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1. 发明申请

US20070095281A1 System and method for power function ramping of microwave liner discharge sources 审中-公开
标题翻译：微波炉排放源电力功能斜坡的系统和方法
公开(公告)号：US20070095281A1
公开(公告)日：2007-05-03
申请号：US11264540
申请日：2005-11-01
申请人： Michael Stowell , Michael Liehr , Stephan Wieder , Jose Dieguez-Campo
发明人： Michael Stowell , Michael Liehr , Stephan Wieder , Jose Dieguez-Campo
IPC分类号： C23C16/00
CPC分类号： C23C16/515
摘要： One embodiment of the present invention is a system for depositing films on a substrate. This systems includes a vacuum chamber; a linear discharge tube housed inside the vacuum chamber; a magnetron configured to generate a microwave power signal that can be applied to the linear discharge tube; a power supply configured to provide a signal to the magnetron; and a pulse control connected to the power supply. The pulse control is configured to control the duty cycle of the plurality of pulses, the frequency of the plurality of pulses, and/or the contour of the plurality of pulses.
摘要翻译：本发明的一个实施例是用于在衬底上沉积膜的系统。该系统包括真空室; 容纳在真空室内的线性放电管; 磁控管，其被配置为产生可施加到所述线性放电管的微波功率信号; 电源，被配置为向磁控管提供信号; 以及连接到电源的脉冲控制。脉冲控制被配置为控制多个脉冲的占空比，多个脉冲的频率和/或多个脉冲的轮廓。

2. 发明申请

US20090014065A1 METHOD FOR THE PRODUCTION OF A TRANSPARENT CONDUCTIVE OXIDE COATING 审中-公开
标题翻译：用于生产透明导电氧化物涂层的方法
公开(公告)号：US20090014065A1
公开(公告)日：2009-01-15
申请号：US12171579
申请日：2008-07-11
申请人： Joachim Mueller , Jian Liu , Stephan Wieder
发明人： Joachim Mueller , Jian Liu , Stephan Wieder
IPC分类号： H01L31/0216 , C23C14/34
CPC分类号： C23C14/0036 , C23C14/086 , C23C14/352 , H01L31/022483 , H01L31/073 , H01L31/0749 , H01L31/1884 , Y02E10/541 , Y02E10/543 , Y02P70/521
摘要： The present invention concerns a method for the generation of a transparent conductive oxide coating (TCO layer), in particular a transparent conductive oxide coating as a transparent contact for thin section solar cells. The TCO layer consists at least of a first layer of high conductivity and a second layer of low conductivity, with the second layer generated by DC sputtering of at least one target, which contains zinc oxide and additionally aluminum, and the process atmosphere contains oxygen. Further, the present invention relates to a TCO layer as well as thin section solar cells on CIGS and CdTe basis.
摘要翻译：本发明涉及一种用于生产透明导电氧化物涂层（TCO层）的方法，特别是用于薄截面太阳能电池的透明导电氧化物涂层作为透明触点。 TCO层至少包括高导电性的第一层和低导电性的第二层，其中第二层通过至少一种含有氧化锌和另外的铝的靶的DC溅射产生，并且工艺气氛含有氧。此外，本发明涉及TCO层以及CIGS和CdTe基础上的薄截面太阳能电池。

3. 发明申请

US20090133631A1 COATING DEVICE AND METHOD OF PRODUCING AN ELECTRODE ASSEMBLY 审中-公开
标题翻译：涂覆装置和制造电极组件的方法
公开(公告)号：US20090133631A1
公开(公告)日：2009-05-28
申请号：US11944497
申请日：2007-11-23
申请人： Stephan Wieder
发明人： Stephan Wieder
IPC分类号： C23C16/00 , H01R43/00
CPC分类号： C23C16/45565 , C23C16/5096 , H01J37/3244 , H01J37/32449 , H01J37/32541 , Y10T29/53204
摘要： An electrode assembly 12 for a PECVD (Plasma Enhanced Chemical Vapour Deposition) coating installation comprises a base plate 13, a separation plate 14 and an electrode plate 15. The electrode plate 15 includes frame members 16. Fixing elements 17 are provided for fixing the electrode plate 15 to the base plate 13. Furthermore, the electrode assembly 12 comprises a plurality of gas distribution elements 2 that distribute process gas to provide a homogeneous plasma P above the surface of a substrate 19. In this way a uniform coating can be deposited on the substrate 19. The gas distribution elements 2 are modules having a similar or identical construction. Therefore, they may be manufactured in particular machines and handled easily before being integrated in an electrode assembly according to the present invention. Another advantage of the gas distribution system 1 is that due to the composition of the elements 2 (that may be formed like small cassettes or tiles) the construction of the electrode assembly according to the present invention is more stable than conventional electrode assemblies.
摘要翻译：用于PECVD（等离子体增强化学气相沉积）涂层装置的电极组件12包括基板13，分隔板14和电极板15.电极板15包括框架构件16.固定元件17用于固定电极板15连接到基板13.此外，电极组件12包括分配工艺气体的多个气体分配元件2，以在衬底19的表面上方提供均匀的等离子体P.以这种方式，可以将均匀的涂层沉积在基板19.气体分配元件2是具有相似或相同结构的模块。因此，它们可以在特定的机器中制造，并且在集成在根据本发明的电极组件之前易于处理。气体分配系统1的另一优点在于，由于元件2的组成（可以形成为小盒或砖），根据本发明的电极组件的结构比常规电极组件更稳定。

