinates the distribution of slurry to the polishing pad with the motion of the carrier head.

4. 发明授权

US5029604A Safety core for tire valve 失效
标题翻译：轮胎阀的安全芯
公开(公告)号：US5029604A
公开(公告)日：1991-07-09
申请号：US481954
申请日：1990-02-20
申请人： Semyon Spektor , Mark Gozokhovsky , Ilya Zhabokrug
发明人： Semyon Spektor , Mark Gozokhovsky , Ilya Zhabokrug
IPC分类号： F16K15/20
CPC分类号： F16K15/20 , Y10T137/3646 , Y10T137/7774 , Y10T137/7777 , Y10T137/778
摘要： A safety core (10) for a tire valve comprises a head portion (12) screwed into the valve's housing (28) so that it is sealed against the inner wall of the housing by compressing a seal ring (36) located in an annular groove (34) formed in a tapered portion (32) of the head part. Inserted into the head part is a cylindrical body (14) which contains a ball-type check valve (20). A ball (84) of the valve is constantly pressed to a seat (80) installed on the rear end of an adjustment pipe (16), the latter being screwed into the rear end of the body (14). The rear end protrudes through the head portion (12) and has a stop (58) on its end. A spring (62), located between the stop (58) and the outer end face of the head portion (12), constantly urges the front end of the head portion (12) to a valve seat formed on a shoulder (68) of a large-diameter portion (66) of the cylindrical body. A spring (86), which keeps the check valve normally in a closed state, is adjusted to a predetermined maximum allowable pressure of the tire. When this pressure is exceeded, e.g., because of an extraordinary load, sustained high-speed drawing, or high temperature, the air in the tire opens the check valve and is released through gaps in the safety core.
摘要翻译：用于轮胎阀的安全芯（10）包括拧入阀的壳体（28）中的头部（12），使得其通过压缩位于环形槽（28）中的密封环（36）而密封在壳体的内壁上（34）形成在头部的锥形部分（32）中。插入头部的是包含球形止回阀（20）的圆筒体（14）。阀的球（84）不断地被按压到安装在调节管（16）的后端上的座（80）上，座椅（80）拧入主体（14）的后端。后端突出通过头部（12）并且在其端部具有止动件（58）。位于所述止动件（58）与所述头部（12）的外端面之间的弹簧（62）经常将所述头部（12）的前端推向形成在肩部（68）上的阀座圆柱体的大直径部分（66）。保持止回阀通常处于关闭状态的弹簧（86）被调整到轮胎的预定的最大允许压力。当超过该压力时，例如，由于非常负载，持续的高速拉拔或高温，轮胎中的空气打开止回阀并通过安全芯中的间隙释放。

5. 发明授权

US4794224A Dry film developer for an aperture card printer 失效
标题翻译：用于孔卡打印机的干膜显影剂
公开(公告)号：US4794224A
公开(公告)日：1988-12-27
申请号：US36517
申请日：1987-04-09
申请人： Semyon Spektor , Michael Veprinsky , Michael H. Ranger
发明人： Semyon Spektor , Michael Veprinsky , Michael H. Ranger
IPC分类号： G03D13/00 , H05B3/20
CPC分类号： G03D13/002
摘要： An improved dry film developer for use with a machine of the type that processes aperture cards which developer incorporates a holding mechanism for holding and stretching the aperture card while a heating block having an arcuate projecting surface is urged against the undeveloped dry film, mounted in the aperture card, to slightly stretch the film so as to insure a uniform contact of the undeveloped film with the heating block for a period of time sufficient to develop the film.
摘要翻译：一种改进的干膜显影剂，用于处理孔卡的类型的机器，显影剂结合有用于保持和拉伸孔卡的保持机构，同时具有弓形突出表面的加热块被推靠在未开发的干膜中，安装在光阑卡，以稍微拉伸薄膜，以确保未显影的薄膜与加热块的均匀接触一段足以使薄膜显影的时间。

