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    • 3. 发明授权
    • Formation of a metallic interlocking structure
    • 形成金属互锁结构
    • US06693031B2
    • 2004-02-17
    • US10039710
    • 2002-01-04
    • Gerald G. Advocate, Jr.Francis J. Downes, Jr.Luis J. MatienzoRonald A. KaschakJohn S. KresgeDaniel C. Van Hart
    • Gerald G. Advocate, Jr.Francis J. Downes, Jr.Luis J. MatienzoRonald A. KaschakJohn S. KresgeDaniel C. Van Hart
    • H01L2144
    • H01L23/5226H01L23/49827H01L2924/0002H05K3/0035H05K3/027H05K3/06H05K3/383H05K3/421H05K3/4644H05K2201/0248H05K2201/09509H05K2201/09563H05K2203/0307H05K2203/0353H01L2924/00
    • An electronic structure including a metallic interlocking structure for bonding a conductive plated layer to metal surface, and a method of forming the electronic structure. The method provides a substrate having a metallic sheet within a dielectric layer. The metallic sheet includes a metal such as copper. An opening in the substrate, such as a blind via, is formed by laser drilling through the dielectric layer and partially through the metallic sheet. If the opening is a blind via, then the laser drilling is within an outer ring of the blind via cross section using a laser beam having a target diameter between about 20% and about 150% of a radius of the blind via cross section. A surface at the bottom of the opening, called a “blind surface,” includes a metallic protrusion formed by the laser drilling, such that the metallic protrusion is integral with a portion of the blind surface. The metallic protrusion includes the metal of the metallic sheet and at least one constituent element from the dielectric layer. The metallic protrusion is then etched to form a metallic interlocking structure that is integral with the portion of the blind surface. The metallic interlocking structure includes discrete metallic fibers, with each metallic fiber having a curved (or curled) geometry. Each metallic fiber has its own unique composition that includes the metal, at least one constituent element of the dielectric layer, or both.
    • 一种电子结构,包括用于将导电镀层接合到金属表面的金属互锁结构,以及形成电子结构的方法。 该方法提供了在电介质层内具有金属片的衬底。 金属片包括铜等金属。 通过激光钻孔穿过电介质层并且部分地穿过金属片,形成诸如盲孔之类的衬底中的开口。 如果开口是盲孔,则激光钻孔是通过横截面的盲孔通过横截面的半径的约20%至约150%之间的目标直径的激光束在盲孔的外环内。 在开口底部的称为“盲面”的表面包括通过激光钻孔形成的金属突起,使得金属突起与盲表面的一部分成一体。 金属突起包括金属片的金属和来自电介质层的至少一个构成元件。 然后蚀刻金属突起以形成与盲表面的一部分成一体的金属互锁结构。 金属互锁结构包括分立的金属纤维,每个金属纤维具有弯曲(或卷曲)的几何形状。 每种金属纤维具有其独特的组成,其包括金属,介电层的至少一个构成元件,或两者。
    • 8. 发明授权
    • Metallic interlocking structure
    • 形成金属互锁结构
    • US06348737B1
    • 2002-02-19
    • US09517847
    • 2000-03-02
    • Gerald G. Advocate, Jr.Francis J. Downes, Jr.Luis J. MatienzoRonald A. KaschakJohn S. KresgeDaniel C. Van Hart
    • Gerald G. Advocate, Jr.Francis J. Downes, Jr.Luis J. MatienzoRonald A. KaschakJohn S. KresgeDaniel C. Van Hart
    • H01L2348
    • H01L23/5226H01L23/49827H01L2924/0002H05K3/0035H05K3/027H05K3/06H05K3/383H05K3/421H05K3/4644H05K2201/0248H05K2201/09509H05K2201/09563H05K2203/0307H05K2203/0353H01L2924/00
    • An electronic structure including a metallic interlocking structure for bonding a conductive plated layer to metal surface, and a method of forming the electronic structure. The method provides a substrate having a metallic sheet within a dielectric layer. The metallic sheet includes a metal such as copper. An opening in the substrate, such as a blind via, is formed by laser drilling through the dielectric layer and partially through the metallic sheet. If the opening is a blind via, then the laser drilling is within an outer ring of the blind via cross section using a laser beam having a target diameter between about 20% and about 150% of a radius of the blind via cross section. A surface at the bottom of the opening, called a “blind surface,” includes a metallic protrusion formed by the laser drilling, such that the metallic protrusion is integral with a portion of the blind surface. The metallic protrusion includes the metal of the metallic sheet and at least one constituent element from the dielectric layer. The metallic protrusion is then etched to form a metallic interlocking structure that is integral with the portion of the blind surface. The metallic interlocking structure includes discrete metallic fibers, with each metallic fiber having a curved (or curled) geometry. Each metallic fiber has its own unique composition that includes the metal, at least one constituent element of the dielectric layer, or both.
    • 一种电子结构,包括用于将导电镀层接合到金属表面的金属互锁结构,以及形成电子结构的方法。 该方法提供了在电介质层内具有金属片的衬底。 金属片包括铜等金属。 通过激光钻孔穿过电介质层并且部分地穿过金属片,形成诸如盲孔之类的衬底中的开口。 如果开口是盲孔,则激光钻孔是通过横截面的盲孔通过横截面的半径的约20%至约150%之间的目标直径的激光束在盲孔的外环内。 在开口底部的称为“盲面”的表面包括通过激光钻孔形成的金属突起,使得金属突起与盲表面的一部分成一体。 金属突起包括金属片的金属和来自电介质层的至少一个构成元件。 然后蚀刻金属突起以形成与盲表面的一部分成一体的金属互锁结构。 金属互锁结构包括分立的金属纤维,每个金属纤维具有弯曲(或卷曲)的几何形状。 每种金属纤维具有其独特的组成,其包括金属,介电层的至少一个构成元件,或两者。