4. 发明申请

US20090061627A1 METHOD FOR PRODUCING A METAL BACKSIDE CONTACT OF A SEMICONDUCTOR COMPONENT, IN PARTICULAR, A SOLAR CELL 失效
标题翻译：用于制造特别是太阳能电池的半导体元件的金属背面接触的方法
公开(公告)号：US20090061627A1
公开(公告)日：2009-03-05
申请号：US12202123
申请日：2008-08-29
申请人： Roland Trassl , Jian Liu , Stephan Wieder , Juergen Henrich , Gerhard Rist
发明人： Roland Trassl , Jian Liu , Stephan Wieder , Juergen Henrich , Gerhard Rist
IPC分类号： H01L21/768 , H01L21/677
CPC分类号： H01L31/022425 , Y02E10/50
摘要： The present invention relates to a method for manufacturing a backside contact of a semiconductor component, in particular, of a solar cell, comprising a metallic layer on the backside of a substrate in a vacuum treatment chamber, and the use of a vacuum treatment system for performing said method. Through this method and its use, in particular silicon based solar cells, can be provided with a back contact in a simple manner in a continuous process sequence, wherein the process sequence can be provided particularly efficient and economical, since no handling systems for rotating the substrate are required, and in particular silk screening steps can be dispensed with.
摘要翻译：本发明涉及一种用于制造半导体部件，特别是太阳能电池的背面接触的方法，所述太阳能电池在真空处理室中在基板的背面上包括金属层，并且使用真空处理系统执行所述方法。通过这种方法及其使用，特别是硅基太阳能电池可以以连续的工艺顺序以简单的方式提供背面接触，其中可以提供特别有效和经济的工艺顺序，因为没有用于旋转基材是必需的，特别是可以省去丝印步骤。

5. 发明申请

US20080138502A1 METHOD FOR THE PRODUCTION OF AN SIN:H LAYER ON A SUBSTRATE 审中-公开
标题翻译：在基板上生产单层：H层的方法
公开(公告)号：US20080138502A1
公开(公告)日：2008-06-12
申请号：US11945693
申请日：2007-11-27
申请人： Roland TRASSL , Andreas Sauer , Stephan Wieder
发明人： Roland TRASSL , Andreas Sauer , Stephan Wieder
IPC分类号： C23C14/34 , B32B1/02
CPC分类号： H01L31/18 , H01L31/02168 , Y02E10/50 , Y10T428/13
摘要： The invention relates to a method for the production of an SiN:H layer on a substrate which converts light into electric voltage, wherein a silicon-containing target is sputtered and at least one reactive gas in introduced into the volume between target and substrate. The silicon-containing target is implemented in the form of a tube and is comprised of an Si-based alloy with an Al content of 2 to 50 wt. %.
摘要翻译：本发明涉及一种在衬底上制造SiN：H层的方法，该方法将光转换成电压，其中溅射含硅靶和至少一种反应性气体引入目标和衬底之间的体积。含硅靶以管的形式实施，并且由Al含量为2〜50wt。％的Si基合金构成。％。

6. 发明授权

US07763535B2 Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell 失效
标题翻译：用于制造半导体部件，特别是太阳能电池的金属背面接触的方法
公开(公告)号：US07763535B2
公开(公告)日：2010-07-27
申请号：US12202123
申请日：2008-08-29
申请人： Roland Trassl , Jian Liu , Stephan Wieder , Jürgen Henrich , Gerhard Rist
发明人： Roland Trassl , Jian Liu , Stephan Wieder , Jürgen Henrich , Gerhard Rist
IPC分类号： H01L23/488
CPC分类号： H01L31/022425 , Y02E10/50
摘要： The present invention relates to a method for manufacturing a backside contact of a semiconductor component, in particular, of a solar cell, comprising a metallic layer on the backside of a substrate in a vacuum treatment chamber, and the use of a vacuum treatment system for performing said method. Through this method and its use, in particular silicon based solar cells, can be provided with a back contact in a simple manner in a continuous process sequence, wherein the process sequence can be provided particularly efficient and economical, since no handling systems for rotating the substrate are required, and in particular silk screening steps can be dispensed with.
摘要翻译：本发明涉及一种用于制造半导体部件，特别是太阳能电池的背面接触的方法，所述太阳能电池在真空处理室中在基板的背面上包括金属层，并且使用真空处理系统执行所述方法。通过这种方法及其使用，特别是硅基太阳能电池可以以连续的工艺顺序以简单的方式提供背面接触，其中可以提供特别有效和经济的工艺顺序，因为没有用于旋转基材是必需的，特别是可以省去丝印步骤。