6. 发明授权

US4777495A Aperture card plotter 失效
标题翻译：光圈卡片绘图机
公开(公告)号：US4777495A
公开(公告)日：1988-10-11
申请号：US042210
申请日：1987-04-24
申请人： Semyon Spektor , Robert J. Grady , Michael H. Ranger , Wilson S. Chinn , Alexander J. McKennon , Samuel D. I. Emerson, III
发明人： Semyon Spektor , Robert J. Grady , Michael H. Ranger , Wilson S. Chinn , Alexander J. McKennon , Samuel D. I. Emerson, III
IPC分类号： B41J2/435 , B41J2/44 , B41J2/46 , G06K1/12 , G06K17/00 , H04N1/00 , G01D15/10 , G01D9/42 , G03B27/58 , G03B27/62
CPC分类号： G06K17/00 , G06K1/126
摘要： A plotter for recording data from a modulated laser beam onto a recording medium mounted covering the aperture of an aperture card wherein the aperture is located toward one end of the aperture card with a blank margin on either side of the aperture, the plotter including an aperture card supply module for supplying the aperture card from a plurality of aperture cards, a carriage module having a recording station and a platen member for stepping the aperture card past the recording station, a laser scanning module for scanning a row of data from the modulated laser beam laterally across the recording medium through the recording station as the recording medium is stepped past the recording station by the platen member, a dry developer module for developing the data recorded on the recording medium by the laser scanning module, a feed path from the aperture card supply module through the carriage module and the dry developer module, and transport apparatus for transporting the aperture card along the feed path from the aperture card supply module, through the carriage module and the dry developer module. The plotter also includes a printer module along the feed path for printing titling information on the aperture card.
摘要翻译：一种用于将数据从调制的激光束记录到安装在覆盖光圈卡片孔径上的记录介质上的绘图仪，其中孔径位于光圈卡片的一端，孔径两侧具有空白边缘，用于从多个光圈卡提供光圈卡的卡片供应模块，具有记录站的滑架模块和用于使孔径卡通过记录站的压板部件，用于从调制激光器扫描数据行的激光扫描模块当记录介质通过压板构件跨过记录站时横过记录介质横过记录介质;用于通过激光扫描模块显影记录在记录介质上的数据的干式显影剂模块，卡片供应模块通过滑架模块和干式显影剂模块，以及用于传送孔的输送装置卡片沿着光圈卡供应模块的馈送路径，通过滑架模块和干式显影剂模块。绘图仪还包括沿着馈送路径的打印机模块，用于在孔卡上打印标题信息。

7. 发明授权

US4764778A Intensity controller for an aperture card plotter 失效
标题翻译：光圈卡片仪的强度控制器
公开(公告)号：US4764778A
公开(公告)日：1988-08-16
申请号：US42406
申请日：1987-04-24
申请人： Semyon Spektor , Michael H. Ranger
发明人： Semyon Spektor , Michael H. Ranger
IPC分类号： B41J2/44 , G06K15/12 , H04N1/113 , H04N1/23 , G01D15/00
CPC分类号： G06K15/1204 , G06K15/1214 , G06K15/1295
摘要： A system for controlling the intensity of a scanning laser beam used to plot a computer-output microfilm image on an aperture card. The intensity of the beam is controlled by an acousto-optic modulator, which varies the light contained in various components of the modulated output. The first order beam is used for scanning the microfilm because it can be varied from its maximum intensity down to essentially cut-off without requiring large amounts of modulator drive. The intensity control is accomplished in two stages. First, before each scan across the microfilm, a known fraction of the first order beam is split off and sensed for intensity level. This level is directly proportional to the scan beam intensity. The sensed level is then compared to a preset voltage representing the proper exposure operating point for that manufacturer's microfilm characteristics. An error signal is produced by the comparison and is fed into a hold circuit. During this non-microfilm scanning portion of the cycle, the error signal updates the modulator drive level to continuously vary the modulated beam intensity in a way to minimize the error signal, thus, in closed-loop fashion the scan beam intensity is controlled to the proper exposure operating point. Second, as each scan line of the microfilm begins, the hold circuit is switched to "hold" mode so the intensity level sensed before the scan is the level that is held during the subsequent scan. During the scan, pixel data is modulated to the "held" intensity level in order to control the modulation of the scan beam intensity to the operating level. By modulating the beam in a purely binary fashion according to pixel data as it scans across the microfilm, a microfilm image is reproduced.
摘要翻译：用于控制用于在孔卡上绘制计算机输出的微缩胶片图像的扫描激光束的强度的系统。光束的强度由声光调制器控制，声光调制器改变调制输出的各种分量中包含的光。第一级光束用于扫描微缩胶片，因为它可以从其最大强度下降到基本截止，而不需要大量的调制器驱动。强度控制分两个阶段完成。首先，在微缩胶片的每次扫描之前，将第一级光束的已知部分分离并感测强度级别。该电平与扫描光束强度成正比。然后将感测到的电平与表示该制造商的微缩胶片特性的适当曝光工作点的预设电压进行比较。通过比较产生误差信号，并将其馈送到保持电路。在该周期的非微缩胶片扫描部分期间，误差信号更新调制器驱动电平，以便以最小化误差信号的方式连续地改变调制的光束强度，因此以闭环方式将扫描光束强度控制到适当的曝光作业点。第二，当微缩胶卷的每个扫描线开始时，保持电路被切换到“保持”模式，使得在扫描之前感测的强度水平是在随后的扫描期间保持的电平。在扫描期间，将像素数据调制到“保持的”强度水平，以便将扫描光束强度的调制控制到操作水平。通过在扫描微缩胶片时根据像素数据以纯粹的二进制方式调制光束，再现微缩胶卷图像。