7. 发明申请

US20090291231A1 METHOD AND APPARATUS FOR PRODUCING A SOLAR CELL MODULE WITH INTEGRATED LASER PATTERNING 审中-公开
标题翻译：用于生产具有集成激光图案的太阳能电池模块的方法和装置
公开(公告)号：US20090291231A1
公开(公告)日：2009-11-26
申请号：US12124720
申请日：2008-05-21
申请人： Stephan Wieder
发明人： Stephan Wieder
IPC分类号： B05D3/06 , C23C16/00 , B05D5/12 , C23C14/34
CPC分类号： H01L21/67207 , H01L21/67173 , H01L31/18 , H01L31/1816 , H01L31/1876 , H01L31/202 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： The present invention refers to a method as well as an apparatus for producing a solar cell module having an array of photovoltaic cells on a common substrate, the apparatus comprising at least one treating chamber for depositing a layer on a substrate and at least one laser for patterning the deposited layer, wherein a treating chamber for laser patterning comprising means for setting up technical vacuum conditions is provided for.
摘要翻译：本发明涉及一种制造太阳能电池组件的方法和装置，所述太阳能电池模块具有在共同衬底上具有光伏电池阵列的装置，所述装置包括用于在衬底上沉积层的至少一个处理室和至少一个用于图案化沉积层，其中提供了包括用于设置技术真空条件的装置的用于激光图案的处理室。

8. 发明申请

US20090044754A1 SUCTION DEVICE FOR PLASMA COATING CHAMBER 审中-公开
标题翻译：用于等离子喷涂室的吸附装置
公开(公告)号：US20090044754A1
公开(公告)日：2009-02-19
申请号：US12039342
申请日：2008-02-28
申请人： Stephan Wieder , Tobias Repmann , Matthias Bibas , Ulf Stephan , Olaff Steinke
发明人： Stephan Wieder , Tobias Repmann , Matthias Bibas , Ulf Stephan , Olaff Steinke
IPC分类号： C23C16/54
CPC分类号： H01J37/3244 , C23C16/4412 , C23C16/50 , H01J37/32449 , H01J37/32623 , H01J37/32834 , H01J2237/3321
摘要： A device is disclosed for supporting a plasma-enhanced coating process. The device is disposed in the vicinity of a plasma and/or a substrate to be coated and/or an electrode provided for plasma generation. The device at least partially surrounds or limits a side or a plane of the plasma area or a plane in which the substrate or a carrying element carrying the substrate can be arranged, or of one of the electrodes or parts. The device comprises a cavity or a suction channel with one or several suction openings through which a gaseous medium can be suctioned off.
摘要翻译：公开了用于支持等离子体增强涂覆工艺的装置。该装置设置在待涂覆的等离子体和/或基底附近和/或用于等离子体产生的电极附近。该装置至少部分地围绕或限制等离子体区域的侧面或平面，或者可以布置其中可以布置有衬底或承载衬底的承载元件的平面，或者其中一个电极或部分。该装置包括具有一个或多个抽吸开口的空腔或抽吸通道，气体介质可以通过该抽吸通道被抽出。

9. 发明申请

US20080216747A1 Coating Installation And Gas Piping 审中-公开
标题翻译：涂层安装和气体管道
公开(公告)号：US20080216747A1
公开(公告)日：2008-09-11
申请号：US11849524
申请日：2007-09-04
申请人： Stephan Wieder , Tobias Repmann
发明人： Stephan Wieder , Tobias Repmann
IPC分类号： C23C16/00
CPC分类号： C23C16/45565
摘要： A coating installation coating installation includes a process chamber and a gas line system for supplying a gas into the process chamber. The gas line system has at least one feed opening for feeding gases into the gas line system and outlet openings for letting the gas out of the gas line system. Lines are each arranged between the feed opening(s) and the outlet openings. The flow resistance of the lines between the at least one feed opening and the outlet openings is essentially equally large. The gas line system has at least one branch point at which a first line section opens into at least three second line sections connected to the first line section. The first and second line sections are arranged in different levels and branch out like a tree structure. The line sections may be milled as a recess and/or depression in plates.
摘要翻译：涂装设备涂装设备包括处理室和用于将气体供应到处理室中的气体管线系统。气体管线系统具有用于将气体输送到气体管线系统中的至少一个进料口和用于使气体从气体管线系统排出的出口。管线各自布置在进料口和出口之间。至少一个进料口和出口之间的管线的流动阻力基本相等。气体管线系统具有至少一个分支点，在该分支点处，第一线路部分通向连接到第一线路段的至少三个第二线路部分。第一和第二线段布置在不同的层次上，像树结构一样分支。线段可以作为板中的凹陷和/或凹陷来研磨。

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