8. 发明授权

US5505235A Container having a breakable pouring cap 失效
标题翻译：容器具有易碎的浇注盖
公开(公告)号：US5505235A
公开(公告)日：1996-04-09
申请号：US199719
申请日：1994-02-22
申请人： Mark Gorokhovsky , Semyon Spektor , Gennady Gorokhovsky
发明人： Mark Gorokhovsky , Semyon Spektor , Gennady Gorokhovsky
IPC分类号： B65D47/36 , B65D51/24 , F01M11/04 , F16N37/00 , B65D25/08
CPC分类号： B65D51/24 , B65D47/36 , F01M11/04 , F16N2037/006
摘要： A container having a breakable pouring cap (116) for pouring oil into an oil tank (114). The cap (112) is snapped onto a neck portion (116) through the engagement of an inner projection (146) on the open end of the cap (112) and an outward annular projection (122) on the neck portion (116) of the container. The cap is sealed by means of a pair of annular radial projections (122 and 124) on the outer surface of the neck portion (116) of the container, these projections having sliding fit with the inner surface of the cap (112). The end face of the neck portion (116) is skewed and forms a piercing tip (130) at its lowermost end and a cutting edge (128) on the remaining peripheral portion of the end face. In use, the container is inserted in an inverted position so that the breakable cap extends into an inlet opening (111), e.g., of the oil tank. Radial ribs (142) are wedged in the inlet opening by applying an axial force to the container body (110), and the body is then pushed down, whereby the piercing tip (130) pierces the bottom portion (134) of the cap; with the further downward movement of the container, the cutting edge (128) shears the bottom portion and thus opens the container, allowing the oil to flow into the motor oil tank (114). In another embodiment, the cap and the neck are provided with additional sealing means in the form of inner radial segments (302 and 304) on inner surface of the cap and outer projections (306 and 308) on the neck. When the cap is snapped onto the neck and then is twisted, the segments and projections form a tight fit.
摘要翻译：具有用于将油倾倒到油箱（114）中的易燃倾倒盖（116）的容器。帽（112）通过盖子（112）的开口端上的内部突起（146）和颈部（112）的颈部（116）上的向外的环形突起（122）的接合而卡扣在颈部部分116上，容器盖子通过在容器的颈部部分（116）的外表面上的一对环形径向突起（122和124）密封，这些突起与盖子112的内表面滑动配合。颈部（116）的端面偏斜，并在其最下端形成穿刺尖端（130），在端面的剩余周边部分形成切割刃（128）。在使用中，容器被插入倒置的位置，使得可破坏的盖子延伸到例如油箱的入口开口（111）中。径向肋（142）通过向容器主体（110）施加轴向力而楔入入口中，然后向下推动主体，由此刺穿尖端（130）刺穿盖的底部部分（134）; 随着容器的进一步向下运动，切割边缘（128）剪切底部部分，从而打开容器，允许油流入马达油箱（114）。在另一个实施例中，盖和颈部设置有在帽的内表面上的内径向段（302和304）和颈部上的外突出部（306和308）的形式的附加密封装置。当帽子卡在颈部上然后被扭曲时，这些片段和突起形成紧密配合。

9. 发明授权

US5316058A Container having a self-opening pouring spout 失效
标题翻译：容器具有自开式倾倒口
公开(公告)号：US5316058A
公开(公告)日：1994-05-31
申请号：US944960
申请日：1992-09-15
申请人： Semyon Spektor , Mark Gozokhovsky
发明人： Semyon Spektor , Mark Gozokhovsky
IPC分类号： B65D47/36 , B65D25/08
CPC分类号： B65D47/36
摘要： A container having a pouring spout for pouring oil into an engine (14). The container has a cap (24) which is screwed onto a neck portion (16) of the container. The cap (24) has radial ribs (32) tapering toward the cap bottom (28). The end of the neck portion (20) has a reduced diameter and is aligned with a breakable portion (28a) formed in the cap bottom. In use, the container is inserted in an inverted position so that the spout attends into an inlet opening (11) of the engine. Radial ribs (32) are wedged in the inlet opening by applying an axial force to the container body (10), and the body is then rotated with respect to the immovable cap (24). As a result of this rotation, the reduced-diameter portion (20) of the container neck moves axially toward the breakable portion (28a) until the portion (20) breaks it, thus opening the container and allowing the oil to flow into the engine oil tank (14). Provision of ribs (32) forms air gaps (34) between the outer surface of the cap (24) and the inlet opening (11). This accelerates outflow of the oil. A part of the breakable portion (28a) remains with an increased thickness, so that the broken portion does not fall into the oil tank of the engine but remains connected to the container. The oil filling operation is clean, and the used container can be conveniently discarded as a single unit. In the second embodiment, a cap (24a) is snapped on a neck portion of the container, and the axial displacement of a container body (10a), which breaks a bottom portion (29), is performed manually, i.e., without the use of threads.
摘要翻译：具有用于将油倾倒到发动机（14）中的倾倒嘴的容器。该容器具有螺栓连接到容器的颈部（16）上的盖（24）。盖（24）具有朝向帽底（28）逐渐变细的径向肋（32）。颈部（20）的端部具有减小的直径并且与形成在帽底部中的可破坏部分（28a）对准。在使用中，容器被插入倒立的位置，使得喷嘴进入发动机的入口（11）。径向肋（32）通过向容器主体（10）施加轴向力而楔入入口中，然后主体相对于不可移动的盖（24）旋转。作为这种旋转的结果，容器颈部的直径减小部分（20）朝向可破坏部分（28a）轴向移动，直到部分（20）破裂，从而打开容器并允许油流入发动机油箱（14）。设置肋（32）在盖（24）的外表面和入口开口（11）之间形成气隙（34）。这加速了油的流出。可破坏部分（28a）的一部分保持厚度增加，使得断裂部分不会落入发动机的油箱中，而是保持与容器连接。注油操作是干净的，用过的容器可以方便地作为一个单元丢弃。在第二实施例中，帽（24a）卡在容器的颈部上，并且手动地执行破坏底部（29）的容器主体（10a）的轴向位移，即不使用线程。

10. 发明授权

US4779473A Gimbal apparatus for translating rotational motion to accurate linear motion 失效
标题翻译：用于将旋转运动转换为准确的线性运动的平衡器装置
公开(公告)号：US4779473A
公开(公告)日：1988-10-25
申请号：US56170
申请日：1987-06-01
申请人： Robert J. Grady , Rolf D. Kahle , Michael H. Ranger , Semyon Spektor , Michael Veprinsky
发明人： Robert J. Grady , Rolf D. Kahle , Michael H. Ranger , Semyon Spektor , Michael Veprinsky
IPC分类号： B23Q5/40 , F16H25/24 , F16H25/22 , B23Q23/00
CPC分类号： F16H25/24 , B23Q5/408 , F16H2025/2445 , Y10T74/1868
摘要： A lead screw driven by a motor has a drive nut threadably connected to the lead screw for reciprocation therealong. The drive nut is rotationally restrained thereby limiting its movement along the axis of the lead screw. Three disk members each having an opening through their centers are positioned on the lead screw. The two outer disk members each have at least a pair of bearing members, such as ball bearings, positioned along a diameter of the disk on adjacent sides of the opening. A keeper member is positioned on the lead screw to sandwich the three disk members between the drive nut and the keeper member. Indexing members are positioned on the drive nut and the keeper member to maintain the diameters of the two outer disks, having the bearings mounted therein, orthogonal with respect to each other. A linear motion device is rigidly coupled to the keeper member such that rotary motion of the lead screw is translated to the linear motion device without flexure, eccentricities, or other undesirable movement of the lead screw being transmitted to the linear motion device.
摘要翻译：由电动机驱动的导螺杆具有螺纹连接到导螺杆的驱动螺母，用于在其上往复运动。旋转地限制驱动螺母，从而限制其沿着导螺杆的轴线的运动。每个具有通过其中心的开口的三个盘构件定位在导螺杆上。两个外盘构件各自具有至少一对轴承构件，例如球轴承，其沿着开口的相邻侧上的盘的直径定位。保持器构件定位在导螺杆上以将三个盘构件夹在驱动螺母和保持构件之间。分度构件定位在驱动螺母和保持构件上以保持其中安装有轴承的两个外盘的直径相对于彼此正交。直线运动装置刚性地联接到保持器构件，使得导螺杆的旋转运动被转换成直线运动装置，而不会弯曲，偏心或传递到线性运动装置的丝杆的其它不希望的运动。

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